DE29622968U1 - Mikromechanischer Beschleunigungssensor - Google Patents

Mikromechanischer Beschleunigungssensor

Info

Publication number
DE29622968U1
DE29622968U1 DE29622968U DE29622968U DE29622968U1 DE 29622968 U1 DE29622968 U1 DE 29622968U1 DE 29622968 U DE29622968 U DE 29622968U DE 29622968 U DE29622968 U DE 29622968U DE 29622968 U1 DE29622968 U1 DE 29622968U1
Authority
DE
Germany
Prior art keywords
acceleration sensor
micromechanical acceleration
micromechanical
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29622968U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FO, DE
Original Assignee
INST MIKRO und INFORMATIONSTEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST MIKRO und INFORMATIONSTEC filed Critical INST MIKRO und INFORMATIONSTEC
Priority to DE29622968U priority Critical patent/DE29622968U1/de
Publication of DE29622968U1 publication Critical patent/DE29622968U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
DE29622968U 1996-05-20 1996-05-20 Mikromechanischer Beschleunigungssensor Expired - Lifetime DE29622968U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29622968U DE29622968U1 (de) 1996-05-20 1996-05-20 Mikromechanischer Beschleunigungssensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29622968U DE29622968U1 (de) 1996-05-20 1996-05-20 Mikromechanischer Beschleunigungssensor
DE19620208 1996-05-20

Publications (1)

Publication Number Publication Date
DE29622968U1 true DE29622968U1 (de) 1997-08-28

Family

ID=26025842

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29622968U Expired - Lifetime DE29622968U1 (de) 1996-05-20 1996-05-20 Mikromechanischer Beschleunigungssensor

Country Status (1)

Country Link
DE (1) DE29622968U1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005088664A1 (ja) 2004-03-12 2005-09-22 Gunma Prefecture スイッチ機能を有するセンサ、その製造方法、およびこれらを組み込んだ電子機器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005088664A1 (ja) 2004-03-12 2005-09-22 Gunma Prefecture スイッチ機能を有するセンサ、その製造方法、およびこれらを組み込んだ電子機器
EP1734550A1 (de) * 2004-03-12 2006-12-20 Gunma Prefecture Sensor mit schaltfunktion, herstellungsverfahren dafür und elektronische einrichtung, in die der sensor eingebaut ist
EP1734550A4 (de) * 2004-03-12 2008-11-26 Gunma Prefecture Sensor mit schaltfunktion, herstellungsverfahren dafür und elektronische einrichtung, in die der sensor eingebaut ist
US7649150B2 (en) 2004-03-12 2010-01-19 Nittei Musen Co., Ltd. Sensor having switch function, manufacturing method thereof and electronic device having sensor built therein

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19971009

R081 Change of applicant/patentee

Owner name: HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FO, DE

Free format text: FORMER OWNER: INSTITUT FUER MIKRO- UND INFORMATIONSTECHNIK HAHN-SCHICKARD-GESELLSCHAFT, 78052 VILLINGEN-SCHWENNINGEN, DE

Effective date: 19980819

R081 Change of applicant/patentee

Owner name: HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FO, DE

Free format text: FORMER OWNER: HAHN-SCHICKARD-GESELLSCHAFT FUER ANGEWANDTE FORSCHUNG E.V., 78052 VILLINGEN-SCHWENNINGEN, DE

Effective date: 19990201

R150 Term of protection extended to 6 years

Effective date: 19990902

R151 Term of protection extended to 8 years

Effective date: 20020918

R152 Term of protection extended to 10 years

Effective date: 20040706

R071 Expiry of right