DE69614223D1 - PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung - Google Patents

PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung

Info

Publication number
DE69614223D1
DE69614223D1 DE69614223T DE69614223T DE69614223D1 DE 69614223 D1 DE69614223 D1 DE 69614223D1 DE 69614223 T DE69614223 T DE 69614223T DE 69614223 T DE69614223 T DE 69614223T DE 69614223 D1 DE69614223 D1 DE 69614223D1
Authority
DE
Germany
Prior art keywords
gate
cell
threshold voltage
floating gate
over
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69614223T
Other languages
English (en)
Inventor
Shang-De T Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chingis Technology Corp USA
Original Assignee
Programmable Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Programmable Microelectronics Corp filed Critical Programmable Microelectronics Corp
Application granted granted Critical
Publication of DE69614223D1 publication Critical patent/DE69614223D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5621—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
    • G11C11/5642—Sensing or reading circuits; Data output circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5621—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5621—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
    • G11C11/5628—Programming or writing circuits; Data input circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5621—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
    • G11C11/5628—Programming or writing circuits; Data input circuits
    • G11C11/5635—Erasing circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0433—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and one or more separate select transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7887—Programmable transistors with more than two possible different levels of programmation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Non-Volatile Memory (AREA)
  • Read Only Memory (AREA)
  • Semiconductor Memories (AREA)
DE69614223T 1995-11-14 1996-10-30 PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung Expired - Lifetime DE69614223D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/557,514 US5666307A (en) 1995-11-14 1995-11-14 PMOS flash memory cell capable of multi-level threshold voltage storage

Publications (1)

Publication Number Publication Date
DE69614223D1 true DE69614223D1 (de) 2001-09-06

Family

ID=24225727

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69614223T Expired - Lifetime DE69614223D1 (de) 1995-11-14 1996-10-30 PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung
DE0774788T Pending DE774788T1 (de) 1995-11-14 1996-10-30 PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE0774788T Pending DE774788T1 (de) 1995-11-14 1996-10-30 PMOS-Flash-Speicherzelle mit mehrstufiger Schwellspannung

Country Status (7)

Country Link
US (1) US5666307A (de)
EP (1) EP0774788B1 (de)
JP (1) JPH09181204A (de)
KR (1) KR19980034600A (de)
AT (1) ATE203852T1 (de)
DE (2) DE69614223D1 (de)
TW (1) TW293909B (de)

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US6965142B2 (en) * 1995-03-07 2005-11-15 Impinj, Inc. Floating-gate semiconductor structures
US6144581A (en) * 1996-07-24 2000-11-07 California Institute Of Technology pMOS EEPROM non-volatile data storage
EP0916162A1 (de) * 1996-08-01 1999-05-19 Siemens Aktiengesellschaft Verfahren zum betrieb einer speicherzellenanordnung
US5953254A (en) * 1996-09-09 1999-09-14 Azalea Microelectronics Corp. Serial flash memory
US5914904A (en) 1996-10-01 1999-06-22 Altera Corporation Compact electrically erasable memory cells and arrays
US5986931A (en) 1997-01-02 1999-11-16 Caywood; John M. Low voltage single CMOS electrically erasable read-only memory
US6201732B1 (en) 1997-01-02 2001-03-13 John M. Caywood Low voltage single CMOS electrically erasable read-only memory
US6835979B1 (en) * 1997-04-11 2004-12-28 Altera Corporation Nonvolatle memory
US5903497A (en) * 1997-12-22 1999-05-11 Programmable Microelectronics Corporation Integrated program verify page buffer
KR100295135B1 (ko) * 1997-12-31 2001-07-12 윤종용 멀티-비트 셀 구조를 갖는 비휘발성 메모리 장치
TW356594B (en) * 1998-01-09 1999-04-21 Winbond Electrics Co Electrostatic discharge protection circuit with P-type flash memory unit
US6201734B1 (en) 1998-09-25 2001-03-13 Sandisk Corporation Programmable impedance device
KR100643481B1 (ko) * 1998-12-08 2007-12-04 삼성전자주식회사 비휘발성 반도체 메모리장치_
KR20010004990A (ko) 1999-06-30 2001-01-15 김영환 플래쉬 이이피롬 셀 및 그 제조 방법
EP1116275A1 (de) * 1999-07-29 2001-07-18 Koninklijke Philips Electronics N.V. Nichtflüchtige halbleiterspeicheranordnung
US6307781B1 (en) * 1999-09-30 2001-10-23 Infineon Technologies Aktiengesellschaft Two transistor flash memory cell
KR100387267B1 (ko) * 1999-12-22 2003-06-11 주식회사 하이닉스반도체 멀티 레벨 플래쉬 이이피롬 셀 및 그 제조 방법
US6664909B1 (en) 2001-08-13 2003-12-16 Impinj, Inc. Method and apparatus for trimming high-resolution digital-to-analog converter
US20040206999A1 (en) * 2002-05-09 2004-10-21 Impinj, Inc., A Delaware Corporation Metal dielectric semiconductor floating gate variable capacitor
US7221596B2 (en) * 2002-07-05 2007-05-22 Impinj, Inc. pFET nonvolatile memory
US6950342B2 (en) * 2002-07-05 2005-09-27 Impinj, Inc. Differential floating gate nonvolatile memories
US6734055B1 (en) 2002-11-15 2004-05-11 Taiwan Semiconductor Manufactoring Company Multi-level (4 state/2-bit) stacked gate flash memory cell
US7262457B2 (en) * 2004-01-05 2007-08-28 Ememory Technology Inc. Non-volatile memory cell
US7283390B2 (en) 2004-04-21 2007-10-16 Impinj, Inc. Hybrid non-volatile memory
US8111558B2 (en) * 2004-05-05 2012-02-07 Synopsys, Inc. pFET nonvolatile memory
US7151027B1 (en) * 2004-06-01 2006-12-19 Spansion Llc Method and device for reducing interface area of a memory device
US7257033B2 (en) * 2005-03-17 2007-08-14 Impinj, Inc. Inverter non-volatile memory cell and array system
US7715236B2 (en) * 2005-03-30 2010-05-11 Virage Logic Corporation Fault tolerant non volatile memories and methods
US7679957B2 (en) * 2005-03-31 2010-03-16 Virage Logic Corporation Redundant non-volatile memory cell
US8122307B1 (en) 2006-08-15 2012-02-21 Synopsys, Inc. One time programmable memory test structures and methods
US7719896B1 (en) 2007-04-24 2010-05-18 Virage Logic Corporation Configurable single bit/dual bits memory
US7920423B1 (en) 2007-07-31 2011-04-05 Synopsys, Inc. Non volatile memory circuit with tailored reliability
US8320191B2 (en) 2007-08-30 2012-11-27 Infineon Technologies Ag Memory cell arrangement, method for controlling a memory cell, memory array and electronic device
US7894261B1 (en) 2008-05-22 2011-02-22 Synopsys, Inc. PFET nonvolatile memory
US8369154B2 (en) * 2010-03-24 2013-02-05 Ememory Technology Inc. Channel hot electron injection programming method and related device
US8467245B2 (en) 2010-03-24 2013-06-18 Ememory Technology Inc. Non-volatile memory device with program current clamp and related method
CN103390588B (zh) * 2012-05-09 2015-08-19 无锡华润上华半导体有限公司 一种基于otp存储器制作mrom存储器的方法
CN104037174B (zh) * 2014-06-23 2016-09-07 芯成半导体（上海）有限公司 混合结构的存储器阵列及其制备方法
CN105957806B (zh) * 2016-06-08 2018-05-04 天津大学 用于减少非易失性存储器中数据残留的方法
CN109741770A (zh) * 2018-12-29 2019-05-10 联想(北京)有限公司 一种存储装置、处理器和电子设备

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US4435790A (en) * 1980-12-24 1984-03-06 Fairchild Camera And Instrument Corporation High speed, nonvolatile, electrically erasable memory cell and system
IT1201834B (it) * 1986-07-10 1989-02-02 Sgs Microelettronica Spa Dispositivo di memoria non volatile a semiconduttore
US4953928A (en) * 1989-06-09 1990-09-04 Synaptics Inc. MOS device for long-term learning
JP2825407B2 (ja) * 1993-04-01 1998-11-18 株式会社東芝 不揮発性半導体記憶装置
US5563823A (en) * 1993-08-31 1996-10-08 Macronix International Co., Ltd. Fast FLASH EPROM programming and pre-programming circuit design
US5487033A (en) * 1994-06-28 1996-01-23 Intel Corporation Structure and method for low current programming of flash EEPROMS

Also Published As

Publication number Publication date
KR19980034600A (ko) 1998-08-05
ATE203852T1 (de) 2001-08-15
EP0774788B1 (de) 2001-08-01
EP0774788A1 (de) 1997-05-21
TW293909B (en) 1996-12-21
US5666307A (en) 1997-09-09
JPH09181204A (ja) 1997-07-11
DE774788T1 (de) 1998-01-15

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Legal Events

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