DE69616706D1 - Piezoresistiver Kraftausgleichsbeschleunigungsmesser - Google Patents
Piezoresistiver KraftausgleichsbeschleunigungsmesserInfo
- Publication number
- DE69616706D1 DE69616706D1 DE69616706T DE69616706T DE69616706D1 DE 69616706 D1 DE69616706 D1 DE 69616706D1 DE 69616706 T DE69616706 T DE 69616706T DE 69616706 T DE69616706 T DE 69616706T DE 69616706 D1 DE69616706 D1 DE 69616706D1
- Authority
- DE
- Germany
- Prior art keywords
- force balancing
- piezoresistive force
- accelerometer
- balancing accelerometer
- piezoresistive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/511,215 US5596144A (en) | 1995-08-04 | 1995-08-04 | Piezoresistive force rebalance accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69616706D1 true DE69616706D1 (de) | 2001-12-13 |
DE69616706T2 DE69616706T2 (de) | 2002-05-08 |
Family
ID=24033945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69616706T Expired - Fee Related DE69616706T2 (de) | 1995-08-04 | 1996-07-01 | Piezoresistiver Kraftausgleichsbeschleunigungsmesser |
Country Status (3)
Country | Link |
---|---|
US (1) | US5596144A (de) |
EP (1) | EP0762133B1 (de) |
DE (1) | DE69616706T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19816802C2 (de) * | 1998-04-16 | 2000-08-31 | Daimler Chrysler Ag | Piezoelektrischer Beschleunigungssensor |
US6037748A (en) * | 1998-06-15 | 2000-03-14 | Motorola, Inc. | Method and apparatus for control of an electronic system using intelligent movement detection |
EP1101079B1 (de) * | 1998-07-07 | 2003-09-10 | THE GOODYEAR TIRE & RUBBER COMPANY | Kapazitive auswerteschaltung mit zwei ausgängen |
US6374677B1 (en) * | 2000-02-22 | 2002-04-23 | Xerox Corporation | Micromechanical discrete time and frequency characterization of signals via resonator clamping and motion-arresting mechanisms |
US6536280B1 (en) * | 2000-09-12 | 2003-03-25 | Ic Mechanics, Inc. | Thin film MEMS sensors employing electrical sensing and force feedback |
US8700191B2 (en) * | 2007-11-26 | 2014-04-15 | The Boeing Company | Controlled application of external forces to a structure for precision leveling and securing |
US8171793B2 (en) * | 2008-07-31 | 2012-05-08 | Honeywell International Inc. | Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer |
US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
US8774971B2 (en) | 2010-02-01 | 2014-07-08 | The Boeing Company | Systems and methods for structure contour control |
US9612255B2 (en) * | 2013-02-20 | 2017-04-04 | Northrop Grumman Guidance And Electronic Company, Inc. | Range-dependent bias calibration of an accelerometer sensor system |
US9612256B2 (en) * | 2013-02-20 | 2017-04-04 | Northrop Grumman Guidance And Electronics Company, Inc. | Range-dependent bias calibration of an accelerometer sensor system |
WO2015003264A1 (en) | 2013-07-08 | 2015-01-15 | Motion Engine Inc. | Mems device and method of manufacturing |
US10273147B2 (en) | 2013-07-08 | 2019-04-30 | Motion Engine Inc. | MEMS components and method of wafer-level manufacturing thereof |
WO2015013828A1 (en) | 2013-08-02 | 2015-02-05 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
JP6590812B2 (ja) | 2014-01-09 | 2019-10-16 | モーション・エンジン・インコーポレーテッド | 集積memsシステム |
US20170030788A1 (en) | 2014-04-10 | 2017-02-02 | Motion Engine Inc. | Mems pressure sensor |
US11674803B2 (en) | 2014-06-02 | 2023-06-13 | Motion Engine, Inc. | Multi-mass MEMS motion sensor |
WO2016090467A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
WO2016112463A1 (en) | 2015-01-15 | 2016-07-21 | Motion Engine Inc. | 3d mems device with hermetic cavity |
JP6489943B2 (ja) * | 2015-06-01 | 2019-03-27 | 日本電波工業株式会社 | センサ素子、物理センサ、及びセンサ素子の製造方法 |
CN105353167B (zh) * | 2015-12-01 | 2019-02-01 | 广东合微集成电路技术有限公司 | 一种mems压阻式加速度传感器及其加工方法 |
CN106018879B (zh) * | 2016-05-12 | 2019-03-22 | 广东合微集成电路技术有限公司 | 一种mems加速度传感器及制造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
US5163325A (en) * | 1988-09-23 | 1992-11-17 | Automotive Systems Laboratory, Inc. | Self-compensating accelerometer |
DE68910641T2 (de) * | 1988-09-23 | 1994-04-28 | Automotive Systems Lab | Selbsteichender Beschleunigungsmesser. |
JPH02194362A (ja) * | 1989-01-24 | 1990-07-31 | Toshiba Corp | 加速度センサ |
JPH03134552A (ja) * | 1989-10-20 | 1991-06-07 | Hitachi Ltd | 自己較正機能付検出装置 |
US5233213A (en) * | 1990-07-14 | 1993-08-03 | Robert Bosch Gmbh | Silicon-mass angular acceleration sensor |
US5121180A (en) * | 1991-06-21 | 1992-06-09 | Texas Instruments Incorporated | Accelerometer with central mass in support |
US5177331A (en) * | 1991-07-05 | 1993-01-05 | Delco Electronics Corporation | Impact detector |
US5241864A (en) * | 1992-06-17 | 1993-09-07 | Motorola, Inc. | Double pinned sensor utilizing a tensile film |
US5503285A (en) * | 1993-07-26 | 1996-04-02 | Litton Systems, Inc. | Method for forming an electrostatically force balanced silicon accelerometer |
DE59505439D1 (de) * | 1994-01-18 | 1999-04-29 | Siemens Ag | Tunneleffekt-sensor |
-
1995
- 1995-08-04 US US08/511,215 patent/US5596144A/en not_active Expired - Fee Related
-
1996
- 1996-07-01 EP EP96201835A patent/EP0762133B1/de not_active Expired - Lifetime
- 1996-07-01 DE DE69616706T patent/DE69616706T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5596144A (en) | 1997-01-21 |
EP0762133B1 (de) | 2001-11-07 |
DE69616706T2 (de) | 2002-05-08 |
EP0762133A1 (de) | 1997-03-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |