DE69718467T2 - Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln - Google Patents

Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln

Info

Publication number
DE69718467T2
DE69718467T2 DE69718467T DE69718467T DE69718467T2 DE 69718467 T2 DE69718467 T2 DE 69718467T2 DE 69718467 T DE69718467 T DE 69718467T DE 69718467 T DE69718467 T DE 69718467T DE 69718467 T2 DE69718467 T2 DE 69718467T2
Authority
DE
Germany
Prior art keywords
linearities
compensation
sensors
double
order non
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69718467T
Other languages
English (en)
Other versions
DE69718467D1 (de
Inventor
Graeme A Blake
Paul H Collins
Steven A Foote
Ronald B Leonardson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of DE69718467D1 publication Critical patent/DE69718467D1/de
Application granted granted Critical
Publication of DE69718467T2 publication Critical patent/DE69718467T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE69718467T 1996-06-11 1997-06-11 Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln Expired - Fee Related DE69718467T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US1956696P 1996-06-11 1996-06-11
PCT/US1997/010240 WO1997047977A1 (en) 1996-06-11 1997-06-11 Compensation of second-order non-linearity in sensors employing double-ended tuning forks

Publications (2)

Publication Number Publication Date
DE69718467D1 DE69718467D1 (de) 2003-02-20
DE69718467T2 true DE69718467T2 (de) 2003-09-25

Family

ID=21793885

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718467T Expired - Fee Related DE69718467T2 (de) 1996-06-11 1997-06-11 Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln

Country Status (4)

Country Link
US (4) US6282959B1 (de)
EP (1) EP0904544B1 (de)
DE (1) DE69718467T2 (de)
WO (1) WO1997047977A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0904544B1 (de) 1996-06-11 2003-01-15 AlliedSignal Inc. Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln
US5962784A (en) * 1997-05-27 1999-10-05 Alliedsignal Inc. Micromachined rate and acceleration sensor
WO2001057540A1 (en) * 2000-02-03 2001-08-09 Honeywell International Inc. Trim balancing of second-order non-linearity in double ended tuning fork resonators
US6662658B2 (en) * 2001-01-17 2003-12-16 Honeywell International, Inc. Whiffletree accelerometer
KR20030097874A (ko) 2001-05-15 2003-12-31 허니웰 인터내셔널 인코포레이티드 가속도 측정기 스트레인 경감 구조
FR2842914B1 (fr) * 2002-07-26 2004-08-27 Sagem Capteur inertiel compact
US6938334B2 (en) * 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
US7069790B1 (en) * 2005-05-17 2006-07-04 Honeywell International Inc. Systems and methods for measuring relative thermal expansion coefficient of low thermal coefficient of expansion materials
GB201009062D0 (en) 2010-05-28 2010-07-14 Cambridge Entpr Ltd MEMS inertial sensor and method of inertial sensing
CN105866470A (zh) * 2016-05-05 2016-08-17 中国工程物理研究院电子工程研究所 一种一体式石英双振梁加速度计
JP6297663B1 (ja) * 2016-12-13 2018-03-20 京セラ株式会社 電子機器、補正制御方法、及び補正制御プログラム
US11079227B2 (en) 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US10705112B1 (en) 2019-04-22 2020-07-07 Honeywell International Inc. Noise rejection for optomechanical devices
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11119114B2 (en) 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
US11372019B2 (en) 2019-08-13 2022-06-28 Honeywell International Inc. Optomechanical resonator stabilization for optomechanical devices
US11287441B2 (en) * 2019-11-07 2022-03-29 Honeywell International Inc. Resonator including one or more mechanical beams with added mass
US11567100B2 (en) * 2019-11-07 2023-01-31 Honeywell International Inc. Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
US11703521B2 (en) * 2020-12-04 2023-07-18 Honeywell International Inc. MEMS vibrating beam accelerometer with built-in test actuators

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3702073A (en) 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4250757A (en) 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4446394A (en) * 1981-09-14 1984-05-01 The Singer Company Linearizing mechanism for a vibrating beam force transducer
EP0144311B1 (de) 1983-04-01 1992-07-15 Quartex, Inc. Doppelstabresonator-kraftwandler mit beschränkter longitudinal-pumpwirkung
US4597003A (en) * 1983-12-01 1986-06-24 Harry E. Aine Chemical etching of a semiconductive wafer by undercutting an etch stopped layer
US4658175A (en) * 1986-03-26 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with A-frame beam root and frequency adjusting means
US4766768A (en) * 1987-10-22 1988-08-30 Sundstrand Data Control, Inc. Accelerometer with isolator for common mode inputs
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US5005413A (en) * 1989-02-27 1991-04-09 Sundstrand Data Control, Inc. Accelerometer with coplanar push-pull force transducers
US5113698A (en) 1990-02-26 1992-05-19 Sundstrand Data Control, Inc. Vibrating beam transducer drive system
IL113556A (en) 1994-05-11 1998-04-05 Allied Signal Inc A double-ended collar
US5594170A (en) 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
US5948981A (en) * 1996-05-21 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometer
EP0904544B1 (de) * 1996-06-11 2003-01-15 AlliedSignal Inc. Kompensation von nichtlinearitäten zweiter ordnung in sensoren mit doppelend-stimmgabeln
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same

Also Published As

Publication number Publication date
EP0904544A1 (de) 1999-03-31
US6718292B1 (en) 2004-04-06
WO1997047977A1 (en) 1997-12-18
US20020157467A1 (en) 2002-10-31
US6282959B1 (en) 2001-09-04
EP0904544B1 (de) 2003-01-15
DE69718467D1 (de) 2003-02-20
US6484579B2 (en) 2002-11-26
US6789053B2 (en) 2004-09-07
US20030010122A1 (en) 2003-01-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee