DE69622642T2 - Halbleiter-Drucksensor - Google Patents

Halbleiter-Drucksensor

Info

Publication number
DE69622642T2
DE69622642T2 DE69622642T DE69622642T DE69622642T2 DE 69622642 T2 DE69622642 T2 DE 69622642T2 DE 69622642 T DE69622642 T DE 69622642T DE 69622642 T DE69622642 T DE 69622642T DE 69622642 T2 DE69622642 T2 DE 69622642T2
Authority
DE
Germany
Prior art keywords
pressure sensor
semiconductor pressure
semiconductor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69622642T
Other languages
English (en)
Other versions
DE69622642D1 (de
Inventor
Hideo Suzuki
Takahashi Ken
Takahashi Yukio
Yamamoto Yoshimi
Aoki Kenichi
Tobita Tomoyuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69622642D1 publication Critical patent/DE69622642D1/de
Publication of DE69622642T2 publication Critical patent/DE69622642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69622642T 1995-05-30 1996-05-29 Halbleiter-Drucksensor Expired - Fee Related DE69622642T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13123695A JP3160796B2 (ja) 1995-05-30 1995-05-30 半導体圧力検出器

Publications (2)

Publication Number Publication Date
DE69622642D1 DE69622642D1 (de) 2002-09-05
DE69622642T2 true DE69622642T2 (de) 2003-04-24

Family

ID=15053197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622642T Expired - Fee Related DE69622642T2 (de) 1995-05-30 1996-05-29 Halbleiter-Drucksensor

Country Status (4)

Country Link
US (1) US5672826A (de)
EP (1) EP0745834B1 (de)
JP (1) JP3160796B2 (de)
DE (1) DE69622642T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6809424B2 (en) * 2000-12-19 2004-10-26 Harris Corporation Method for making electronic devices including silicon and LTCC and devices produced thereby
DE102008049143B4 (de) * 2008-09-26 2012-08-16 Intelligente Sensorsysteme Dresden Gmbh Drucksensor und Herstellungsverfahren
WO2016117203A1 (ja) * 2015-01-23 2016-07-28 三菱電機株式会社 セラミックス基板、接合体、モジュール、およびセラミックス基板の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543819A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Pressure detecting equipment
JPS5723830A (en) * 1980-07-18 1982-02-08 Hitachi Ltd Post material for pressure transducer of semiconductor and its preparation
JPH0746065B2 (ja) * 1985-03-25 1995-05-17 株式会社日本自動車部品総合研究所 高圧用圧力検出器
US4729010A (en) * 1985-08-05 1988-03-01 Hitachi, Ltd. Integrated circuit package with low-thermal expansion lead pieces
US4771639A (en) * 1987-09-02 1988-09-20 Yokogawa Electric Corporation Semiconductor pressure sensor
JPH01182729A (ja) * 1988-01-16 1989-07-20 Ngk Insulators Ltd 圧力センサ
JPH0625395B2 (ja) * 1989-06-26 1994-04-06 日立金属株式会社 高強度リードフレーム材料およびその製造方法
US5259248A (en) * 1990-03-19 1993-11-09 Hitachi Ltd. Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
US5246511A (en) * 1990-05-14 1993-09-21 Hitachi Metals, Ltd. High-strength lead frame material and method of producing same
JPH0461293A (ja) * 1990-06-29 1992-02-27 Toshiba Corp 回路基板及びその製造方法
US5147470A (en) * 1990-12-25 1992-09-15 Hitachi Metals, Ltd. High strength lead frame material and method of producing the same
US5186055A (en) * 1991-06-03 1993-02-16 Eaton Corporation Hermetic mounting system for a pressure transducer
JPH06287715A (ja) * 1993-03-31 1994-10-11 Hitachi Metals Ltd 高強度リードフレーム材料およびその製造方法
JP3117581B2 (ja) * 1993-06-30 2000-12-18 三洋電機株式会社 半導体加速度センサの製造方法
JP3111816B2 (ja) * 1993-10-08 2000-11-27 株式会社日立製作所 プロセス状態検出装置
JPH07216510A (ja) * 1994-02-04 1995-08-15 Hitachi Metals Ltd 高強度リードフレーム材料およびその製造方法
US5454270A (en) * 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof

Also Published As

Publication number Publication date
EP0745834A3 (de) 1997-07-23
JP3160796B2 (ja) 2001-04-25
EP0745834B1 (de) 2002-07-31
JPH08327487A (ja) 1996-12-13
DE69622642D1 (de) 2002-09-05
EP0745834A2 (de) 1996-12-04
US5672826A (en) 1997-09-30

Similar Documents

Publication Publication Date Title
DE59504814D1 (de) Drucksensor
FI953888A (fi) Anturi
DE69707798D1 (de) Drucksensor
DE69521890D1 (de) Stabilisierter drucksensor
DE69803519T2 (de) Drucksensor
DE753728T1 (de) Halbleiter-Druckdifferenzmessvorrichtung
DE69619850T2 (de) Sensoranordnung
NO20003985D0 (no) Halvledende trykksensor
DE59303373D1 (de) Drucksensor
DE59803182D1 (de) Drucksensor
DE59506697D1 (de) Drucksensor
NO973038D0 (no) Trykksensor
DE29619276U1 (de) Drucksensor
DE69633363D1 (de) Sensorelement
DE59505227D1 (de) Drucksensor
DE59805205D1 (de) Drucksensor
DE69620655D1 (de) Sensorelement
DE69820981D1 (de) Halbleiterdrucksensor
DE9406625U1 (de) Drucksensor
ATA95095A (de) Ungekühlter drucksensor
KR960034621U (ko) 압력센서
DE69622642T2 (de) Halbleiter-Drucksensor
DE59600923D1 (de) Sensoranordnung
DE9421746U1 (de) Drucksensor
FI965017A0 (fi) Tryckgivare

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee