DE69606817D1 - Halbleitermessaufnehmer für mechanische Spannungen - Google Patents
Halbleitermessaufnehmer für mechanische SpannungenInfo
- Publication number
- DE69606817D1 DE69606817D1 DE69606817T DE69606817T DE69606817D1 DE 69606817 D1 DE69606817 D1 DE 69606817D1 DE 69606817 T DE69606817 T DE 69606817T DE 69606817 T DE69606817 T DE 69606817T DE 69606817 D1 DE69606817 D1 DE 69606817D1
- Authority
- DE
- Germany
- Prior art keywords
- mechanical stresses
- semiconductor sensor
- semiconductor
- sensor
- stresses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/124—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by semiconductor devices comprising at least one PN junction, e.g. transistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/04—Piezoelectric
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7250210A JP2852886B2 (ja) | 1995-09-04 | 1995-09-04 | 半導体応力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69606817D1 true DE69606817D1 (de) | 2000-04-06 |
DE69606817T2 DE69606817T2 (de) | 2000-06-15 |
Family
ID=17204466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69606817T Expired - Fee Related DE69606817T2 (de) | 1995-09-04 | 1996-08-29 | Halbleitermessaufnehmer für mechanische Spannungen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5770803A (de) |
EP (1) | EP0763744B1 (de) |
JP (1) | JP2852886B2 (de) |
DE (1) | DE69606817T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19808928B4 (de) * | 1998-03-03 | 2008-07-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Kraft/Drehmomentsensor |
US6278379B1 (en) * | 1998-04-02 | 2001-08-21 | Georgia Tech Research Corporation | System, method, and sensors for sensing physical properties |
US7012306B2 (en) * | 2001-03-07 | 2006-03-14 | Acreo Ab | Electrochemical device |
GB0206509D0 (en) * | 2002-03-20 | 2002-05-01 | Qinetiq Ltd | Micro-Electromechanical systems |
JP4832723B2 (ja) * | 2004-03-29 | 2011-12-07 | 日本碍子株式会社 | 能動的高抵抗半導体層を有する半導体装置 |
US7798703B2 (en) * | 2007-05-09 | 2010-09-21 | Infineon Technologies Ag | Apparatus and method for measuring local surface temperature of semiconductor device |
CN105136344B (zh) * | 2015-08-15 | 2018-02-09 | 福州大学 | 非匀强电场型机器人触觉传感器及其检测方法 |
DE102021206134A1 (de) * | 2021-06-16 | 2022-12-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Stress- und/oder Dehnungsmesszelle für ein Stress- und/oder Dehnungsmesssystem |
CN117109782A (zh) * | 2023-08-31 | 2023-11-24 | 广州埔慧科技有限公司 | 压力传感器及其制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3582690A (en) * | 1969-06-09 | 1971-06-01 | Gen Electric | Semiconductor strain sensor with controlled sensitivity |
US4191057A (en) * | 1978-06-28 | 1980-03-04 | Gould Inc. | Inversion layer sprain gauge |
JPS5995420A (ja) * | 1982-11-24 | 1984-06-01 | Hitachi Ltd | Mos型センサ |
US4777517A (en) * | 1984-11-29 | 1988-10-11 | Fujitsu Limited | Compound semiconductor integrated circuit device |
JPS61153537A (ja) * | 1984-12-26 | 1986-07-12 | Fujitsu Ltd | 半導体圧力センサ |
JPS63219862A (ja) * | 1987-03-09 | 1988-09-13 | Nippon Carbureter Co Ltd | 気化器 |
US4873871A (en) * | 1988-06-17 | 1989-10-17 | Motorola, Inc. | Mechanical field effect transistor sensor |
EP0363005B1 (de) * | 1988-09-02 | 1996-06-05 | Honda Giken Kogyo Kabushiki Kaisha | Halbleitermessaufnehmer |
JPH077013B2 (ja) * | 1988-09-02 | 1995-01-30 | 本田技研工業株式会社 | 半導体センサ |
US4964306A (en) * | 1989-04-03 | 1990-10-23 | Sarcos Group | Field-based movement sensor |
FR2653197B1 (fr) * | 1989-10-12 | 1991-12-27 | Vulcanic | Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede. |
JP2532149B2 (ja) * | 1990-02-06 | 1996-09-11 | 本田技研工業株式会社 | 半導体センサ |
JP3009239B2 (ja) * | 1991-04-02 | 2000-02-14 | 本田技研工業株式会社 | 半導体センサ |
US5397911A (en) * | 1991-04-02 | 1995-03-14 | Honda Giken Kogyo Kabushiki Kaisha | Semiconductor sensor with plural gate electrodes |
US5488237A (en) * | 1992-02-14 | 1996-01-30 | Sumitomo Electric Industries, Ltd. | Semiconductor device with delta-doped layer in channel region |
US5610340A (en) * | 1995-06-23 | 1997-03-11 | New Jersey Institute Of Technology | Integrated pressure sensor with remote power source and remote read-out |
-
1995
- 1995-09-04 JP JP7250210A patent/JP2852886B2/ja not_active Expired - Fee Related
-
1996
- 1996-08-29 EP EP96113826A patent/EP0763744B1/de not_active Expired - Lifetime
- 1996-08-29 DE DE69606817T patent/DE69606817T2/de not_active Expired - Fee Related
- 1996-09-04 US US08/707,461 patent/US5770803A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0763744A1 (de) | 1997-03-19 |
EP0763744B1 (de) | 2000-03-01 |
US5770803A (en) | 1998-06-23 |
JPH0974208A (ja) | 1997-03-18 |
JP2852886B2 (ja) | 1999-02-03 |
DE69606817T2 (de) | 2000-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |