DE69529712D1 - Kühlkörper aus synthetischer Diamantschicht - Google Patents
Kühlkörper aus synthetischer DiamantschichtInfo
- Publication number
- DE69529712D1 DE69529712D1 DE69529712T DE69529712T DE69529712D1 DE 69529712 D1 DE69529712 D1 DE 69529712D1 DE 69529712 T DE69529712 T DE 69529712T DE 69529712 T DE69529712 T DE 69529712T DE 69529712 D1 DE69529712 D1 DE 69529712D1
- Authority
- DE
- Germany
- Prior art keywords
- heat sink
- diamond layer
- synthetic diamond
- sink made
- synthetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/38—Cooling arrangements using the Peltier effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3732—Diamonds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18238094 | 1994-08-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69529712D1 true DE69529712D1 (de) | 2003-04-03 |
DE69529712T2 DE69529712T2 (de) | 2003-10-23 |
Family
ID=16117306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529712T Expired - Lifetime DE69529712T2 (de) | 1994-08-03 | 1995-07-27 | Kühlkörper aus synthetischer Diamantschicht |
Country Status (3)
Country | Link |
---|---|
US (2) | US5663595A (de) |
EP (1) | EP0697726B1 (de) |
DE (1) | DE69529712T2 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5874775A (en) * | 1994-08-03 | 1999-02-23 | Sumitomo Electric Industries, Ltd. | Diamond heat sink including microchannel therein and methods for manufacturing diamond heat sinks |
DE19514548C1 (de) * | 1995-04-20 | 1996-10-02 | Daimler Benz Ag | Verfahren zur Herstellung einer Mikrokühleinrichtung |
JPH10226589A (ja) * | 1997-02-14 | 1998-08-25 | Sumitomo Electric Ind Ltd | ダイヤモンドヒートシンクの製造方法 |
DE19732439B4 (de) * | 1997-07-28 | 2006-01-19 | Infineon Technologies Ag | Leistungshalbleiterbauelement auf Kühlkörper |
JP3144387B2 (ja) * | 1998-08-17 | 2001-03-12 | 日本電気株式会社 | 半導体装置の製造方法 |
US6285702B1 (en) * | 1999-03-05 | 2001-09-04 | Coherent, Inc. | High-power external-cavity optically-pumped semiconductor laser |
CA2371767C (en) * | 1999-02-18 | 2007-05-08 | Toyo Kohan Co., Ltd. | Micro-chip for chemical reaction |
US7276222B2 (en) * | 2001-01-19 | 2007-10-02 | Chevron U.S.A. Inc. | Diamondoid-containing thermally conductive materials |
US6783589B2 (en) * | 2001-01-19 | 2004-08-31 | Chevron U.S.A. Inc. | Diamondoid-containing materials in microelectronics |
US7306674B2 (en) * | 2001-01-19 | 2007-12-11 | Chevron U.S.A. Inc. | Nucleation of diamond films using higher diamondoids |
JP4251986B2 (ja) * | 2001-11-09 | 2009-04-08 | 住友電工ハードメタル株式会社 | 高熱伝導性ダイヤモンド焼結体とその製造方法 |
US20030152773A1 (en) * | 2002-02-14 | 2003-08-14 | Chrysler Gregory M. | Diamond integrated heat spreader and method of manufacturing same |
US6924170B2 (en) * | 2003-06-30 | 2005-08-02 | Intel Corporation | Diamond-silicon hybrid integrated heat spreader |
US7312562B2 (en) * | 2004-02-04 | 2007-12-25 | Chevron U.S.A. Inc. | Heterodiamondoid-containing field emission devices |
DE112007001364B4 (de) * | 2006-06-07 | 2018-05-09 | Mitsubishi Electric Corp. | Halbleitereinrichtung und elektrische Einrichtung mit einer derartigen Halbleitereinrichtung |
JP5273922B2 (ja) * | 2006-12-28 | 2013-08-28 | 株式会社アライドマテリアル | 放熱部材および半導体装置 |
US8110846B2 (en) * | 2007-05-31 | 2012-02-07 | Chien-Min Sung | Diamond semiconductor devices and associated methods |
US20100304259A1 (en) * | 2009-05-26 | 2010-12-02 | Searete Llc. A Limited Liability Corporation Of The State Of Delaware | Method of operating an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials during charge and discharge |
US9093725B2 (en) * | 2009-05-26 | 2015-07-28 | The Invention Science Fund I, Llc | System for altering temperature of an electrical energy storage device or an electrochemical energy generation device using microchannels based on states of the device |
