DE69617890T2 - Beschleunigungsmessaufnehmer mit mitteln zur kompensation des gewichts und verfahren zu seiner herstellung - Google Patents
Beschleunigungsmessaufnehmer mit mitteln zur kompensation des gewichts und verfahren zu seiner herstellungInfo
- Publication number
- DE69617890T2 DE69617890T2 DE69617890T DE69617890T DE69617890T2 DE 69617890 T2 DE69617890 T2 DE 69617890T2 DE 69617890 T DE69617890 T DE 69617890T DE 69617890 T DE69617890 T DE 69617890T DE 69617890 T2 DE69617890 T2 DE 69617890T2
- Authority
- DE
- Germany
- Prior art keywords
- seismic mass
- gravity
- connecting means
- accelerometer according
- mechanical connecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 21
- 230000001133 acceleration Effects 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 230000005484 gravity Effects 0.000 claims description 47
- 239000010410 layer Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 239000002344 surface layer Substances 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000002019 doping agent Substances 0.000 claims description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 239000011733 molybdenum Substances 0.000 claims description 9
- 230000036316 preload Effects 0.000 claims description 9
- 230000001939 inductive effect Effects 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 8
- 238000012986 modification Methods 0.000 claims description 8
- 230000004048 modification Effects 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000000873 masking effect Effects 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 230000000694 effects Effects 0.000 description 14
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 241000446313 Lamella Species 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XACAZEWCMFHVBX-UHFFFAOYSA-N [C].[Mo] Chemical compound [C].[Mo] XACAZEWCMFHVBX-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9507077A FR2735580B1 (fr) | 1995-06-14 | 1995-06-14 | Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre |
| PCT/FR1996/000904 WO1997000451A1 (fr) | 1995-06-14 | 1996-06-13 | Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69617890D1 DE69617890D1 (de) | 2002-01-24 |
| DE69617890T2 true DE69617890T2 (de) | 2002-08-08 |
Family
ID=9479980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69617890T Expired - Lifetime DE69617890T2 (de) | 1995-06-14 | 1996-06-13 | Beschleunigungsmessaufnehmer mit mitteln zur kompensation des gewichts und verfahren zu seiner herstellung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5922955A (https=) |
| EP (1) | EP0776476B1 (https=) |
| JP (1) | JP4139436B2 (https=) |
| DE (1) | DE69617890T2 (https=) |
| FR (1) | FR2735580B1 (https=) |
| WO (1) | WO1997000451A1 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2764706B1 (fr) * | 1997-06-17 | 1999-07-09 | Commissariat Energie Atomique | Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication |
| JP2000097707A (ja) * | 1998-09-18 | 2000-04-07 | Fujitsu Ltd | 加速度センサ |
| FR2786749B1 (fr) | 1998-12-08 | 2001-02-16 | Pierre Gillet | Vehicule de type monotrace a roues stabilisatrices escamotables asservies a la vitesse |
| CA2366030A1 (en) * | 2001-12-20 | 2003-06-20 | Global E Bang Inc. | Profiling system |
| US6898970B2 (en) * | 2003-06-05 | 2005-05-31 | International Business Machines Corporation | Inertial navigation device for ion propulsion driven spacecraft |
| JP5354006B2 (ja) * | 2009-03-04 | 2013-11-27 | コニカミノルタ株式会社 | 平行移動機構および平行移動機構の製造方法 |
| US8528405B2 (en) * | 2009-12-04 | 2013-09-10 | The Charles Stark Draper Laboratory, Inc. | Flexure assemblies and methods for manufacturing and using the same |
| AT513634B1 (de) * | 2012-12-05 | 2015-02-15 | Univ Wien Tech | MEMS-Sensor zur Detektion von Umgebungsparametern |
| RU2556284C1 (ru) * | 2014-04-01 | 2015-07-10 | Открытое акционерное общество "Авангард" | Чувствительный элемент акселерометра на поверхностных акустических волнах |
| US11559037B2 (en) | 2018-05-23 | 2023-01-24 | Delaval Holding Ab | Animal tag, method and computer program for determining behavior-related data |
| BR112020026098A2 (pt) | 2018-06-22 | 2021-03-23 | Bissell Inc. | dispositivo de limpeza de superfície, sistema de sensoriamento, e, método para operar um aparelho de limpeza. |
| FR3102855B1 (fr) * | 2019-11-06 | 2021-12-03 | Commissariat Energie Atomique | Accelerometre performant presentant un encombrement reduit |
| US11474126B2 (en) | 2020-03-05 | 2022-10-18 | Quartz Seismic Sensors, Inc. | High precision rotation sensor and method |
| FR3145616B1 (fr) | 2023-02-07 | 2025-01-10 | Sercel Rech Const Elect | Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse |
| CN116609550B (zh) * | 2023-03-28 | 2024-04-30 | 南京高华科技股份有限公司 | Mems加速度计及其制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH399021A (de) * | 1964-02-19 | 1966-03-31 | Kistler Instrumente Ag | Beschleunigungs-Messgerät |
| US3893342A (en) * | 1973-05-21 | 1975-07-08 | Mark Products | Accelerometer |
| US4494409A (en) * | 1981-05-29 | 1985-01-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Engine vibration sensor |
| US4922756A (en) * | 1988-06-20 | 1990-05-08 | Triton Technologies, Inc. | Micro-machined accelerometer |
| US5134881A (en) * | 1986-06-22 | 1992-08-04 | Triton Technologies, Inc. | Micro-machined accelerometer with composite material springs |
| DE3740688A1 (de) * | 1987-12-01 | 1989-06-15 | Messerschmitt Boelkow Blohm | Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet |
| US5209117A (en) * | 1990-10-22 | 1993-05-11 | Motorola, Inc. | Tapered cantilever beam for sensors |
| US5129983A (en) * | 1991-02-25 | 1992-07-14 | The Charles Stark Draper Laboratory, Inc. | Method of fabrication of large area micromechanical devices |
| US5241864A (en) * | 1992-06-17 | 1993-09-07 | Motorola, Inc. | Double pinned sensor utilizing a tensile film |
-
1995
- 1995-06-14 FR FR9507077A patent/FR2735580B1/fr not_active Expired - Fee Related
-
1996
- 1996-06-13 DE DE69617890T patent/DE69617890T2/de not_active Expired - Lifetime
- 1996-06-13 US US08/776,845 patent/US5922955A/en not_active Expired - Fee Related
- 1996-06-13 WO PCT/FR1996/000904 patent/WO1997000451A1/fr not_active Ceased
- 1996-06-13 EP EP96922919A patent/EP0776476B1/fr not_active Expired - Lifetime
- 1996-06-13 JP JP50271897A patent/JP4139436B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10504401A (ja) | 1998-04-28 |
| FR2735580A1 (fr) | 1996-12-20 |
| WO1997000451A1 (fr) | 1997-01-03 |
| US5922955A (en) | 1999-07-13 |
| DE69617890D1 (de) | 2002-01-24 |
| EP0776476A1 (fr) | 1997-06-04 |
| JP4139436B2 (ja) | 2008-08-27 |
| FR2735580B1 (fr) | 1997-07-18 |
| EP0776476B1 (fr) | 2001-12-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69617890T2 (de) | Beschleunigungsmessaufnehmer mit mitteln zur kompensation des gewichts und verfahren zu seiner herstellung | |
| DE69003339T2 (de) | Beschleunigungsmesser mit koplanaren symmetrischen kraftübertragern. | |
| DE69821005T2 (de) | Aufhängungsanordnung für halbleiterbeschleunigungsmesser | |
| DE69429731T2 (de) | Doppelpendel beschleunigungsmesser | |
| DE69411449T2 (de) | Fühlerelement für Beschleunigungsmesser | |
| DE69718467T2 (de) | Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln | |
| DE102018220508B4 (de) | Verfahren zum Bilden von Vorrichtungen mit lokalisierter Einstellung von Verformung und mechanischer Spannung | |
| DE3223987C2 (de) | Beschleunigungsmesser | |
| DE69925803T2 (de) | Mikromechanischer halbleiter-beschleunigungssensor | |
| DE3938624A1 (de) | Resonanzbruecken-mikrobeschleunigungs-messfuehler | |
| DE69504342T2 (de) | Aufbau und herstellungsverfahren eines kapazitiven sensors mit anodisch verbundener elektrode | |
| DE69306687T2 (de) | Seitwärts empfindlicher Beschleunigungsmesser sowie Verfahren zu seiner Herstellung | |
| DE69518052T2 (de) | Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems | |
| DE69403543T2 (de) | Verfahren zur Herstellung eines Bewegungsmessaufnehmers | |
| DE69822756T2 (de) | Mikromechanischer Schwingkreisel | |
| DE19810534A1 (de) | Mehrachsenbeschleunigungssensor und Herstellungsverfahren eines Mehrachsenbeschleunigungssensor | |
| DE69616706T2 (de) | Piezoresistiver Kraftausgleichsbeschleunigungsmesser | |
| EP0981755B1 (de) | Beschleunigungssensor | |
| DE19526903A1 (de) | Drehratensensor | |
| CH673897A5 (https=) | ||
| DE102006048381A1 (de) | Sensor zur Erfassung von Beschleunigungen | |
| DE102010038809A1 (de) | Inertialsensor und Verfahren zum Herstellen eines Inertialsensors | |
| DE69736429T2 (de) | Tunneleffektmessaufnehmer mit linearer kraftrückkopplung | |
| CH699264B1 (de) | Trägheitssensor. | |
| DE60318204T2 (de) | Verfahren zur herstellung eines monolithischen silizium-beschleunigungsaufnehmers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |