DE69602603D1 - Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen - Google Patents

Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen

Info

Publication number
DE69602603D1
DE69602603D1 DE69602603T DE69602603T DE69602603D1 DE 69602603 D1 DE69602603 D1 DE 69602603D1 DE 69602603 T DE69602603 T DE 69602603T DE 69602603 T DE69602603 T DE 69602603T DE 69602603 D1 DE69602603 D1 DE 69602603D1
Authority
DE
Germany
Prior art keywords
laser
pct
energetic
control device
resulting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69602603T
Other languages
English (en)
Other versions
DE69602603T2 (de
Inventor
Bruno Godard
Marc Stehle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excico Group NV
Original Assignee
SOC D PRODUCTION ET DE RECH AP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9481900&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69602603(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SOC D PRODUCTION ET DE RECH AP filed Critical SOC D PRODUCTION ET DE RECH AP
Publication of DE69602603D1 publication Critical patent/DE69602603D1/de
Application granted granted Critical
Publication of DE69602603T2 publication Critical patent/DE69602603T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2316—Cascaded amplifiers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Laser Beam Processing (AREA)
DE69602603T 1995-08-11 1996-07-05 Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen Expired - Lifetime DE69602603T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9509780A FR2737814B1 (fr) 1995-08-11 1995-08-11 Procede et dispositif de commande d'une source laser a plusieurs modules laser pour optimiser le traitement de surface par laser
PCT/FR1996/001060 WO1997007578A1 (fr) 1995-08-11 1996-07-05 Dispositif de commande d'une source laser a plusieurs modules laser pour optimiser energetiquement et spatialement le traitement de surface par laser

Publications (2)

Publication Number Publication Date
DE69602603D1 true DE69602603D1 (de) 1999-07-01
DE69602603T2 DE69602603T2 (de) 2000-02-24

Family

ID=9481900

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602603T Expired - Lifetime DE69602603T2 (de) 1995-08-11 1996-07-05 Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen

Country Status (9)

Country Link
US (1) US6014401A (de)
EP (1) EP0843909B1 (de)
JP (1) JP4169366B2 (de)
KR (1) KR100416246B1 (de)
AT (1) ATE180601T1 (de)
CA (1) CA2225152C (de)
DE (1) DE69602603T2 (de)
FR (1) FR2737814B1 (de)
WO (1) WO1997007578A1 (de)

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* Cited by examiner, † Cited by third party
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FR2737786B1 (fr) * 1995-08-11 1997-09-12 Soc D Production Et De Rech Ap Dispositif optique pour homogeneiser un faisceau laser
FR2737806B1 (fr) * 1995-08-11 1997-09-12 Soc D Production Et De Rech Ap Dispositif et procede de traitement de surface par laser
JP2002289397A (ja) * 2001-03-23 2002-10-04 Takayasu Mochizuki レーザプラズマ発生方法およびそのシステム
JP2003059858A (ja) * 2001-08-09 2003-02-28 Sony Corp レーザアニール装置及び薄膜トランジスタの製造方法
US7097709B2 (en) * 2002-11-27 2006-08-29 Mitsubishi Denki Kabushiki Kaisha Laser annealing apparatus
SG129265A1 (en) * 2002-11-29 2007-02-26 Semiconductor Energy Lab Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device
US7304005B2 (en) * 2003-03-17 2007-12-04 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device
JP2007515774A (ja) * 2003-07-30 2007-06-14 ティーシーゼット ピーティーイー リミテッド 超高エネルギ高安定性ガス放電レーザ表面処理システム
DE102004001276A1 (de) * 2004-01-08 2005-08-04 Mtu Aero Engines Gmbh Verfahren zur Erwärmung von Bauteilen
US20070012665A1 (en) * 2005-07-12 2007-01-18 Hewlett-Packard Development Company Lp Laser ablation
CN102203943B (zh) * 2008-10-29 2013-07-31 欧瑞康太阳能股份公司(特吕巴赫) 通过多激光束照射将在基板上形成的半导体膜划分成多个区域的方法
US8509272B2 (en) 2009-06-10 2013-08-13 Lee Laser, Inc. Laser beam combining and power scaling device
US9277634B2 (en) 2013-01-17 2016-03-01 Kla-Tencor Corporation Apparatus and method for multiplexed multiple discharge plasma produced sources
WO2016006099A1 (ja) * 2014-07-11 2016-01-14 ギガフォトン株式会社 レーザシステム
JP6756737B2 (ja) 2015-12-25 2020-09-16 ギガフォトン株式会社 レーザ照射装置
WO2019012642A1 (ja) * 2017-07-13 2019-01-17 ギガフォトン株式会社 レーザシステム
KR102324610B1 (ko) * 2019-12-26 2021-11-09 세메스 주식회사 기판 가열 유닛, 기판 처리 장치 및 기판 처리 방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4649351A (en) * 1984-10-19 1987-03-10 Massachusetts Institute Of Technology Apparatus and method for coherently adding laser beams
US4648092A (en) * 1985-09-25 1987-03-03 Rockwell International Corporation Phase coupling multiple lasers
DE3850330T2 (de) * 1987-02-24 1994-10-13 Nippon Steel Corp Gerät zur mattveredelung einer rolle mittels impulslaser.
JPH01302881A (ja) * 1988-05-31 1989-12-06 Yoshiaki Arata 大出力エキシマレーザービーム造出法
US5253110A (en) * 1988-12-22 1993-10-12 Nikon Corporation Illumination optical arrangement
DE4009859A1 (de) * 1990-03-28 1991-10-02 Fraunhofer Ges Forschung Verfahren und vorrichtung zur erzeugung von laserstrahlung hoher leistung und guter qualitaet
TW207588B (de) * 1990-09-19 1993-06-11 Hitachi Seisakusyo Kk
IL101471A (en) * 1991-05-01 1995-03-30 Coherent Inc Coupler for laser launch system
ATE155933T1 (de) * 1992-05-06 1997-08-15 Electrox Ltd System zum kombinieren von laserstrahlen
DE4301689A1 (de) * 1993-01-22 1994-07-28 Deutsche Forsch Luft Raumfahrt Leistungsgesteuertes fraktales Lasersystem
US5463200A (en) * 1993-02-11 1995-10-31 Lumonics Inc. Marking of a workpiece by light energy
US5375132A (en) * 1993-05-05 1994-12-20 Coherent, Inc. Solid state laser with interleaved output
EP0700325B1 (de) * 1993-05-19 1997-08-13 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Verfahren zur materialbearbeitung mit diodenstrahlung
US5528612A (en) * 1993-11-19 1996-06-18 The United States Of America As Represented By The Secretary Of The Navy Laser with multiple gain elements
DE4429913C1 (de) * 1994-08-23 1996-03-21 Fraunhofer Ges Forschung Vorrichtung und Verfahren zum Plattieren
FR2737806B1 (fr) * 1995-08-11 1997-09-12 Soc D Production Et De Rech Ap Dispositif et procede de traitement de surface par laser

Also Published As

Publication number Publication date
ATE180601T1 (de) 1999-06-15
KR100416246B1 (ko) 2004-03-26
US6014401A (en) 2000-01-11
JP4169366B2 (ja) 2008-10-22
JPH11511295A (ja) 1999-09-28
FR2737814A1 (fr) 1997-02-14
FR2737814B1 (fr) 1997-09-12
KR19990036245A (ko) 1999-05-25
EP0843909B1 (de) 1999-05-26
CA2225152C (en) 2007-05-08
EP0843909A1 (de) 1998-05-27
CA2225152A1 (en) 1997-02-27
DE69602603T2 (de) 2000-02-24
WO1997007578A1 (fr) 1997-02-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EXCICO GROUP N.V., ANTWERPEN, BE