DE69529642D1 - Vorrichtung zur Emission von Elektronen - Google Patents

Vorrichtung zur Emission von Elektronen

Info

Publication number
DE69529642D1
DE69529642D1 DE69529642T DE69529642T DE69529642D1 DE 69529642 D1 DE69529642 D1 DE 69529642D1 DE 69529642 T DE69529642 T DE 69529642T DE 69529642 T DE69529642 T DE 69529642T DE 69529642 D1 DE69529642 D1 DE 69529642D1
Authority
DE
Germany
Prior art keywords
electron emission
emission device
electron
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69529642T
Other languages
English (en)
Other versions
DE69529642T2 (de
Inventor
Yoshiaki Akama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP06608095A external-priority patent/JP3526344B2/ja
Priority claimed from JP12757695A external-priority patent/JP3579127B2/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69529642D1 publication Critical patent/DE69529642D1/de
Application granted granted Critical
Publication of DE69529642T2 publication Critical patent/DE69529642T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
DE69529642T 1994-05-18 1995-05-17 Vorrichtung zur Emission von Elektronen Expired - Fee Related DE69529642T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP10388194 1994-05-18
JP6619095 1995-03-24
JP06608095A JP3526344B2 (ja) 1995-03-24 1995-03-24 電界電子放出素子、この電界電子放出素子を用いた電子放出源および平面ディスプレイ装置、電界電子放出素子の製造方法
JP12757695A JP3579127B2 (ja) 1994-05-18 1995-04-28 電界電子放出素子、この電界電子放出素子を用いた電子放出源および平面ディスプレイ装置、および電界電子放出素子の製造方法

Publications (2)

Publication Number Publication Date
DE69529642D1 true DE69529642D1 (de) 2003-03-27
DE69529642T2 DE69529642T2 (de) 2003-12-04

Family

ID=27464661

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529642T Expired - Fee Related DE69529642T2 (de) 1994-05-18 1995-05-17 Vorrichtung zur Emission von Elektronen

Country Status (3)

Country Link
US (1) US5903092A (de)
EP (1) EP0687018B1 (de)
DE (1) DE69529642T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100405886B1 (ko) * 1995-08-04 2004-04-03 프린터블 필드 에미터스 리미티드 전계전자방출물질과그제조방법및그물질을이용한소자
GB2330687B (en) * 1997-10-22 1999-09-29 Printable Field Emitters Ltd Field emission devices
DE19800555A1 (de) * 1998-01-09 1999-07-15 Ibm Feldemissionskomponente, Verfahren zu ihrer Herstellung und Verwendung derselben
RU2194328C2 (ru) 1998-05-19 2002-12-10 ООО "Высокие технологии" Холодноэмиссионный пленочный катод и способ его получения
DE19931328A1 (de) * 1999-07-01 2001-01-11 Codixx Ag Flächige Elektronen-Feldemissionsquelle und Verfahren zu deren Herstellung
ATE472168T1 (de) 2000-05-11 2010-07-15 Panasonic Corp Elektronenemissions-dünnfilm, plasma-display- tafel damit und verfahren zu ihrer herstellung
JPWO2002037518A1 (ja) * 2000-11-06 2004-03-11 富士通株式会社 電界放出陰極とその製造方法
US6798131B2 (en) * 2000-11-20 2004-09-28 Si Diamond Technology, Inc. Display having a grid electrode with individually controllable grid portions
JPWO2003085692A1 (ja) * 2002-04-11 2005-08-18 三菱電機株式会社 冷陰極表示装置及び冷陰極表示装置の製造方法
JP3510235B2 (ja) * 2002-04-18 2004-03-22 沖電気工業株式会社 半導体装置の製造方法
US8946739B2 (en) * 2005-09-30 2015-02-03 Lateral Research Limited Liability Company Process to fabricate integrated MWIR emitter
KR100768194B1 (ko) * 2005-11-30 2007-10-18 삼성에스디아이 주식회사 플라즈마 디스플레이 패널
KR100738089B1 (ko) * 2005-12-30 2007-07-12 삼성전자주식회사 표면 전자방출 소자 어레이를 이용한 ｔｆｔ 검사 장치
CN102074429B (zh) * 2010-12-27 2013-11-06 清华大学 场发射阴极结构及其制备方法
CN103854935B (zh) * 2012-12-06 2016-09-07 清华大学 场发射阴极装置及场发射器件

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3466485A (en) * 1967-09-21 1969-09-09 Bell Telephone Labor Inc Cold cathode emitter having a mosaic of closely spaced needles
US3789471A (en) * 1970-02-06 1974-02-05 Stanford Research Inst Field emission cathode structures, devices utilizing such structures, and methods of producing such structures
US3755704A (en) * 1970-02-06 1973-08-28 Stanford Research Inst Field emission cathode structures and devices utilizing such structures
US3720856A (en) * 1970-07-29 1973-03-13 Westinghouse Electric Corp Binary material field emitter structure
US3671798A (en) * 1970-12-11 1972-06-20 Nasa Method and apparatus for limiting field-emission current
US4163949A (en) * 1977-12-27 1979-08-07 Joe Shelton Tubistor
US4345181A (en) * 1980-06-02 1982-08-17 Joe Shelton Edge effect elimination and beam forming designs for field emitting arrays
US4578614A (en) * 1982-07-23 1986-03-25 The United States Of America As Represented By The Secretary Of The Navy Ultra-fast field emitter array vacuum integrated circuit switching device
DE3853744T2 (de) * 1987-07-15 1996-01-25 Canon Kk Elektronenemittierende Vorrichtung.
US5362972A (en) * 1990-04-20 1994-11-08 Hitachi, Ltd. Semiconductor device using whiskers
JPH0445560A (ja) * 1990-06-12 1992-02-14 Sony Corp タングステン配線膜の形成方法
JP3037780B2 (ja) * 1991-05-31 2000-05-08 株式会社東芝 マイクロエミッタの製造方法
US5283501A (en) * 1991-07-18 1994-02-01 Motorola, Inc. Electron device employing a low/negative electron affinity electron source
JPH0541152A (ja) * 1991-08-07 1993-02-19 Mitsubishi Electric Corp 電界放出陰極の製造方法
JP2728813B2 (ja) * 1991-10-02 1998-03-18 シャープ株式会社 電界放出型電子源及びその製造方法
JPH06203741A (ja) * 1992-12-29 1994-07-22 Canon Inc 電子放出素子、電子線発生装置及び画像形成装置
JPH06203747A (ja) * 1993-01-08 1994-07-22 Dainippon Printing Co Ltd 電子放出用冷陰極の製造方法
JPH06203748A (ja) * 1993-01-08 1994-07-22 Dainippon Printing Co Ltd 電子放出用冷陰極の製造方法

Also Published As

Publication number Publication date
EP0687018A2 (de) 1995-12-13
EP0687018B1 (de) 2003-02-19
DE69529642T2 (de) 2003-12-04
EP0687018A3 (de) 1996-04-24
US5903092A (en) 1999-05-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee