DE69615161T2 - Verdampfer und flüssigkeitszuführungssystem unter dessen verwendung - Google Patents

Verdampfer und flüssigkeitszuführungssystem unter dessen verwendung

Info

Publication number
DE69615161T2
DE69615161T2 DE69615161T DE69615161T DE69615161T2 DE 69615161 T2 DE69615161 T2 DE 69615161T2 DE 69615161 T DE69615161 T DE 69615161T DE 69615161 T DE69615161 T DE 69615161T DE 69615161 T2 DE69615161 T2 DE 69615161T2
Authority
DE
Germany
Prior art keywords
evaporator
supply system
liquid supply
system used
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69615161T
Other languages
English (en)
Other versions
DE69615161D1 (de
Inventor
H Ewing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69615161D1 publication Critical patent/DE69615161D1/de
Application granted granted Critical
Publication of DE69615161T2 publication Critical patent/DE69615161T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01B—BOILING; BOILING APPARATUS ; EVAPORATION; EVAPORATION APPARATUS
    • B01B1/00—Boiling; Boiling apparatus for physical or chemical purposes ; Evaporation in general
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/221—Composite plate evaporators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/34—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping with one or more auxiliary substances
    • B01D3/343—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping with one or more auxiliary substances the substance being a gas
    • B01D3/346—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping with one or more auxiliary substances the substance being a gas the gas being used for removing vapours, e.g. transport gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24V—COLLECTION, PRODUCTION OR USE OF HEAT NOT OTHERWISE PROVIDED FOR
    • F24V99/00—Subject matter not provided for in other main groups of this subclass
DE69615161T 1995-02-24 1996-02-13 Verdampfer und flüssigkeitszuführungssystem unter dessen verwendung Expired - Lifetime DE69615161T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/393,723 US5553188A (en) 1995-02-24 1995-02-24 Vaporizer and liquid delivery system using same
PCT/US1996/002016 WO1996025990A1 (en) 1995-02-24 1996-02-13 Vaporizer and liquid delivery system using same

Publications (2)

Publication Number Publication Date
DE69615161D1 DE69615161D1 (de) 2001-10-18
DE69615161T2 true DE69615161T2 (de) 2002-01-31

Family

ID=23555979

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69615161T Expired - Lifetime DE69615161T2 (de) 1995-02-24 1996-02-13 Verdampfer und flüssigkeitszuführungssystem unter dessen verwendung

Country Status (8)

Country Link
US (1) US5553188A (de)
EP (1) EP0810898B1 (de)
JP (1) JP3270055B2 (de)
KR (1) KR100357347B1 (de)
CA (1) CA2210115A1 (de)
DE (1) DE69615161T2 (de)
HK (1) HK1005797A1 (de)
WO (1) WO1996025990A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10354031A1 (de) * 2003-11-19 2005-06-30 Micro Mechatronic Technologies Ag Verfahren und Vorrichtung zum Einbringen sehr geringer Flüssigkeitsmengen in einen Gasstrom

