DE69518052T2 - Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems - Google Patents

Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems

Info

Publication number
DE69518052T2
DE69518052T2 DE69518052T DE69518052T DE69518052T2 DE 69518052 T2 DE69518052 T2 DE 69518052T2 DE 69518052 T DE69518052 T DE 69518052T DE 69518052 T DE69518052 T DE 69518052T DE 69518052 T2 DE69518052 T2 DE 69518052T2
Authority
DE
Germany
Prior art keywords
optomechanical
compensating
deformation
section
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69518052T
Other languages
English (en)
Other versions
DE69518052D1 (de
Inventor
Pierre Labeye
Eric Ollier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69518052D1 publication Critical patent/DE69518052D1/de
Publication of DE69518052T2 publication Critical patent/DE69518052T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE69518052T 1994-11-10 1995-11-07 Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems Expired - Fee Related DE69518052T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9413559A FR2726905B1 (fr) 1994-11-10 1994-11-10 Dispositif de compensation des deformations d'une partie d'un systeme optomecanique ou micromecanique

Publications (2)

Publication Number Publication Date
DE69518052D1 DE69518052D1 (de) 2000-08-24
DE69518052T2 true DE69518052T2 (de) 2001-03-22

Family

ID=9468734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69518052T Expired - Fee Related DE69518052T2 (de) 1994-11-10 1995-11-07 Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems

Country Status (4)

Country Link
US (1) US5848206A (de)
EP (1) EP0712004B1 (de)
DE (1) DE69518052T2 (de)
FR (1) FR2726905B1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6990264B2 (en) * 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
JPH10227986A (ja) * 1997-02-17 1998-08-25 Hitachi Ltd 光スイッチとその製造方法及び光スイッチを用いた光通信機器
FR2766920B1 (fr) * 1997-07-31 1999-08-27 Commissariat Energie Atomique Micromonochromateur et procede de realisation de celui-ci
FR2769380B1 (fr) * 1997-10-06 2000-12-01 Commissariat Energie Atomique Systeme de positionnement d'une microstructure optique
DE19934185A1 (de) * 1999-07-21 2001-01-25 Siemens Ag Optische Kopplungseinrichtung
DE10016869A1 (de) * 2000-04-05 2001-10-18 Deutsch Zentr Luft & Raumfahrt Mikrofunktionseinheit
US6539143B1 (en) * 2000-07-31 2003-03-25 Sarcon Microsystems, Inc. Optical switching system
US20020102061A1 (en) * 2000-08-09 2002-08-01 Robert Lang Planar waveguide optical switch and method of producing same
US6690847B2 (en) * 2000-09-19 2004-02-10 Newport Opticom, Inc. Optical switching element having movable optically transmissive microstructure
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
FR2820832B1 (fr) * 2001-02-12 2003-05-16 Opsitech Optical System Chip Dispositif d'actionnement d'une partie mobile d'une structure integree, en particulier munie de moyens de guidage optique
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US7003188B2 (en) * 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
FR2823860B1 (fr) * 2001-04-23 2003-07-04 Commissariat Energie Atomique Commutateur optique multivoie
US6490385B1 (en) * 2001-05-24 2002-12-03 Nortel Networks Limited Dimensionally stable device construction
JP2003050364A (ja) * 2001-06-01 2003-02-21 Hitachi Metals Ltd 光スイッチおよび光スイッチ組立体
US7062130B2 (en) 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide
US6980727B1 (en) 2004-12-13 2005-12-27 Xerox Corporation Methodology for a MEMS variable optical attenuator
US7242825B2 (en) * 2004-12-13 2007-07-10 Xerox Corporation Cantilever beam MEMS variable optical attenuator
JP4635023B2 (ja) * 2006-04-06 2011-02-16 株式会社東芝 Ｍｅｍｓ
US8904867B2 (en) * 2010-11-04 2014-12-09 Qualcomm Mems Technologies, Inc. Display-integrated optical accelerometer
US9778042B2 (en) * 2013-12-13 2017-10-03 Intel Corporation Opto-mechanical inertial sensor
US10564358B2 (en) * 2017-05-30 2020-02-18 Valorbec Societe En Commandite Micromechanically actuated deformable optical beam steering for wavelength tunable optical sources, filters and detectors
US11493531B2 (en) * 2019-11-07 2022-11-08 Honeywell International Inc. Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4353259A (en) * 1980-10-15 1982-10-12 Calspan Corporation Fiber optic acceleration sensor
SE439391B (sv) * 1983-10-14 1985-06-10 Ericsson Telefon Ab L M Fiberoptiskt kopplingsorgan
US4946247A (en) * 1988-09-29 1990-08-07 Fibercom, Inc. Fiber optic bypass switch
FR2660444B1 (fr) * 1990-03-27 1992-10-16 Commissariat Energie Atomique Commutateur et systeme de commutation optiques multivoies integres et procede de fabrication du commutateur.
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5239599A (en) * 1992-08-13 1993-08-24 Jds Fitel Inc. Moving fiber optical fiber switch

Also Published As

Publication number Publication date
FR2726905A1 (fr) 1996-05-15
EP0712004B1 (de) 2000-07-19
EP0712004A1 (de) 1996-05-15
FR2726905B1 (fr) 1996-12-06
US5848206A (en) 1998-12-08
DE69518052D1 (de) 2000-08-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee