DE69524854D1 - Beschleunigungsmesser mit Torsionsstab - Google Patents
Beschleunigungsmesser mit TorsionsstabInfo
- Publication number
- DE69524854D1 DE69524854D1 DE69524854T DE69524854T DE69524854D1 DE 69524854 D1 DE69524854 D1 DE 69524854D1 DE 69524854 T DE69524854 T DE 69524854T DE 69524854 T DE69524854 T DE 69524854T DE 69524854 D1 DE69524854 D1 DE 69524854D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- torsion bar
- torsion
- bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/358,299 US5488864A (en) | 1994-12-19 | 1994-12-19 | Torsion beam accelerometer with slotted tilt plate |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69524854D1 true DE69524854D1 (de) | 2002-02-07 |
DE69524854T2 DE69524854T2 (de) | 2002-09-19 |
Family
ID=23409116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69524854T Expired - Fee Related DE69524854T2 (de) | 1994-12-19 | 1995-11-27 | Beschleunigungsmesser mit Torsionsstab |
Country Status (5)
Country | Link |
---|---|
US (1) | US5488864A (de) |
EP (1) | EP0718632B1 (de) |
JP (1) | JPH08220134A (de) |
CA (1) | CA2165488A1 (de) |
DE (1) | DE69524854T2 (de) |
Families Citing this family (65)
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---|---|---|---|---|
US5510156A (en) * | 1994-08-23 | 1996-04-23 | Analog Devices, Inc. | Micromechanical structure with textured surface and method for making same |
DE19547642A1 (de) * | 1994-12-20 | 1996-06-27 | Zexel Corp | Beschleunigungssensor und Verfahren zu dessen Herstellung |
US5936294A (en) * | 1996-05-28 | 1999-08-10 | Motorola, Inc. | Optical semiconductor component and method of fabrication |
US5920013A (en) * | 1997-02-07 | 1999-07-06 | Ford Motor Company | Silicon micromachine with sacrificial pedestal |
US6000287A (en) * | 1998-08-28 | 1999-12-14 | Ford Motor Company | Capacitor center of area sensitivity in angular motion micro-electromechanical systems |
GB0000619D0 (en) * | 2000-01-13 | 2000-03-01 | British Aerospace | Accelerometer |
US7280014B2 (en) * | 2001-03-13 | 2007-10-09 | Rochester Institute Of Technology | Micro-electro-mechanical switch and a method of using and making thereof |
AU2002303933A1 (en) * | 2001-05-31 | 2002-12-09 | Rochester Institute Of Technology | Fluidic valves, agitators, and pumps and methods thereof |
WO2003008937A2 (en) * | 2001-07-18 | 2003-01-30 | The Regents Of The University Of Michigan | Gas-focusing flow cytometer cell and flow cytometer detection system with waveguide optics |
US6792804B2 (en) | 2001-10-19 | 2004-09-21 | Kionix, Inc. | Sensor for measuring out-of-plane acceleration |
US6854330B2 (en) | 2001-10-26 | 2005-02-15 | Nth Tech Corporation | Accelerometer and methods thereof |
US7211923B2 (en) * | 2001-10-26 | 2007-05-01 | Nth Tech Corporation | Rotational motion based, electrostatic power source and methods thereof |
US7378775B2 (en) * | 2001-10-26 | 2008-05-27 | Nth Tech Corporation | Motion based, electrostatic power source and methods thereof |
JP3941694B2 (ja) * | 2001-11-19 | 2007-07-04 | 三菱電機株式会社 | 加速度センサ |
WO2003083492A1 (en) * | 2002-03-26 | 2003-10-09 | The Charles Stark Draper Laboratory, Inc. | Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same |
DE10250358B4 (de) * | 2002-10-29 | 2017-02-09 | Infineon Technologies Ag | Sensormodul zur Messung mechanischer Kräfte |
FI119159B (fi) * | 2003-02-11 | 2008-08-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
US7217582B2 (en) * | 2003-08-29 | 2007-05-15 | Rochester Institute Of Technology | Method for non-damaging charge injection and a system thereof |
US7287328B2 (en) * | 2003-08-29 | 2007-10-30 | Rochester Institute Of Technology | Methods for distributed electrode injection |
EP1711836A1 (de) * | 2004-01-07 | 2006-10-18 | Northrop Grumman Corporation | Zur messung von beschleunigung entlang dreier achsen verwendbare coplanare prüfmassen |
US8581308B2 (en) * | 2004-02-19 | 2013-11-12 | Rochester Institute Of Technology | High temperature embedded charge devices and methods thereof |
US7210352B2 (en) * | 2005-06-14 | 2007-05-01 | Innovative Micro Technology | MEMS teeter-totter apparatus with curved beam and method of manufacture |
US20070074731A1 (en) * | 2005-10-05 | 2007-04-05 | Nth Tech Corporation | Bio-implantable energy harvester systems and methods thereof |
DE102006022811A1 (de) * | 2006-05-16 | 2007-11-22 | Robert Bosch Gmbh | Beschleunigungssensor |
DE102006026880B4 (de) | 2006-06-09 | 2023-02-16 | Robert Bosch Gmbh | Mikromechanischer Beschleunigungssensor |
JP5181452B2 (ja) * | 2006-09-29 | 2013-04-10 | 三菱電機株式会社 | 加速度センサ |
US7624638B2 (en) * | 2006-11-09 | 2009-12-01 | Mitsubishi Electric Corporation | Electrostatic capacitance type acceleration sensor |
DE102006057929A1 (de) * | 2006-12-08 | 2008-06-12 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren |
DE102006058747A1 (de) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Mikromechanischer z-Sensor |
ITTO20070033A1 (it) * | 2007-01-19 | 2008-07-20 | St Microelectronics Srl | Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata |
US8368387B2 (en) * | 2008-04-11 | 2013-02-05 | Mitsubishi Electric Corporation | Acceleration sensor |
DE102009000594A1 (de) * | 2009-02-04 | 2010-08-05 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors |
DE102009026462B4 (de) * | 2009-05-26 | 2023-03-30 | Robert Bosch Gmbh | Beschleunigungssensor |
JP2011022137A (ja) * | 2009-06-15 | 2011-02-03 | Rohm Co Ltd | Mems装置及びその製造方法 |
WO2011130941A1 (zh) * | 2010-04-20 | 2011-10-27 | 浙江大学 | 变面积电容结构、梳状栅电容加速度计以及梳状栅电容陀螺 |
JP5527019B2 (ja) | 2010-05-28 | 2014-06-18 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
DE102010039240B4 (de) * | 2010-08-12 | 2021-06-24 | Robert Bosch Gmbh | Beschleunigungssensor |
JP2012088120A (ja) * | 2010-10-18 | 2012-05-10 | Seiko Epson Corp | 物理量センサー素子、物理量センサーおよび電子機器 |
EP2514713B1 (de) | 2011-04-20 | 2013-10-02 | Tronics Microsystems S.A. | Mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung) |
JP5790296B2 (ja) | 2011-08-17 | 2015-10-07 | セイコーエプソン株式会社 | 物理量センサー及び電子機器 |
JP5979344B2 (ja) | 2012-01-30 | 2016-08-24 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP2013181855A (ja) | 2012-03-02 | 2013-09-12 | Seiko Epson Corp | 物理量センサーおよび電子機器 |
JP5935986B2 (ja) | 2012-04-06 | 2016-06-15 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP5930183B2 (ja) | 2012-04-09 | 2016-06-08 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP5943192B2 (ja) | 2012-04-10 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよびその製造方法、並びに電子機器 |
JP5942554B2 (ja) | 2012-04-11 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP6206650B2 (ja) | 2013-07-17 | 2017-10-04 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
JP6274413B2 (ja) * | 2014-02-25 | 2018-02-07 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
US9810712B2 (en) | 2014-08-15 | 2017-11-07 | Seiko Epson Corporation | Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body |
JP6655281B2 (ja) * | 2014-08-19 | 2020-02-26 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6464613B2 (ja) | 2014-08-27 | 2019-02-06 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6367090B2 (ja) * | 2014-11-14 | 2018-08-01 | 株式会社東芝 | 建築物への航空機衝突検知方法及び装置、並びに建築物の開口部閉塞設備 |
JP6631108B2 (ja) * | 2015-09-15 | 2020-01-15 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器および移動体 |
US9663348B1 (en) | 2015-11-09 | 2017-05-30 | Nxp Usa, Inc. | MEMS device with isolation sub-frame structure |
US10393770B2 (en) * | 2016-04-28 | 2019-08-27 | Semiconductor Components Industries, Llc | Multi-axis accelerometer with reduced stress sensitivity |
US10247753B2 (en) * | 2017-02-14 | 2019-04-02 | Nxp Usa, Inc. | MEMS device with off-axis shock protection |
TWI668412B (zh) * | 2017-05-08 | 2019-08-11 | 日商村田製作所股份有限公司 | 電容式微機電加速度計及相關方法 |
JP6677269B2 (ja) * | 2017-05-08 | 2020-04-08 | 株式会社村田製作所 | 容量性微小電気機械加速度計 |
US10816569B2 (en) | 2018-09-07 | 2020-10-27 | Analog Devices, Inc. | Z axis accelerometer using variable vertical gaps |
US11255873B2 (en) | 2018-09-12 | 2022-02-22 | Analog Devices, Inc. | Increased sensitivity z-axis accelerometer |
JP2021001853A (ja) | 2019-06-24 | 2021-01-07 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7331498B2 (ja) | 2019-06-27 | 2023-08-23 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
JP7383978B2 (ja) * | 2019-10-23 | 2023-11-21 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP2021071394A (ja) * | 2019-10-31 | 2021-05-06 | セイコーエプソン株式会社 | 物理量センサー、電子機器及び移動体 |
US11307218B2 (en) * | 2020-05-22 | 2022-04-19 | Invensense, Inc. | Real-time isolation of self-test and linear acceleration signals |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
US4598585A (en) * | 1984-03-19 | 1986-07-08 | The Charles Stark Draper Laboratory, Inc. | Planar inertial sensor |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
US5220835A (en) * | 1991-09-12 | 1993-06-22 | Ford Motor Company | Torsion beam accelerometer |
FR2694403B1 (fr) * | 1992-07-31 | 1994-10-07 | Sagem | Accéléromètre pendulaire électrostatique à électrode de test et procédé de fabrication d'un tel accéléromètre. |
US5404749A (en) * | 1993-04-07 | 1995-04-11 | Ford Motor Company | Boron doped silicon accelerometer sense element |
-
1994
- 1994-12-19 US US08/358,299 patent/US5488864A/en not_active Expired - Lifetime
-
1995
- 1995-10-19 JP JP7271325A patent/JPH08220134A/ja active Pending
- 1995-11-27 DE DE69524854T patent/DE69524854T2/de not_active Expired - Fee Related
- 1995-11-27 EP EP95308476A patent/EP0718632B1/de not_active Expired - Lifetime
- 1995-12-18 CA CA002165488A patent/CA2165488A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP0718632A2 (de) | 1996-06-26 |
US5488864A (en) | 1996-02-06 |
EP0718632B1 (de) | 2002-01-02 |
CA2165488A1 (en) | 1996-06-20 |
JPH08220134A (ja) | 1996-08-30 |
EP0718632A3 (de) | 1998-03-11 |
DE69524854T2 (de) | 2002-09-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FORD-WERKE GMBH, 50735 KOELN, DE Owner name: FORD MOTOR CO. LTD., BRENTWOOD, ESSEX, GB Owner name: FORD FRANCE S.A., RUEIL-MALMAISON, FR |
|
8339 | Ceased/non-payment of the annual fee |