DE69602603D1 - Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen - Google Patents
Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächenInfo
- Publication number
- DE69602603D1 DE69602603D1 DE69602603T DE69602603T DE69602603D1 DE 69602603 D1 DE69602603 D1 DE 69602603D1 DE 69602603 T DE69602603 T DE 69602603T DE 69602603 T DE69602603 T DE 69602603T DE 69602603 D1 DE69602603 D1 DE 69602603D1
- Authority
- DE
- Germany
- Prior art keywords
- laser
- pct
- energetic
- control device
- resulting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2316—Cascaded amplifiers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9509780A FR2737814B1 (fr) | 1995-08-11 | 1995-08-11 | Procede et dispositif de commande d'une source laser a plusieurs modules laser pour optimiser le traitement de surface par laser |
PCT/FR1996/001060 WO1997007578A1 (fr) | 1995-08-11 | 1996-07-05 | Dispositif de commande d'une source laser a plusieurs modules laser pour optimiser energetiquement et spatialement le traitement de surface par laser |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69602603D1 true DE69602603D1 (de) | 1999-07-01 |
DE69602603T2 DE69602603T2 (de) | 2000-02-24 |
Family
ID=9481900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69602603T Expired - Lifetime DE69602603T2 (de) | 1995-08-11 | 1996-07-05 | Kontrollgerät für eine aus mehreren lasermodulen bestehende laserquelle zur energetischen und räumlichen optimierung während der laserbearbeitung von oberflächen |
Country Status (9)
Country | Link |
---|---|
US (1) | US6014401A (de) |
EP (1) | EP0843909B1 (de) |
JP (1) | JP4169366B2 (de) |
KR (1) | KR100416246B1 (de) |
AT (1) | ATE180601T1 (de) |
CA (1) | CA2225152C (de) |
DE (1) | DE69602603T2 (de) |
FR (1) | FR2737814B1 (de) |
WO (1) | WO1997007578A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2737786B1 (fr) * | 1995-08-11 | 1997-09-12 | Soc D Production Et De Rech Ap | Dispositif optique pour homogeneiser un faisceau laser |
FR2737806B1 (fr) * | 1995-08-11 | 1997-09-12 | Soc D Production Et De Rech Ap | Dispositif et procede de traitement de surface par laser |
JP2002289397A (ja) * | 2001-03-23 | 2002-10-04 | Takayasu Mochizuki | レーザプラズマ発生方法およびそのシステム |
JP2003059858A (ja) * | 2001-08-09 | 2003-02-28 | Sony Corp | レーザアニール装置及び薄膜トランジスタの製造方法 |
US7097709B2 (en) * | 2002-11-27 | 2006-08-29 | Mitsubishi Denki Kabushiki Kaisha | Laser annealing apparatus |
SG129265A1 (en) * | 2002-11-29 | 2007-02-26 | Semiconductor Energy Lab | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device |
US7304005B2 (en) * | 2003-03-17 | 2007-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device |
JP2007515774A (ja) * | 2003-07-30 | 2007-06-14 | ティーシーゼット ピーティーイー リミテッド | 超高エネルギ高安定性ガス放電レーザ表面処理システム |
DE102004001276A1 (de) * | 2004-01-08 | 2005-08-04 | Mtu Aero Engines Gmbh | Verfahren zur Erwärmung von Bauteilen |
US20070012665A1 (en) * | 2005-07-12 | 2007-01-18 | Hewlett-Packard Development Company Lp | Laser ablation |
CN102203943B (zh) * | 2008-10-29 | 2013-07-31 | 欧瑞康太阳能股份公司(特吕巴赫) | 通过多激光束照射将在基板上形成的半导体膜划分成多个区域的方法 |
US8509272B2 (en) | 2009-06-10 | 2013-08-13 | Lee Laser, Inc. | Laser beam combining and power scaling device |
US9277634B2 (en) | 2013-01-17 | 2016-03-01 | Kla-Tencor Corporation | Apparatus and method for multiplexed multiple discharge plasma produced sources |
WO2016006099A1 (ja) * | 2014-07-11 | 2016-01-14 | ギガフォトン株式会社 | レーザシステム |
JP6756737B2 (ja) | 2015-12-25 | 2020-09-16 | ギガフォトン株式会社 | レーザ照射装置 |
