DE69616706T2 - Piezoresistiver Kraftausgleichsbeschleunigungsmesser - Google Patents

Piezoresistiver Kraftausgleichsbeschleunigungsmesser

Info

Publication number
DE69616706T2
DE69616706T2 DE69616706T DE69616706T DE69616706T2 DE 69616706 T2 DE69616706 T2 DE 69616706T2 DE 69616706 T DE69616706 T DE 69616706T DE 69616706 T DE69616706 T DE 69616706T DE 69616706 T2 DE69616706 T2 DE 69616706T2
Authority
DE
Germany
Prior art keywords
force balancing
piezoresistive force
accelerometer
balancing accelerometer
piezoresistive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69616706T
Other languages
English (en)
Other versions
DE69616706D1 (de
Inventor
Gregory Donald Swanson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Inc
Original Assignee
Delphi Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delphi Technologies Inc filed Critical Delphi Technologies Inc
Publication of DE69616706D1 publication Critical patent/DE69616706D1/de
Application granted granted Critical
Publication of DE69616706T2 publication Critical patent/DE69616706T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
DE69616706T 1995-08-04 1996-07-01 Piezoresistiver Kraftausgleichsbeschleunigungsmesser Expired - Fee Related DE69616706T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/511,215 US5596144A (en) 1995-08-04 1995-08-04 Piezoresistive force rebalance accelerometer

Publications (2)

Publication Number Publication Date
DE69616706D1 DE69616706D1 (de) 2001-12-13
DE69616706T2 true DE69616706T2 (de) 2002-05-08

Family

ID=24033945

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616706T Expired - Fee Related DE69616706T2 (de) 1995-08-04 1996-07-01 Piezoresistiver Kraftausgleichsbeschleunigungsmesser

Country Status (3)

Country Link
US (1) US5596144A (de)
EP (1) EP0762133B1 (de)
DE (1) DE69616706T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19816802C2 (de) * 1998-04-16 2000-08-31 Daimler Chrysler Ag Piezoelektrischer Beschleunigungssensor
US6037748A (en) * 1998-06-15 2000-03-14 Motorola, Inc. Method and apparatus for control of an electronic system using intelligent movement detection
WO2000002028A1 (en) * 1998-07-07 2000-01-13 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
US6374677B1 (en) * 2000-02-22 2002-04-23 Xerox Corporation Micromechanical discrete time and frequency characterization of signals via resonator clamping and motion-arresting mechanisms
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
US8700191B2 (en) 2007-11-26 2014-04-15 The Boeing Company Controlled application of external forces to a structure for precision leveling and securing
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
US8774971B2 (en) 2010-02-01 2014-07-08 The Boeing Company Systems and methods for structure contour control
US9612256B2 (en) * 2013-02-20 2017-04-04 Northrop Grumman Guidance And Electronics Company, Inc. Range-dependent bias calibration of an accelerometer sensor system
US9612255B2 (en) * 2013-02-20 2017-04-04 Northrop Grumman Guidance And Electronic Company, Inc. Range-dependent bias calibration of an accelerometer sensor system
WO2015003264A1 (en) 2013-07-08 2015-01-15 Motion Engine Inc. Mems device and method of manufacturing
US10273147B2 (en) 2013-07-08 2019-04-30 Motion Engine Inc. MEMS components and method of wafer-level manufacturing thereof
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
WO2015103688A1 (en) 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
WO2015154173A1 (en) 2014-04-10 2015-10-15 Motion Engine Inc. Mems pressure sensor
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
WO2016112463A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
JP6489943B2 (ja) * 2015-06-01 2019-03-27 日本電波工業株式会社 センサ素子、物理センサ、及びセンサ素子の製造方法
CN105353167B (zh) * 2015-12-01 2019-02-01 广东合微集成电路技术有限公司 一种mems压阻式加速度传感器及其加工方法
CN106018879B (zh) * 2016-05-12 2019-03-22 广东合微集成电路技术有限公司 一种mems加速度传感器及制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
EP0542719A3 (de) * 1988-09-23 1993-06-02 Automotive Systems Laboratory Inc. Verfahren zur Bildung eines Wertes für die Empfindlichkeit eines Beschleunigungsmessaufnehmers
US5163325A (en) * 1988-09-23 1992-11-17 Automotive Systems Laboratory, Inc. Self-compensating accelerometer
JPH02194362A (ja) * 1989-01-24 1990-07-31 Toshiba Corp 加速度センサ
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US5177331A (en) * 1991-07-05 1993-01-05 Delco Electronics Corporation Impact detector
US5241864A (en) * 1992-06-17 1993-09-07 Motorola, Inc. Double pinned sensor utilizing a tensile film
US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
ATE178141T1 (de) * 1994-01-18 1999-04-15 Siemens Ag Tunneleffekt-sensor

Also Published As

Publication number Publication date
DE69616706D1 (de) 2001-12-13
EP0762133B1 (de) 2001-11-07
US5596144A (en) 1997-01-21
EP0762133A1 (de) 1997-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee