JP4139436B2 - 重力補償型加速度計と同加速度計の製造方法 - Google Patents

重力補償型加速度計と同加速度計の製造方法 Download PDF

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Publication number
JP4139436B2
JP4139436B2 JP50271897A JP50271897A JP4139436B2 JP 4139436 B2 JP4139436 B2 JP 4139436B2 JP 50271897 A JP50271897 A JP 50271897A JP 50271897 A JP50271897 A JP 50271897A JP 4139436 B2 JP4139436 B2 JP 4139436B2
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Japan
Prior art keywords
seismic mass
force
gravity
accelerometer
stress
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Expired - Fee Related
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JP50271897A
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Japanese (ja)
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JPH10504401A (ja
JPH10504401A5 (https=
Inventor
ブラン，ジヤン
カプレ，ステフアンヌ
トウレ，パトリシア
リユジ，ジエラール
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コミサリア・ア・レネルジ・アトミク
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Pressure Sensors (AREA)
JP50271897A 1995-06-14 1996-06-13 重力補償型加速度計と同加速度計の製造方法 Expired - Fee Related JP4139436B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR95/07077 1995-06-14
FR9507077A FR2735580B1 (fr) 1995-06-14 1995-06-14 Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre
PCT/FR1996/000904 WO1997000451A1 (fr) 1995-06-14 1996-06-13 Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre

Publications (3)

Publication Number Publication Date
JPH10504401A JPH10504401A (ja) 1998-04-28
JPH10504401A5 JPH10504401A5 (https=) 2008-04-10
JP4139436B2 true JP4139436B2 (ja) 2008-08-27

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ID=9479980

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JP50271897A Expired - Fee Related JP4139436B2 (ja) 1995-06-14 1996-06-13 重力補償型加速度計と同加速度計の製造方法

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Country Link
US (1) US5922955A (https=)
EP (1) EP0776476B1 (https=)
JP (1) JP4139436B2 (https=)
DE (1) DE69617890T2 (https=)
FR (1) FR2735580B1 (https=)
WO (1) WO1997000451A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2764706B1 (fr) * 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
JP2000097707A (ja) * 1998-09-18 2000-04-07 Fujitsu Ltd 加速度センサ
FR2786749B1 (fr) 1998-12-08 2001-02-16 Pierre Gillet Vehicule de type monotrace a roues stabilisatrices escamotables asservies a la vitesse
CA2366030A1 (en) * 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
US6898970B2 (en) * 2003-06-05 2005-05-31 International Business Machines Corporation Inertial navigation device for ion propulsion driven spacecraft
JP5354006B2 (ja) * 2009-03-04 2013-11-27 コニカミノルタ株式会社 平行移動機構および平行移動機構の製造方法
US8528405B2 (en) * 2009-12-04 2013-09-10 The Charles Stark Draper Laboratory, Inc. Flexure assemblies and methods for manufacturing and using the same
AT513634B1 (de) * 2012-12-05 2015-02-15 Univ Wien Tech MEMS-Sensor zur Detektion von Umgebungsparametern
RU2556284C1 (ru) * 2014-04-01 2015-07-10 Открытое акционерное общество "Авангард" Чувствительный элемент акселерометра на поверхностных акустических волнах
US11559037B2 (en) 2018-05-23 2023-01-24 Delaval Holding Ab Animal tag, method and computer program for determining behavior-related data
BR112020026098A2 (pt) 2018-06-22 2021-03-23 Bissell Inc. dispositivo de limpeza de superfície, sistema de sensoriamento, e, método para operar um aparelho de limpeza.
FR3102855B1 (fr) * 2019-11-06 2021-12-03 Commissariat Energie Atomique Accelerometre performant presentant un encombrement reduit
US11474126B2 (en) 2020-03-05 2022-10-18 Quartz Seismic Sensors, Inc. High precision rotation sensor and method
FR3145616B1 (fr) 2023-02-07 2025-01-10 Sercel Rech Const Elect Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse
CN116609550B (zh) * 2023-03-28 2024-04-30 南京高华科技股份有限公司 Mems加速度计及其制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH399021A (de) * 1964-02-19 1966-03-31 Kistler Instrumente Ag Beschleunigungs-Messgerät
US3893342A (en) * 1973-05-21 1975-07-08 Mark Products Accelerometer
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US5134881A (en) * 1986-06-22 1992-08-04 Triton Technologies, Inc. Micro-machined accelerometer with composite material springs
DE3740688A1 (de) * 1987-12-01 1989-06-15 Messerschmitt Boelkow Blohm Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet
US5209117A (en) * 1990-10-22 1993-05-11 Motorola, Inc. Tapered cantilever beam for sensors
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5241864A (en) * 1992-06-17 1993-09-07 Motorola, Inc. Double pinned sensor utilizing a tensile film

Also Published As

Publication number Publication date
JPH10504401A (ja) 1998-04-28
FR2735580A1 (fr) 1996-12-20
WO1997000451A1 (fr) 1997-01-03
US5922955A (en) 1999-07-13
DE69617890D1 (de) 2002-01-24
EP0776476A1 (fr) 1997-06-04
DE69617890T2 (de) 2002-08-08
FR2735580B1 (fr) 1997-07-18
EP0776476B1 (fr) 2001-12-12

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