DE69524854D1 - Beschleunigungsmesser mit Torsionsstab - Google Patents

Beschleunigungsmesser mit Torsionsstab

Info

Publication number
DE69524854D1
DE69524854D1 DE69524854T DE69524854T DE69524854D1 DE 69524854 D1 DE69524854 D1 DE 69524854D1 DE 69524854 T DE69524854 T DE 69524854T DE 69524854 T DE69524854 T DE 69524854T DE 69524854 D1 DE69524854 D1 DE 69524854D1
Authority
DE
Germany
Prior art keywords
accelerometer
torsion bar
torsion
bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69524854T
Other languages
English (en)
Other versions
DE69524854T2 (de
Inventor
Craig H Stephan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Werke GmbH
Ford France SA
Ford Motor Co Ltd
Original Assignee
Ford Werke GmbH
Ford France SA
Ford Motor Co Ltd
Ford Motor Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Werke GmbH, Ford France SA, Ford Motor Co Ltd, Ford Motor Co filed Critical Ford Werke GmbH
Publication of DE69524854D1 publication Critical patent/DE69524854D1/de
Application granted granted Critical
Publication of DE69524854T2 publication Critical patent/DE69524854T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69524854T 1994-12-19 1995-11-27 Beschleunigungsmesser mit Torsionsstab Expired - Fee Related DE69524854T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/358,299 US5488864A (en) 1994-12-19 1994-12-19 Torsion beam accelerometer with slotted tilt plate

Publications (2)

Publication Number Publication Date
DE69524854D1 true DE69524854D1 (de) 2002-02-07
DE69524854T2 DE69524854T2 (de) 2002-09-19

Family

ID=23409116

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69524854T Expired - Fee Related DE69524854T2 (de) 1994-12-19 1995-11-27 Beschleunigungsmesser mit Torsionsstab

Country Status (5)

Country Link
US (1) US5488864A (de)
EP (1) EP0718632B1 (de)
JP (1) JPH08220134A (de)
CA (1) CA2165488A1 (de)
DE (1) DE69524854T2 (de)

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US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
JP3941694B2 (ja) * 2001-11-19 2007-07-04 三菱電機株式会社 加速度センサ
WO2003083492A1 (en) * 2002-03-26 2003-10-09 The Charles Stark Draper Laboratory, Inc. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
DE10250358B4 (de) * 2002-10-29 2017-02-09 Infineon Technologies Ag Sensormodul zur Messung mechanischer Kräfte
FI119159B (fi) * 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
EP1711836A1 (de) * 2004-01-07 2006-10-18 Northrop Grumman Corporation Zur messung von beschleunigung entlang dreier achsen verwendbare coplanare prüfmassen
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US7210352B2 (en) * 2005-06-14 2007-05-01 Innovative Micro Technology MEMS teeter-totter apparatus with curved beam and method of manufacture
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
DE102006022811A1 (de) * 2006-05-16 2007-11-22 Robert Bosch Gmbh Beschleunigungssensor
DE102006026880B4 (de) 2006-06-09 2023-02-16 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
JP5181452B2 (ja) * 2006-09-29 2013-04-10 三菱電機株式会社 加速度センサ
US7624638B2 (en) * 2006-11-09 2009-12-01 Mitsubishi Electric Corporation Electrostatic capacitance type acceleration sensor
DE102006057929A1 (de) * 2006-12-08 2008-06-12 Robert Bosch Gmbh Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren
DE102006058747A1 (de) * 2006-12-12 2008-06-19 Robert Bosch Gmbh Mikromechanischer z-Sensor
ITTO20070033A1 (it) * 2007-01-19 2008-07-20 St Microelectronics Srl Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata
US8368387B2 (en) * 2008-04-11 2013-02-05 Mitsubishi Electric Corporation Acceleration sensor
DE102009000594A1 (de) * 2009-02-04 2010-08-05 Robert Bosch Gmbh Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors
DE102009026462B4 (de) * 2009-05-26 2023-03-30 Robert Bosch Gmbh Beschleunigungssensor
JP2011022137A (ja) * 2009-06-15 2011-02-03 Rohm Co Ltd Ｍｅｍｓ装置及びその製造方法
WO2011130941A1 (zh) * 2010-04-20 2011-10-27 浙江大学 变面积电容结构、梳状栅电容加速度计以及梳状栅电容陀螺
JP5527019B2 (ja) 2010-05-28 2014-06-18 セイコーエプソン株式会社 物理量センサーおよび電子機器
DE102010039240B4 (de) * 2010-08-12 2021-06-24 Robert Bosch Gmbh Beschleunigungssensor
JP2012088120A (ja) * 2010-10-18 2012-05-10 Seiko Epson Corp 物理量センサー素子、物理量センサーおよび電子機器
EP2514713B1 (de) 2011-04-20 2013-10-02 Tronics Microsystems S.A. Mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung)
JP5790296B2 (ja) 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
JP5979344B2 (ja) 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP2013181855A (ja) 2012-03-02 2013-09-12 Seiko Epson Corp 物理量センサーおよび電子機器
JP5935986B2 (ja) 2012-04-06 2016-06-15 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5930183B2 (ja) 2012-04-09 2016-06-08 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5943192B2 (ja) 2012-04-10 2016-06-29 セイコーエプソン株式会社 物理量センサーおよびその製造方法、並びに電子機器
JP5942554B2 (ja) 2012-04-11 2016-06-29 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP6206650B2 (ja) 2013-07-17 2017-10-04 セイコーエプソン株式会社 機能素子、電子機器、および移動体
JP6274413B2 (ja) * 2014-02-25 2018-02-07 セイコーエプソン株式会社 機能素子、電子機器、および移動体
US9810712B2 (en) 2014-08-15 2017-11-07 Seiko Epson Corporation Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body
JP6655281B2 (ja) * 2014-08-19 2020-02-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6464613B2 (ja) 2014-08-27 2019-02-06 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP6367090B2 (ja) * 2014-11-14 2018-08-01 株式会社東芝 建築物への航空機衝突検知方法及び装置、並びに建築物の開口部閉塞設備
JP6631108B2 (ja) * 2015-09-15 2020-01-15 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器および移動体
US9663348B1 (en) 2015-11-09 2017-05-30 Nxp Usa, Inc. MEMS device with isolation sub-frame structure
US10393770B2 (en) * 2016-04-28 2019-08-27 Semiconductor Components Industries, Llc Multi-axis accelerometer with reduced stress sensitivity
US10247753B2 (en) * 2017-02-14 2019-04-02 Nxp Usa, Inc. MEMS device with off-axis shock protection
TWI668412B (zh) * 2017-05-08 2019-08-11 日商村田製作所股份有限公司 電容式微機電加速度計及相關方法
JP6677269B2 (ja) * 2017-05-08 2020-04-08 株式会社村田製作所 容量性微小電気機械加速度計
US10816569B2 (en) 2018-09-07 2020-10-27 Analog Devices, Inc. Z axis accelerometer using variable vertical gaps
US11255873B2 (en) 2018-09-12 2022-02-22 Analog Devices, Inc. Increased sensitivity z-axis accelerometer
JP2021001853A (ja) 2019-06-24 2021-01-07 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7331498B2 (ja) 2019-06-27 2023-08-23 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP2021071394A (ja) * 2019-10-31 2021-05-06 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
US11307218B2 (en) * 2020-05-22 2022-04-19 Invensense, Inc. Real-time isolation of self-test and linear acceleration signals

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US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer
FR2694403B1 (fr) * 1992-07-31 1994-10-07 Sagem Accéléromètre pendulaire électrostatique à électrode de test et procédé de fabrication d'un tel accéléromètre.
US5404749A (en) * 1993-04-07 1995-04-11 Ford Motor Company Boron doped silicon accelerometer sense element

Also Published As

Publication number Publication date
EP0718632A2 (de) 1996-06-26
US5488864A (en) 1996-02-06
EP0718632B1 (de) 2002-01-02
CA2165488A1 (en) 1996-06-20
JPH08220134A (ja) 1996-08-30
EP0718632A3 (de) 1998-03-11
DE69524854T2 (de) 2002-09-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FORD-WERKE GMBH, 50735 KOELN, DE

Owner name: FORD MOTOR CO. LTD., BRENTWOOD, ESSEX, GB

Owner name: FORD FRANCE S.A., RUEIL-MALMAISON, FR

8339 Ceased/non-payment of the annual fee