DE69526891D1 - Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip"-Bondtechnik - Google Patents

Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip"-Bondtechnik

Info

Publication number
DE69526891D1
DE69526891D1 DE69526891T DE69526891T DE69526891D1 DE 69526891 D1 DE69526891 D1 DE 69526891D1 DE 69526891 T DE69526891 T DE 69526891T DE 69526891 T DE69526891 T DE 69526891T DE 69526891 D1 DE69526891 D1 DE 69526891D1
Authority
DE
Germany
Prior art keywords
opto
flip
chip
optical waveguides
bonding technology
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69526891T
Other languages
English (en)
Other versions
DE69526891T2 (de
Inventor
Kenneth H Hahn
Ronald T Kaneshiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE69526891D1 publication Critical patent/DE69526891D1/de
Application granted granted Critical
Publication of DE69526891T2 publication Critical patent/DE69526891T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/49105—Connecting at different heights
    • H01L2224/49109—Connecting at different heights outside the semiconductor or solid-state body

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
DE69526891T 1994-08-31 1995-07-11 Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip"-Bondtechnik Expired - Fee Related DE69526891T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/299,176 US5499312A (en) 1993-11-09 1994-08-31 Passive alignment and packaging of optoelectronic components to optical waveguides using flip-chip bonding technology

Publications (2)

Publication Number Publication Date
DE69526891D1 true DE69526891D1 (de) 2002-07-11
DE69526891T2 DE69526891T2 (de) 2002-11-07

Family

ID=23153625

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69529582T Expired - Fee Related DE69529582T2 (de) 1994-08-31 1995-07-11 Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip" Bondtechnik
DE69526891T Expired - Fee Related DE69526891T2 (de) 1994-08-31 1995-07-11 Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip"-Bondtechnik

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69529582T Expired - Fee Related DE69529582T2 (de) 1994-08-31 1995-07-11 Passive Ausrichtung von opto-elektronischen Baugruppen und optischen Wellenleitern mittels "Flip-Chip" Bondtechnik

Country Status (4)

Country Link
US (1) US5499312A (de)
EP (2) EP1120673B1 (de)
JP (1) JP3720877B2 (de)
DE (2) DE69529582T2 (de)

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Also Published As

Publication number Publication date
EP1120673B1 (de) 2003-02-05
JPH0875957A (ja) 1996-03-22
JP3720877B2 (ja) 2005-11-30
EP0699931B1 (de) 2002-06-05
DE69529582T2 (de) 2003-12-11
DE69526891T2 (de) 2002-11-07
EP1120673A1 (de) 2001-08-01
DE69529582D1 (de) 2003-03-13
US5499312A (en) 1996-03-12
EP0699931A1 (de) 1996-03-06

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Owner name: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD.,

8339 Ceased/non-payment of the annual fee