DE69216862T2 - Verwendung von vanadium oxyd in mikrobolometer sensoren - Google Patents

Verwendung von vanadium oxyd in mikrobolometer sensoren

Info

Publication number
DE69216862T2
DE69216862T2 DE69216862T DE69216862T DE69216862T2 DE 69216862 T2 DE69216862 T2 DE 69216862T2 DE 69216862 T DE69216862 T DE 69216862T DE 69216862 T DE69216862 T DE 69216862T DE 69216862 T2 DE69216862 T2 DE 69216862T2
Authority
DE
Germany
Prior art keywords
oxyd
vanadium
microbolometer sensors
microbolometer
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69216862T
Other languages
English (en)
Other versions
DE69216862D1 (de
Inventor
R Wood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22231146&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69216862(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69216862D1 publication Critical patent/DE69216862D1/de
Application granted granted Critical
Publication of DE69216862T2 publication Critical patent/DE69216862T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0837—Microantennas, e.g. bow-tie
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1463—Pixel isolation structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14649—Infrared imagers
    • H01L27/1465—Infrared imagers of the hybrid type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
DE69216862T 1992-06-11 1992-06-11 Verwendung von vanadium oxyd in mikrobolometer sensoren Expired - Lifetime DE69216862T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1992/004893 WO1993025877A1 (en) 1992-06-11 1992-06-11 Use of vanadium oxide in microbolometer sensors

Publications (2)

Publication Number Publication Date
DE69216862D1 DE69216862D1 (de) 1997-02-27
DE69216862T2 true DE69216862T2 (de) 1997-06-12

Family

ID=22231146

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69216862T Expired - Lifetime DE69216862T2 (de) 1992-06-11 1992-06-11 Verwendung von vanadium oxyd in mikrobolometer sensoren

Country Status (5)

Country Link
EP (1) EP0645001B1 (de)
JP (1) JP2756730B2 (de)
CA (1) CA2133081C (de)
DE (1) DE69216862T2 (de)
WO (1) WO1993025877A1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012220207A1 (de) 2012-11-07 2014-05-08 Robert Bosch Gmbh Bildpixelvorrichtung zum Erfassen von elektromagnetischer Strahlung, Sensorarray zum Erfassen von elektromagnetischer Strahlung und Verfahren zum Erfassen von elektromagnetischer Strahlung mittels einer Bildpixelvorrichtung
US9276146B2 (en) 2012-05-16 2016-03-01 Robert Bosch Gmbh Infrared sensor device and method for producing an infrared sensor device
US9818792B2 (en) 2012-05-16 2017-11-14 Robert Bosch Gmbh Infrared sensor device and method for producing an infrared sensor device
EP4012362A1 (de) * 2020-12-11 2022-06-15 Basler AG System und verfahren zur ermittlung eines wärmebilds

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554849A (en) * 1995-01-17 1996-09-10 Flir Systems, Inc. Micro-bolometric infrared staring array
US5627112A (en) * 1995-11-13 1997-05-06 Rockwell International Corporation Method of making suspended microstructures
US6118124A (en) * 1996-01-18 2000-09-12 Lockheed Martin Energy Research Corporation Electromagnetic and nuclear radiation detector using micromechanical sensors
FI107407B (fi) * 1997-09-16 2001-07-31 Metorex Internat Oy Alimillimetriaalloilla toimiva kuvausjärjestelmä
JP3080093B2 (ja) 1998-09-01 2000-08-21 日本電気株式会社 ボロメータ用酸化物薄膜および該酸化物薄膜を用いた赤外線センサ
FR2788129B1 (fr) 1998-12-30 2001-02-16 Commissariat Energie Atomique Detecteur bolometrique a antenne
KR20030019772A (ko) * 2001-08-31 2003-03-07 (주)니즈 비냉각 방식의 열 감지 센서용 바나듐 다이옥사이드박막의 제조방법
FR2845157B1 (fr) 2002-10-01 2004-11-05 Commissariat Energie Atomique Detecteur bolometrique a antenne comportant un interrupteur et dispositif d'imagerie le comportant.
US7280078B2 (en) * 2004-11-20 2007-10-09 Scenterra, Inc. Sensor for detecting high frequency signals
FR2901609B1 (fr) * 2006-05-24 2009-01-16 Airbus France Sas Dispositif de controle non destructif d'une piece par analyse de dissipation de rayonnement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484611A (en) * 1967-05-16 1969-12-16 Hitachi Ltd Infrared detector composed of a sintered body of vanadium pentoxide and vanadium oxide
JPS4821363B1 (de) * 1967-12-31 1973-06-28

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9276146B2 (en) 2012-05-16 2016-03-01 Robert Bosch Gmbh Infrared sensor device and method for producing an infrared sensor device
US9818792B2 (en) 2012-05-16 2017-11-14 Robert Bosch Gmbh Infrared sensor device and method for producing an infrared sensor device
DE102012220207A1 (de) 2012-11-07 2014-05-08 Robert Bosch Gmbh Bildpixelvorrichtung zum Erfassen von elektromagnetischer Strahlung, Sensorarray zum Erfassen von elektromagnetischer Strahlung und Verfahren zum Erfassen von elektromagnetischer Strahlung mittels einer Bildpixelvorrichtung
US9274003B2 (en) 2012-11-07 2016-03-01 Robert Bosch Gmbh Image pixel apparatus for detecting electromagnetic radiation, sensor array for detecting electromagnetic radiation and method for detecting electromagnetic radiation by means of an image pixel apparatus
EP4012362A1 (de) * 2020-12-11 2022-06-15 Basler AG System und verfahren zur ermittlung eines wärmebilds
US11761821B2 (en) 2020-12-11 2023-09-19 Basler Ag System and method for thermal imaging

Also Published As

Publication number Publication date
DE69216862D1 (de) 1997-02-27
EP0645001B1 (de) 1997-01-15
CA2133081A1 (en) 1993-12-23
JPH07507141A (ja) 1995-08-03
JP2756730B2 (ja) 1998-05-25
CA2133081C (en) 2001-12-25
EP0645001A1 (de) 1995-03-29
WO1993025877A1 (en) 1993-12-23

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