DE69519941D1 - Sensor mit verschiedenen rückstell-und messfingern - Google Patents
Sensor mit verschiedenen rückstell-und messfingernInfo
- Publication number
- DE69519941D1 DE69519941D1 DE69519941T DE69519941T DE69519941D1 DE 69519941 D1 DE69519941 D1 DE 69519941D1 DE 69519941 T DE69519941 T DE 69519941T DE 69519941 T DE69519941 T DE 69519941T DE 69519941 D1 DE69519941 D1 DE 69519941D1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- different reset
- measuring fingers
- fingers
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
- H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/347,795 US5565625A (en) | 1994-12-01 | 1994-12-01 | Sensor with separate actuator and sense fingers |
PCT/US1995/015284 WO1996017232A1 (en) | 1994-12-01 | 1995-11-29 | Sensor with separate actuator and sense fingers |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69519941D1 true DE69519941D1 (de) | 2001-02-22 |
DE69519941T2 DE69519941T2 (de) | 2001-04-26 |
Family
ID=23365305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69519941T Expired - Lifetime DE69519941T2 (de) | 1994-12-01 | 1995-11-29 | Sensor mit verschiedenen rückstell-und messfingern |
Country Status (4)
Country | Link |
---|---|
US (2) | US5565625A (de) |
EP (1) | EP0795122B1 (de) |
DE (1) | DE69519941T2 (de) |
WO (1) | WO1996017232A1 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
US6316796B1 (en) | 1995-05-24 | 2001-11-13 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
US6084257A (en) * | 1995-05-24 | 2000-07-04 | Lucas Novasensor | Single crystal silicon sensor with high aspect ratio and curvilinear structures |
US5880369A (en) * | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
US6250156B1 (en) | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
DE19719779A1 (de) * | 1997-05-10 | 1998-11-12 | Bosch Gmbh Robert | Beschleunigungssensor |
US6121552A (en) * | 1997-06-13 | 2000-09-19 | The Regents Of The University Of Caliofornia | Microfabricated high aspect ratio device with an electrical isolation trench |
US6223598B1 (en) | 1997-06-18 | 2001-05-01 | Analog Devices, Inc. | Suspension arrangement for semiconductor accelerometer |
US6070464A (en) * | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
US6275034B1 (en) | 1998-03-11 | 2001-08-14 | Analog Devices Inc. | Micromachined semiconductor magnetic sensor |
US6230563B1 (en) | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
US6606913B1 (en) | 1998-11-06 | 2003-08-19 | Wisconsin Alumni Research Foundation | Micromachined strain sensor |
US6386032B1 (en) | 1999-08-26 | 2002-05-14 | Analog Devices Imi, Inc. | Micro-machined accelerometer with improved transfer characteristics |
EP1083431A1 (de) * | 1999-09-10 | 2001-03-14 | STMicroelectronics S.r.l. | Verfahren zur Kompensation von Positionsfehlern eines kapazitiven inertialen Sensors, und kapazitiver inertialer Sensor |
DE10046958B4 (de) * | 1999-09-27 | 2009-01-02 | Denso Corp., Kariya-shi | Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse |
DE19959707A1 (de) * | 1999-12-10 | 2001-06-13 | Bosch Gmbh Robert | Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor |
US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
US6629461B2 (en) * | 2000-03-24 | 2003-10-07 | Onix Microsystems, Inc. | Biased rotatable combdrive actuator methods |
US6593677B2 (en) | 2000-03-24 | 2003-07-15 | Onix Microsystems, Inc. | Biased rotatable combdrive devices and methods |
US6612029B2 (en) | 2000-03-24 | 2003-09-02 | Onix Microsystems | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
TW574128B (en) * | 2002-11-29 | 2004-02-01 | Lightuning Tech Inc | Thermal bubble type micro-machined inertial sensor |
US7093498B2 (en) * | 2003-09-30 | 2006-08-22 | Rockwell Automation Technologies, Inc. | Microelectromechanical strain gauge with frequency detector |
US20050172717A1 (en) * | 2004-02-06 | 2005-08-11 | General Electric Company | Micromechanical device with thinned cantilever structure and related methods |
EP1626283B1 (de) * | 2004-08-13 | 2011-03-23 | STMicroelectronics Srl | Mikroelektromechanische Struktur, insbesondere Beschleunigungssensor, mit verbesserter Unempfindlichkeit gegenüber thermischen und mechanischen Spannungen |
CN100419655C (zh) * | 2005-04-08 | 2008-09-17 | 鸿富锦精密工业(深圳)有限公司 | 触摸式感应装置 |
US20060271199A1 (en) * | 2005-05-20 | 2006-11-30 | Johnson Lanny L | Navigational markers in implants |
CN100370402C (zh) * | 2005-08-05 | 2008-02-20 | 鸿富锦精密工业(深圳)有限公司 | 触摸式感应装置 |
US8004021B2 (en) * | 2006-04-21 | 2011-08-23 | Bioscale, Inc. | Microfabricated devices and method for fabricating microfabricated devices |
US7637160B2 (en) * | 2006-06-30 | 2009-12-29 | Freescale Semiconductor, Inc. | MEMS suspension and anchoring design |
US7999440B2 (en) * | 2006-11-27 | 2011-08-16 | Bioscale, Inc. | Micro-fabricated devices having a suspended membrane or plate structure |
US20080121042A1 (en) * | 2006-11-27 | 2008-05-29 | Bioscale, Inc. | Fluid paths in etchable materials |
EP2279422A1 (de) * | 2008-05-15 | 2011-02-02 | Continental Teves AG & Co. oHG | Mikromechanischer beschleunigungssensor |
EP2189463B1 (de) * | 2008-11-25 | 2012-07-04 | Rohm and Haas Company | Synthese von Arminboranen |
US8186220B2 (en) * | 2009-03-09 | 2012-05-29 | Freescale Semiconductor, Inc. | Accelerometer with over-travel stop structure |
JP5206709B2 (ja) * | 2009-03-18 | 2013-06-12 | 株式会社豊田中央研究所 | 可動体を備えている装置 |
JP4905574B2 (ja) * | 2010-03-25 | 2012-03-28 | 株式会社豊田中央研究所 | 可動部分を備えている積層構造体 |
WO2011136793A1 (en) * | 2010-04-30 | 2011-11-03 | Hewlett-Packard Development Company, L.P. | Error correction in acceleration-sensing devices |
JP5790297B2 (ja) * | 2011-08-17 | 2015-10-07 | セイコーエプソン株式会社 | 物理量センサー及び電子機器 |
CN104271322B (zh) | 2012-03-08 | 2016-09-21 | 品质制造有限公司 | 触敏机器人抓手 |
US9605952B2 (en) | 2012-03-08 | 2017-03-28 | Quality Manufacturing Inc. | Touch sensitive robotic gripper |
US9027403B2 (en) * | 2012-04-04 | 2015-05-12 | Analog Devices, Inc. | Wide G range accelerometer |
KR102126069B1 (ko) * | 2012-06-13 | 2020-06-23 | 퍼듀 리서치 파운데이션 | 마이크로전기기계 시스템 및 이의 사용 방법들 |
US20140260617A1 (en) | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Fully differential capacitive architecture for mems accelerometer |
US20140260618A1 (en) | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Force feedback electrodes in mems accelerometer |
JP6206651B2 (ja) * | 2013-07-17 | 2017-10-04 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
DE102015001128B4 (de) * | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
US10718359B2 (en) | 2015-08-21 | 2020-07-21 | Quality Manufacturing Inc. | Devices and systems for producing rotational actuation |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4584885A (en) * | 1984-01-20 | 1986-04-29 | Harry E. Aine | Capacitive detector for transducers |
FR2560997B1 (fr) * | 1984-03-06 | 1987-06-05 | Sfena | Capteur accelerometrique a structure pendulaire plane |
FR2580389B2 (fr) * | 1985-04-16 | 1989-03-03 | Sfena | Accelerometre micro-usine a rappel electrostatique |
US4896098A (en) * | 1987-01-08 | 1990-01-23 | Massachusetts Institute Of Technology | Turbulent shear force microsensor |
US5189914A (en) * | 1988-02-29 | 1993-03-02 | The Regents Of The University Of California | Plate-mode ultrasonic sensor |
US5083466A (en) * | 1988-07-14 | 1992-01-28 | University Of Hawaii | Multidimensional force sensor |
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US5015850A (en) * | 1989-06-20 | 1991-05-14 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated microscope assembly |
JPH03134552A (ja) * | 1989-10-20 | 1991-06-07 | Hitachi Ltd | 自己較正機能付検出装置 |
EP0459723B1 (de) * | 1990-05-30 | 1996-01-17 | Hitachi, Ltd. | Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen |
JPH0644008B2 (ja) * | 1990-08-17 | 1994-06-08 | アナログ・ディバイセス・インコーポレーテッド | モノリシック加速度計 |
US5331853A (en) * | 1991-02-08 | 1994-07-26 | Alliedsignal Inc. | Micromachined rate and acceleration sensor |
US5181156A (en) * | 1992-05-14 | 1993-01-19 | Motorola Inc. | Micromachined capacitor structure and method for making |
US5337606A (en) * | 1992-08-10 | 1994-08-16 | Motorola, Inc. | Laterally sensitive accelerometer and method for making |
FR2700012B1 (fr) * | 1992-12-28 | 1995-03-03 | Commissariat Energie Atomique | Accéléromètre intégré à axe sensible parallèle au substrat. |
US5447068A (en) * | 1994-03-31 | 1995-09-05 | Ford Motor Company | Digital capacitive accelerometer |
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
US5880369A (en) * | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
US5880921A (en) * | 1997-04-28 | 1999-03-09 | Rockwell Science Center, Llc | Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
-
1994
- 1994-12-01 US US08/347,795 patent/US5565625A/en not_active Ceased
-
1995
- 1995-11-29 WO PCT/US1995/015284 patent/WO1996017232A1/en active IP Right Grant
- 1995-11-29 EP EP95944038A patent/EP0795122B1/de not_active Expired - Lifetime
- 1995-11-29 DE DE69519941T patent/DE69519941T2/de not_active Expired - Lifetime
-
1998
- 1998-10-14 US US09/172,541 patent/USRE36498E/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69519941T2 (de) | 2001-04-26 |
USRE36498E (en) | 2000-01-18 |
US5565625A (en) | 1996-10-15 |
EP0795122B1 (de) | 2001-01-17 |
WO1996017232A1 (en) | 1996-06-06 |
EP0795122A1 (de) | 1997-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |