JPH10504401A5 - - Google Patents

Info

Publication number
JPH10504401A5
JPH10504401A5 JP1997502718A JP50271897A JPH10504401A5 JP H10504401 A5 JPH10504401 A5 JP H10504401A5 JP 1997502718 A JP1997502718 A JP 1997502718A JP 50271897 A JP50271897 A JP 50271897A JP H10504401 A5 JPH10504401 A5 JP H10504401A5
Authority
JP
Japan
Prior art keywords
seismic mass
gravity
stress
accelerometer
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997502718A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10504401A (ja
JP4139436B2 (ja
Filing date
Publication date
Priority claimed from FR9507077A external-priority patent/FR2735580B1/fr
Application filed filed Critical
Publication of JPH10504401A publication Critical patent/JPH10504401A/ja
Publication of JPH10504401A5 publication Critical patent/JPH10504401A5/ja
Application granted granted Critical
Publication of JP4139436B2 publication Critical patent/JP4139436B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP50271897A 1995-06-14 1996-06-13 重力補償型加速度計と同加速度計の製造方法 Expired - Fee Related JP4139436B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR95/07077 1995-06-14
FR9507077A FR2735580B1 (fr) 1995-06-14 1995-06-14 Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre
PCT/FR1996/000904 WO1997000451A1 (fr) 1995-06-14 1996-06-13 Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre

Publications (3)

Publication Number Publication Date
JPH10504401A JPH10504401A (ja) 1998-04-28
JPH10504401A5 true JPH10504401A5 (https=) 2008-04-10
JP4139436B2 JP4139436B2 (ja) 2008-08-27

Family

ID=9479980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50271897A Expired - Fee Related JP4139436B2 (ja) 1995-06-14 1996-06-13 重力補償型加速度計と同加速度計の製造方法

Country Status (6)

Country Link
US (1) US5922955A (https=)
EP (1) EP0776476B1 (https=)
JP (1) JP4139436B2 (https=)
DE (1) DE69617890T2 (https=)
FR (1) FR2735580B1 (https=)
WO (1) WO1997000451A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2764706B1 (fr) * 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
JP2000097707A (ja) * 1998-09-18 2000-04-07 Fujitsu Ltd 加速度センサ
FR2786749B1 (fr) 1998-12-08 2001-02-16 Pierre Gillet Vehicule de type monotrace a roues stabilisatrices escamotables asservies a la vitesse
CA2366030A1 (en) * 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
US6898970B2 (en) * 2003-06-05 2005-05-31 International Business Machines Corporation Inertial navigation device for ion propulsion driven spacecraft
JP5354006B2 (ja) * 2009-03-04 2013-11-27 コニカミノルタ株式会社 平行移動機構および平行移動機構の製造方法
US8528405B2 (en) * 2009-12-04 2013-09-10 The Charles Stark Draper Laboratory, Inc. Flexure assemblies and methods for manufacturing and using the same
AT513634B1 (de) * 2012-12-05 2015-02-15 Univ Wien Tech MEMS-Sensor zur Detektion von Umgebungsparametern
RU2556284C1 (ru) * 2014-04-01 2015-07-10 Открытое акционерное общество "Авангард" Чувствительный элемент акселерометра на поверхностных акустических волнах
US11559037B2 (en) 2018-05-23 2023-01-24 Delaval Holding Ab Animal tag, method and computer program for determining behavior-related data
BR112020026098A2 (pt) 2018-06-22 2021-03-23 Bissell Inc. dispositivo de limpeza de superfície, sistema de sensoriamento, e, método para operar um aparelho de limpeza.
FR3102855B1 (fr) * 2019-11-06 2021-12-03 Commissariat Energie Atomique Accelerometre performant presentant un encombrement reduit
US11474126B2 (en) 2020-03-05 2022-10-18 Quartz Seismic Sensors, Inc. High precision rotation sensor and method
FR3145616B1 (fr) 2023-02-07 2025-01-10 Sercel Rech Const Elect Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse
CN116609550B (zh) * 2023-03-28 2024-04-30 南京高华科技股份有限公司 Mems加速度计及其制备方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH399021A (de) * 1964-02-19 1966-03-31 Kistler Instrumente Ag Beschleunigungs-Messgerät
US3893342A (en) * 1973-05-21 1975-07-08 Mark Products Accelerometer
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US5134881A (en) * 1986-06-22 1992-08-04 Triton Technologies, Inc. Micro-machined accelerometer with composite material springs
DE3740688A1 (de) * 1987-12-01 1989-06-15 Messerschmitt Boelkow Blohm Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet
US5209117A (en) * 1990-10-22 1993-05-11 Motorola, Inc. Tapered cantilever beam for sensors
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5241864A (en) * 1992-06-17 1993-09-07 Motorola, Inc. Double pinned sensor utilizing a tensile film

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