WO2019012642A1 (ja) * | 2017-07-13 | 2019-01-17 | ギガフォトン株式会社 | レーザシステム |
KR102324610B1 (ko) * | 2019-12-26 | 2021-11-09 | 세메스 주식회사 | 기판 가열 유닛, 기판 처리 장치 및 기판 처리 방법 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4649351A (en) * | 1984-10-19 | 1987-03-10 | Massachusetts Institute Of Technology | Apparatus and method for coherently adding laser beams |
US4648092A (en) * | 1985-09-25 | 1987-03-03 | Rockwell International Corporation | Phase coupling multiple lasers |
DE3850330T2 (de) * | 1987-02-24 | 1994-10-13 | Nippon Steel Corp | Gerät zur mattveredelung einer rolle mittels impulslaser. |
JPH01302881A (ja) * | 1988-05-31 | 1989-12-06 | Yoshiaki Arata | 大出力エキシマレーザービーム造出法 |
US5253110A (en) * | 1988-12-22 | 1993-10-12 | Nikon Corporation | Illumination optical arrangement |
DE4009859A1 (de) * | 1990-03-28 | 1991-10-02 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zur erzeugung von laserstrahlung hoher leistung und guter qualitaet |
TW207588B (de) * | 1990-09-19 | 1993-06-11 | Hitachi Seisakusyo Kk | |
IL101471A (en) * | 1991-05-01 | 1995-03-30 | Coherent Inc | Coupler for laser launch system |
ATE155933T1 (de) * | 1992-05-06 | 1997-08-15 | Electrox Ltd | System zum kombinieren von laserstrahlen |
DE4301689A1 (de) * | 1993-01-22 | 1994-07-28 | Deutsche Forsch Luft Raumfahrt | Leistungsgesteuertes fraktales Lasersystem |
US5463200A (en) * | 1993-02-11 | 1995-10-31 | Lumonics Inc. | Marking of a workpiece by light energy |
US5375132A (en) * | 1993-05-05 | 1994-12-20 | Coherent, Inc. | Solid state laser with interleaved output |
EP0700325B1 (de) * | 1993-05-19 | 1997-08-13 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Verfahren zur materialbearbeitung mit diodenstrahlung |
US5528612A (en) * | 1993-11-19 | 1996-06-18 | The United States Of America As Represented By The Secretary Of The Navy | Laser with multiple gain elements |
DE4429913C1 (de) * | 1994-08-23 | 1996-03-21 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zum Plattieren |
FR2737806B1 (fr) * | 1995-08-11 | 1997-09-12 | Soc D Production Et De Rech Ap | Dispositif et procede de traitement de surface par laser |
-
1995
- 1995-08-11 FR FR9509780A patent/FR2737814B1/fr not_active Expired - Fee Related
-
1996
- 1996-07-05 US US09/011,455 patent/US6014401A/en not_active Expired - Lifetime
- 1996-07-05 DE DE69602603T patent/DE69602603T2/de not_active Expired - Lifetime
- 1996-07-05 CA CA002225152A patent/CA2225152C/en not_active Expired - Fee Related
- 1996-07-05 AT AT96924950T patent/ATE180601T1/de not_active IP Right Cessation
- 1996-07-05 JP JP50898197A patent/JP4169366B2/ja not_active Expired - Lifetime
- 1996-07-05 KR KR10-1998-0700913A patent/KR100416246B1/ko not_active IP Right Cessation
- 1996-07-05 WO PCT/FR1996/001060 patent/WO1997007578A1/fr active IP Right Grant
- 1996-07-05 EP EP96924950A patent/EP0843909B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE180601T1 (de) | 1999-06-15 |
KR100416246B1 (ko) | 2004-03-26 |
US6014401A (en) | 2000-01-11 |
JP4169366B2 (ja) | 2008-10-22 |
JPH11511295A (ja) | 1999-09-28 |
FR2737814A1 (fr) | 1997-02-14 |
FR2737814B1 (fr) | 1997-09-12 |
KR19990036245A (ko) | 1999-05-25 |
EP0843909B1 (de) | 1999-05-26 |
CA2225152C (en) | 2007-05-08 |
EP0843909A1 (de) | 1998-05-27 |
CA2225152A1 (en) | 1997-02-27 |
DE69602603T2 (de) | 2000-02-24 |
WO1997007578A1 (fr) | 1997-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: EXCICO GROUP N.V., ANTWERPEN, BE |