US8802266B2 (en) * | 2009-05-26 | 2014-08-12 | The Invention Science Fund I, Llc | System for operating an electrical energy storage device or an electrochemical energy generation device using microchannels based on mobile device states and vehicle states |
US8101293B2 (en) * | 2009-05-26 | 2012-01-24 | The Invention Science Fund I, Llc | System for altering temperature of an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials based on states of the device |
US20100304258A1 (en) * | 2009-05-26 | 2010-12-02 | Chan Alistair K | System and method of altering temperature of an electrical energy storage device or an electrochemical energy generation device using high thermal conductivity materials |
US8715875B2 (en) * | 2009-05-26 | 2014-05-06 | The Invention Science Fund I, Llc | System and method of operating an electrical energy storage device or an electrochemical energy generation device using thermal conductivity materials based on mobile device states and vehicle states |
CN109994923A (zh) * | 2019-03-26 | 2019-07-09 | 中国科学院半导体研究所 | 温度探测装置及其制作方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1452410A (fr) * | 1964-10-29 | 1966-02-25 | Bbc Brown Boveri & Cie | éléments de convertisseur statique à semi-conducteurs qui sont placés dans un dispositif de refroidissement |
US3872496A (en) * | 1973-09-13 | 1975-03-18 | Sperry Rand Corp | High frequency diode having simultaneously formed high strength bonds with respect to a diamond heat sink and said diode |
JPS60152045A (ja) * | 1984-01-20 | 1985-08-10 | Toshiba Corp | 半導体装置 |
JPS61253842A (ja) * | 1985-05-02 | 1986-11-11 | Nec Corp | Icチツプキヤリヤ |
US5022928A (en) * | 1985-10-04 | 1991-06-11 | Buist Richard J | Thermoelectric heat pump/power source device |
DE3784612T2 (de) * | 1986-09-26 | 1993-09-02 | Sumitomo Electric Industries | Thermistor und verfahren zu seiner herstellung. |
JP2716122B2 (ja) * | 1987-03-09 | 1998-02-18 | 日本電気株式会社 | アイソレータ内蔵型半導体レーザモジュール |
JP2695000B2 (ja) * | 1989-04-11 | 1997-12-24 | 住友電気工業株式会社 | サーミスタ及びその製造方法 |
JP2761759B2 (ja) * | 1989-06-22 | 1998-06-04 | 株式会社半導体エネルギー研究所 | ダイヤモンド電子装置 |
JP2799744B2 (ja) * | 1989-09-11 | 1998-09-21 | 株式会社半導体エネルギー研究所 | ダイヤモンドを用いたサーミスタの作製方法 |
JP2775903B2 (ja) * | 1989-10-04 | 1998-07-16 | 住友電気工業株式会社 | ダイヤモンド半導体素子 |
JP2730271B2 (ja) * | 1990-03-07 | 1998-03-25 | 住友電気工業株式会社 | 半導体装置 |
JP2961812B2 (ja) * | 1990-05-17 | 1999-10-12 | 住友電気工業株式会社 | 半導体装置 |
US5173761A (en) * | 1991-01-28 | 1992-12-22 | Kobe Steel Usa Inc., Electronic Materials Center | Semiconducting polycrystalline diamond electronic devices employing an insulating diamond layer |
JP2500208B2 (ja) * | 1991-09-06 | 1996-05-29 | 住友電気工業株式会社 | ヒ―トシンクとその製造方法 |
WO1993008600A1 (en) * | 1991-10-15 | 1993-04-29 | Velox Computer Technology, Inc. | Intrinsically controlled cooling container |
JPH05299635A (ja) * | 1992-04-23 | 1993-11-12 | Kobe Steel Ltd | 耐熱性オーミック電極を備えたダイヤモンド薄膜及びその製造方法 |
US5362975A (en) * | 1992-09-02 | 1994-11-08 | Kobe Steel Usa | Diamond-based chemical sensors |
US5272104A (en) * | 1993-03-11 | 1993-12-21 | Harris Corporation | Bonded wafer process incorporating diamond insulator |
JP3353987B2 (ja) * | 1994-01-10 | 2002-12-09 | 株式会社半導体エネルギー研究所 | 素子作製方法 |
US5391914A (en) * | 1994-03-16 | 1995-02-21 | The United States Of America As Represented By The Secretary Of The Navy | Diamond multilayer multichip module substrate |
JP3024775U (ja) | 1995-11-17 | 1996-05-31 | 孝子 三角 | ハーブ入り香りシート |
-
1995
- 1995-07-27 DE DE69529712T patent/DE69529712T2/de not_active Expired - Lifetime
- 1995-07-27 EP EP95111873A patent/EP0697726B1/de not_active Expired - Lifetime
- 1995-07-31 US US08/509,569 patent/US5663595A/en not_active Expired - Lifetime
-
1997
- 1997-03-12 US US08/815,781 patent/US5976909A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0697726A2 (de) | 1996-02-21 |
EP0697726B1 (de) | 2003-02-26 |
EP0697726A3 (de) | 1996-09-11 |
US5976909A (en) | 1999-11-02 |
DE69529712T2 (de) | 2003-10-23 |
US5663595A (en) | 1997-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033 |