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE509732C2 (sv) * 1996-06-18 1999-03-01 Tsp Medical Ab Ånggenerator med reglerad till- och bortförsel av vatten
US6258170B1 (en) * 1997-09-11 2001-07-10 Applied Materials, Inc. Vaporization and deposition apparatus
US6216708B1 (en) 1998-07-23 2001-04-17 Micron Technology, Inc. On-line cleaning method for CVD vaporizers
JP2000271471A (ja) 1999-03-24 2000-10-03 Nippon M K S Kk 液体ソース供給システム及びその洗浄方法、気化器
KR100460746B1 (ko) * 1999-04-13 2004-12-09 주식회사 하이닉스반도체 반도체 소자의 구리 금속 배선 형성 방법
JP2001004095A (ja) * 1999-06-18 2001-01-09 Nippon M K S Kk 気化器
KR20010047128A (ko) * 1999-11-18 2001-06-15 이경수 액체원료 기화방법 및 그에 사용되는 장치
US6572707B1 (en) 2000-06-14 2003-06-03 Simplus Systems Corporation Vaporizer for sensitive precursors
US6811592B2 (en) * 2002-03-01 2004-11-02 Johnson & Johnson Vision Care, Inc. Thin film in-line degasser
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
US7717982B2 (en) * 2003-02-26 2010-05-18 Johnson & Johnson Vision Care, Inc. Thin film in-line degasser
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
US20080241805A1 (en) * 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
JP5226773B2 (ja) * 2008-04-11 2013-07-03 東芝三菱電機産業システム株式会社 均熱装置
IT1394382B1 (it) * 2009-06-23 2012-06-15 Dierre Finanziaria S P A Generatore di vapore istantaneo
JP5919089B2 (ja) * 2012-05-15 2016-05-18 Ckd株式会社 液体制御装置
WO2013181521A2 (en) 2012-05-31 2013-12-05 Advanced Technology Materials, Inc. Source reagent-based delivery of fluid with high material flux for batch deposition
JP5919115B2 (ja) * 2012-07-12 2016-05-18 Ckd株式会社 液体制御装置、及び液体制御装置に適用される網状体組立体
US9877509B2 (en) * 2014-03-31 2018-01-30 Westfield Limited (Ltd.) Micro-vaporizer heating element and method of vaporization
CN113171623B (zh) * 2021-04-28 2022-01-18 江苏固环环境科技有限公司 一种防止提前结晶的薄层干燥设备用布液器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US414207A (en) * 1889-11-05 Etienne gillet
US709926A (en) * 1901-02-19 1902-09-30 Edgard De Porto-Riche Steam-generator.
US1344303A (en) * 1919-01-23 1920-06-22 Electric Vapor Heater Company Electric vapor-heater for internal-combustion engines
US3119004A (en) * 1960-12-12 1964-01-21 Serafim M Koukios Flash chamber
FR2462654A1 (fr) * 1979-08-03 1981-02-13 Brenot Claude Generateur de vapeur a evaporation directe et application aux presses a repasser
CA1265289A (en) * 1985-12-16 1990-01-30 Viney Pal Aneja Method and apparatus for devolatilizing polymer solutions
US4724824A (en) * 1986-08-22 1988-02-16 The Lucks Company Instantaneous steam generator
JPH0817804B2 (ja) * 1987-12-23 1996-02-28 雪印乳業株式会社 殺菌剤気化装置
IT1226303B (it) * 1988-07-26 1990-12-27 Montedipe Spa Processo ed apparato per la devolatilizzazione di soluzioni di polimeri.
US5204314A (en) * 1990-07-06 1993-04-20 Advanced Technology Materials, Inc. Method for delivering an involatile reagent in vapor form to a CVD reactor
US5371828A (en) * 1991-08-28 1994-12-06 Mks Instruments, Inc. System for delivering and vaporizing liquid at a continuous and constant volumetric rate and pressure
JP3222518B2 (ja) * 1991-12-26 2001-10-29 キヤノン株式会社 液体原料気化装置および薄膜形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10354031A1 (de) * 2003-11-19 2005-06-30 Micro Mechatronic Technologies Ag Verfahren und Vorrichtung zum Einbringen sehr geringer Flüssigkeitsmengen in einen Gasstrom
DE10354031B4 (de) * 2003-11-19 2005-12-01 Micro Mechatronic Technologies Ag Vorrichtung zum Einbringen sehr geringer Flüssigkeitsmengen in einen Gasstrom

Also Published As

Publication number Publication date
KR100357347B1 (ko) 2003-01-10
JP3270055B2 (ja) 2002-04-02
EP0810898A4 (de) 1998-12-23
KR19980702452A (ko) 1998-07-15
EP0810898B1 (de) 2001-09-12
HK1005797A1 (en) 1999-01-29
WO1996025990A1 (en) 1996-08-29
CA2210115A1 (en) 1996-08-29
DE69615161D1 (de) 2001-10-18
JPH11500659A (ja) 1999-01-19
US5553188A (en) 1996-09-03
EP0810898A1 (de) 1997-12-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER, M., DIPL.-ING., PAT.-ANW., 58636 ISERLOH