DE69530093D1 - Verfahren zur herstellung eines optischen wellenleiterbauteils - Google Patents

Verfahren zur herstellung eines optischen wellenleiterbauteils

Info

Publication number
DE69530093D1
DE69530093D1 DE69530093T DE69530093T DE69530093D1 DE 69530093 D1 DE69530093 D1 DE 69530093D1 DE 69530093 T DE69530093 T DE 69530093T DE 69530093 T DE69530093 T DE 69530093T DE 69530093 D1 DE69530093 D1 DE 69530093D1
Authority
DE
Germany
Prior art keywords
component
substrate
grooves
producing
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530093T
Other languages
German (de)
English (en)
Inventor
Dobbelaere Martin De
Daele Paul Van
Ronald Moehlmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Ottawa Inc
Viavi Solutions Inc
Original Assignee
Lumentum Ottawa Inc
JDS Uniphase Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lumentum Ottawa Inc, JDS Uniphase Corp filed Critical Lumentum Ottawa Inc
Application granted granted Critical
Publication of DE69530093D1 publication Critical patent/DE69530093D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3664—2D cross sectional arrangements of the fibres
    • G02B6/3668—2D cross sectional arrangements of the fibres with conversion in geometry of the cross section
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Manufacturing Of Electric Cables (AREA)
DE69530093T 1994-08-26 1995-08-16 Verfahren zur herstellung eines optischen wellenleiterbauteils Expired - Lifetime DE69530093D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP94202447 1994-08-26
PCT/EP1995/003245 WO1996007116A2 (en) 1994-08-26 1995-08-16 A method of making an optical waveguide to fibre convector using a free-standing, flexible waveguide sheet

Publications (1)

Publication Number Publication Date
DE69530093D1 true DE69530093D1 (de) 2003-04-30

Family

ID=8217140

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530093T Expired - Lifetime DE69530093D1 (de) 1994-08-26 1995-08-16 Verfahren zur herstellung eines optischen wellenleiterbauteils

Country Status (8)

Country Link
US (2) US6097871A (enExample)
EP (1) EP0782714B1 (enExample)
KR (1) KR970705770A (enExample)
AT (1) ATE235699T1 (enExample)
CA (1) CA2198491A1 (enExample)
DE (1) DE69530093D1 (enExample)
TW (1) TW281731B (enExample)
WO (1) WO1996007116A2 (enExample)

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US6459842B1 (en) 2000-12-13 2002-10-01 Teraconnect, Inc. Packaging system for two-dimensional optoelectronic arrays
US6731843B2 (en) * 2000-12-29 2004-05-04 Intel Corporation Multi-level waveguide
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WO2006131924A2 (en) 2005-06-07 2006-12-14 Oree, Advanced Illumination Solutions Inc. Illumination apparatus
US8272758B2 (en) 2005-06-07 2012-09-25 Oree, Inc. Illumination apparatus and methods of forming the same
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US20070190762A1 (en) * 2006-02-13 2007-08-16 Asml Netherlands B.V. Device manufacturing method and computer program product
KR100848543B1 (ko) * 2006-09-27 2008-07-25 한국전자통신연구원 광송수신 소자의 광 연결 방법 및 그 광 연결 구조물
KR100871252B1 (ko) * 2007-01-19 2008-11-28 삼성전자주식회사 광섬유를 이용한 광/전기 배선을 갖는 연성 인쇄회로기판
DE102007017745A1 (de) * 2007-04-12 2008-10-23 Siemens Ag Bauteil mit einem eine Schnittstelle aufweisenden eingebetteten Wellenleiter und Verfahren zu dessen Herstellung
WO2008146290A2 (en) * 2007-05-29 2008-12-04 Oree, Advanced Illumination Solutions Inc. Method and device for providing circumferential illumination
US20090161369A1 (en) * 2007-12-19 2009-06-25 Keren Regev Waveguide sheet and methods for manufacturing the same
US8172447B2 (en) 2007-12-19 2012-05-08 Oree, Inc. Discrete lighting elements and planar assembly thereof
TW200946775A (en) * 2008-02-27 2009-11-16 Brilliant Film Llc Concentrators for solar power generating systems
EP2260341A2 (en) * 2008-03-05 2010-12-15 Oree, Advanced Illumination Solutions INC. Illumination apparatus and methods of forming the same
US8297786B2 (en) * 2008-07-10 2012-10-30 Oree, Inc. Slim waveguide coupling apparatus and method
US8301002B2 (en) 2008-07-10 2012-10-30 Oree, Inc. Slim waveguide coupling apparatus and method
US20100098377A1 (en) * 2008-10-16 2010-04-22 Noam Meir Light confinement using diffusers
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US20100208469A1 (en) * 2009-02-10 2010-08-19 Yosi Shani Illumination surfaces with reduced linear artifacts
US8624527B1 (en) 2009-03-27 2014-01-07 Oree, Inc. Independently controllable illumination device
US8328406B2 (en) 2009-05-13 2012-12-11 Oree, Inc. Low-profile illumination device
WO2010150202A2 (en) 2009-06-24 2010-12-29 Oree, Advanced Illumination Solutions Inc. Illumination apparatus with high conversion efficiency and methods of forming the same
US8764310B2 (en) 2010-07-15 2014-07-01 Tyco Electronics Nederland B.V. Apparatus and method for aligning optical transports in a ferrule
US8529138B2 (en) 2010-07-15 2013-09-10 Tyco Electronics Corporation Ferrule for optical transports
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US8591072B2 (en) 2011-11-16 2013-11-26 Oree, Inc. Illumination apparatus confining light by total internal reflection and methods of forming the same
US8534927B1 (en) 2012-03-23 2013-09-17 International Business Machines Corporation Flexible fiber to wafer interface
US9857519B2 (en) 2012-07-03 2018-01-02 Oree Advanced Illumination Solutions Ltd. Planar remote phosphor illumination apparatus
US9243784B2 (en) 2012-12-20 2016-01-26 International Business Machines Corporation Semiconductor photonic package
US9400356B2 (en) 2013-03-14 2016-07-26 International Business Machines Corporation Fiber pigtail with integrated lid
US8923665B2 (en) 2013-03-15 2014-12-30 International Business Machines Corporation Material structures for front-end of the line integration of optical polarization splitters and rotators
WO2017059445A1 (en) 2015-10-02 2017-04-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Fabrication of optical interconnect structures for a photonic integrated circuit
US11327225B2 (en) * 2016-04-29 2022-05-10 Arizona Board Of Regents On Behalf Of The University Of Arizona Optical printed circuit board with polymer array stitch
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US11650381B1 (en) * 2022-02-12 2023-05-16 Globalfoundries U.S. Inc. PIC die and package with cover for multiple level and multiple depth connections of fibers to on-chip optical components

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Also Published As

Publication number Publication date
CA2198491A1 (en) 1996-03-07
EP0782714B1 (en) 2003-03-26
TW281731B (enExample) 1996-07-21
ATE235699T1 (de) 2003-04-15
EP0782714A2 (en) 1997-07-09
US6549709B1 (en) 2003-04-15
WO1996007116A2 (en) 1996-03-07
KR970705770A (ko) 1997-10-09
US6097871A (en) 2000-08-01
WO1996007116A3 (en) 1996-05-23

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Legal Events

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8332 No legal effect for de