DE69607068D1 - Elektrostatische Haltevorrichtung mit rotierender Stromübertragungsbaugruppe - Google Patents

Elektrostatische Haltevorrichtung mit rotierender Stromübertragungsbaugruppe

Info

Publication number
DE69607068D1
DE69607068D1 DE69607068T DE69607068T DE69607068D1 DE 69607068 D1 DE69607068 D1 DE 69607068D1 DE 69607068 T DE69607068 T DE 69607068T DE 69607068 T DE69607068 T DE 69607068T DE 69607068 D1 DE69607068 D1 DE 69607068D1
Authority
DE
Germany
Prior art keywords
power transmission
electrostatic chuck
transmission assembly
rotating power
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69607068T
Other languages
English (en)
Other versions
DE69607068T2 (de
Inventor
Yoshihiro Tanaka
Takashi Nogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Ion Equipment Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Application granted granted Critical
Publication of DE69607068D1 publication Critical patent/DE69607068D1/de
Publication of DE69607068T2 publication Critical patent/DE69607068T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
    • B60R16/00—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for
    • B60R16/02—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for electric constitutive elements
    • B60R16/023—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for electric constitutive elements for transmission of signals between vehicle parts or subsystems
    • B60R16/027—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for electric constitutive elements for transmission of signals between vehicle parts or subsystems between relatively movable parts of the vehicle, e.g. between steering wheel and column
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R35/00—Flexible or turnable line connectors, i.e. the rotation angle being limited
    • H01R35/02—Flexible line connectors without frictional contact members
    • H01R35/025—Flexible line connectors without frictional contact members having a flexible conductor wound around a rotation axis

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electrophotography Configuration And Component (AREA)
DE69607068T 1995-06-13 1996-06-12 Elektrostatische Haltevorrichtung mit rotierender Stromübertragungsbaugruppe Expired - Fee Related DE69607068T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14651895 1995-06-13

Publications (2)

Publication Number Publication Date
DE69607068D1 true DE69607068D1 (de) 2000-04-20
DE69607068T2 DE69607068T2 (de) 2000-12-14

Family

ID=15409469

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69607068T Expired - Fee Related DE69607068T2 (de) 1995-06-13 1996-06-12 Elektrostatische Haltevorrichtung mit rotierender Stromübertragungsbaugruppe

Country Status (4)

Country Link
US (1) US5827080A (de)
EP (1) EP0749188B1 (de)
DE (1) DE69607068T2 (de)
TW (1) TW298660B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19882022B4 (de) * 1997-11-28 2010-05-06 Furukawa Electric Co., Ltd., Verwendung eines Drehverbinders in einer Fahrzeug-Lenkvorrichtung
KR101022523B1 (ko) * 2007-10-05 2011-03-16 한석민 흡착력을 개선한 집게 차량용 전자척
US7758364B1 (en) * 2009-08-04 2010-07-20 Seagate Technology Llc Rotary positioning
KR101152235B1 (ko) 2009-12-30 2012-06-08 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 처리 장치
EP3593379B1 (de) * 2017-03-09 2023-08-16 EV Group E. Thallner GmbH Elektrostatische substrathalterung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57104688A (en) * 1980-12-22 1982-06-29 Toei Denka Kogyo Kk Surface treatment of metal to provide lubricity
US4607898A (en) * 1984-11-13 1986-08-26 Sheller-Globe Corporation Spiral flex-circuit system for steering wheels
US4838803A (en) * 1986-10-21 1989-06-13 Alps Electric Co., Ltd. Connector device
JP2930590B2 (ja) * 1988-02-16 1999-08-03 臼井国際産業株式会社 亜鉛、亜鉛合金又は亜鉛めっき材の表面に弗素樹脂被膜を形成する方法
JPH01305533A (ja) * 1988-06-03 1989-12-08 Toshiba Corp 搬送装置
JPH0321544A (ja) * 1989-06-15 1991-01-30 Daihatsu Motor Co Ltd 配線装置
DE58907793D1 (de) * 1989-09-12 1994-07-07 Petri Ag Stromleitungsverbinder zur Überbrückung von Leiterunterbrechungen zwischen gegeneinander drehbaren Teilen.
JPH03102814A (ja) * 1989-09-16 1991-04-30 Nikon Corp 静電チャック装置
US5049082A (en) * 1990-03-15 1991-09-17 Imo Industries, Inc. Thru wire helm assembly
JPH04180599A (ja) * 1990-10-26 1992-06-26 Taiho Kogyo Co Ltd 摺動材料
JP2752529B2 (ja) * 1991-05-09 1998-05-18 アルプス電気株式会社 ケーブルリール
JP2538866Y2 (ja) * 1991-11-15 1997-06-18 古河電気工業株式会社 回転コネクタ
JPH05326671A (ja) * 1992-05-15 1993-12-10 Tel Varian Ltd 真空処理装置

Also Published As

Publication number Publication date
EP0749188A2 (de) 1996-12-18
US5827080A (en) 1998-10-27
TW298660B (de) 1997-02-21
DE69607068T2 (de) 2000-12-14
EP0749188A3 (de) 1997-03-05
EP0749188B1 (de) 2000-03-15

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NISSIN ION EQUIPMENT CO., LTD., KYOTO, JP

8339 Ceased/non-payment of the annual fee