DE69609282D1 - Succinamid-Derivat, Verfahren zur Herstellung und Verwendung - Google Patents

Succinamid-Derivat, Verfahren zur Herstellung und Verwendung

Info

Publication number
DE69609282D1
DE69609282D1 DE69609282T DE69609282T DE69609282D1 DE 69609282 D1 DE69609282 D1 DE 69609282D1 DE 69609282 T DE69609282 T DE 69609282T DE 69609282 T DE69609282 T DE 69609282T DE 69609282 D1 DE69609282 D1 DE 69609282D1
Authority
DE
Germany
Prior art keywords
manufacture
succinamide derivative
succinamide
derivative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609282T
Other languages
English (en)
Other versions
DE69609282T2 (de
Inventor
Akira Kamabuchi
Naoki Takeyama
Jun Tomioka
Haruyoshi Osaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7280233A external-priority patent/JPH09124598A/ja
Priority claimed from JP15778396A external-priority patent/JP3166618B2/ja
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of DE69609282D1 publication Critical patent/DE69609282D1/de
Application granted granted Critical
Publication of DE69609282T2 publication Critical patent/DE69609282T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D207/00—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom
    • C07D207/46—Heterocyclic compounds containing five-membered rings not condensed with other rings, with one nitrogen atom as the only ring hetero atom with hetero atoms directly attached to the ring nitrogen atom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/55—Design of synthesis routes, e.g. reducing the use of auxiliary or protecting groups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
DE69609282T 1995-10-27 1996-10-28 Succinamid-Derivat, Verfahren zur Herstellung und Verwendung Expired - Fee Related DE69609282T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7280233A JPH09124598A (ja) 1995-10-27 1995-10-27 スクシンイミド誘導体、その製法及び用途
JP15778396A JP3166618B2 (ja) 1996-06-19 1996-06-19 Ｎ−（１０−カンファースルホニルオキシ）スクシンイミドの製造方法

Publications (2)

Publication Number Publication Date
DE69609282D1 true DE69609282D1 (de) 2000-08-17
DE69609282T2 DE69609282T2 (de) 2000-12-21

Family

ID=26485113

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609282T Expired - Fee Related DE69609282T2 (de) 1995-10-27 1996-10-28 Succinamid-Derivat, Verfahren zur Herstellung und Verwendung

Country Status (4)

Country Link
US (1) US5965748A (de)
EP (1) EP0770600B1 (de)
DE (1) DE69609282T2 (de)
TW (2) TW487827B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3931482B2 (ja) 1999-06-02 2007-06-13 住友化学株式会社 化学増幅ネガ型レジスト組成物
SG92753A1 (en) * 1999-11-09 2002-11-19 Jsr Corp N-sulfornyloxyimide compound and radiation-sensitive resin composition using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238465B2 (ja) 1991-04-30 2001-12-17 株式会社東芝 パターン形成用レジストおよびパターン形成方法
WO1994010608A1 (en) * 1992-10-29 1994-05-11 International Business Machines Corporation Chemically amplified photoresist
TW288112B (de) * 1993-06-02 1996-10-11 Sumitomo Chemical Co
JPH07181678A (ja) * 1993-12-24 1995-07-21 Sumitomo Chem Co Ltd フォトレジスト組成物
JP3393915B2 (ja) * 1994-03-04 2003-04-07 住友化学工業株式会社 化学増幅型レジスト組成物

Also Published As

Publication number Publication date
TW487827B (en) 2002-05-21
DE69609282T2 (de) 2000-12-21
US5965748A (en) 1999-10-12
EP0770600A1 (de) 1997-05-02
TWI235887B (en) 2005-07-11
EP0770600B1 (de) 2000-07-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SUMITOMO CHEMICAL CO. LTD., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee