DE69516772D1 - Verbundene Gegenstände und Verfahren zur Herstellung derselben - Google Patents

Verbundene Gegenstände und Verfahren zur Herstellung derselben

Info

Publication number
DE69516772D1
DE69516772D1 DE69516772T DE69516772T DE69516772D1 DE 69516772 D1 DE69516772 D1 DE 69516772D1 DE 69516772 T DE69516772 T DE 69516772T DE 69516772 T DE69516772 T DE 69516772T DE 69516772 D1 DE69516772 D1 DE 69516772D1
Authority
DE
Germany
Prior art keywords
making
methods
same
associated items
items
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69516772T
Other languages
English (en)
Other versions
DE69516772T2 (de
Inventor
Hiromichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69516772D1 publication Critical patent/DE69516772D1/de
Application granted granted Critical
Publication of DE69516772T2 publication Critical patent/DE69516772T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/963—Surface properties, e.g. surface roughness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/06—Oxidic interlayers
    • C04B2237/066—Oxidic interlayers based on rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/78—Side-way connecting, e.g. connecting two plates through their sides
DE69516772T 1994-09-01 1995-07-06 Verbundene Gegenstände und Verfahren zur Herstellung derselben Expired - Lifetime DE69516772T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6230213A JP2783980B2 (ja) 1994-09-01 1994-09-01 接合体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69516772D1 true DE69516772D1 (de) 2000-06-15
DE69516772T2 DE69516772T2 (de) 2001-04-05

Family

ID=16904343

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69516772T Expired - Lifetime DE69516772T2 (de) 1994-09-01 1995-07-06 Verbundene Gegenstände und Verfahren zur Herstellung derselben

Country Status (5)

Country Link
US (2) US5721062A (de)
EP (1) EP0699643B1 (de)
JP (1) JP2783980B2 (de)
KR (1) KR0148432B1 (de)
DE (1) DE69516772T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2783980B2 (ja) * 1994-09-01 1998-08-06 日本碍子株式会社 接合体およびその製造方法
JP3891908B2 (ja) * 1995-07-19 2007-03-14 株式会社トクヤマ 窒化アルミニウム接合構造体の製造方法
JP3891621B2 (ja) * 1996-12-19 2007-03-14 株式会社トクヤマ 窒化アルミニウム部材
JP3604888B2 (ja) * 1997-01-30 2004-12-22 日本碍子株式会社 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤
US6494955B1 (en) 2000-02-15 2002-12-17 Applied Materials, Inc. Ceramic substrate support
JP2001244902A (ja) * 2000-02-29 2001-09-07 Sony Corp 送信装置および方法、受信装置および方法、並びに記録媒体
US6997993B2 (en) 2001-02-09 2006-02-14 Ngk Insulators, Ltd. Susceptor supporting construction
KR20030007929A (ko) * 2001-04-12 2003-01-23 이비덴 가부시키가이샤 세라믹 접합체 및 그 제조방법, 반도체 웨이퍼용 세라믹구조체
US20040175549A1 (en) * 2001-07-19 2004-09-09 Ibiden Co., Ltd. Ceramic connection body, method of connecting the ceramic bodies, and ceramic structural body
US6921881B2 (en) 2001-08-10 2005-07-26 Ibiden Co., Ltd. Ceramic joint body
US20050156322A1 (en) * 2001-08-31 2005-07-21 Smith Lee J. Thin semiconductor package including stacked dies
US6730175B2 (en) 2002-01-22 2004-05-04 Applied Materials, Inc. Ceramic substrate support
JP2004253665A (ja) * 2003-02-21 2004-09-09 Sumitomo Electric Ind Ltd 半導体製造装置用ウェハ保持体およびそれを搭載した半導体製造装置
EP1642876A4 (de) 2003-06-13 2011-01-05 Tokuyama Corp Aluminiumnitrid-konjugatkörper und herstellungsverfahren dafür
JP4787568B2 (ja) 2004-11-16 2011-10-05 日本碍子株式会社 接合剤、窒化アルミニウム接合体及びその製造方法
TW200633947A (en) 2005-02-16 2006-10-01 Ngk Insulators Ltd Joined body and manufacturing method for the same
TWI308908B (en) * 2005-12-27 2009-04-21 Ngk Insulators Ltd Aluminum nitride composite body, and manufacturing method of the same
WO2007114208A1 (ja) 2006-03-29 2007-10-11 Tokuyama Corporation 窒化アルミニウム焼結体の接合方法および窒化アルミニウム接合体
US20090277388A1 (en) * 2008-05-09 2009-11-12 Applied Materials, Inc. Heater with detachable shaft
DE102008036836A1 (de) * 2008-08-07 2010-02-11 Epcos Ag Formkörper, Heizungsvorrichtung und Verfahren zur Herstellung eines Formkörpers
DE102008036835A1 (de) * 2008-08-07 2010-02-18 Epcos Ag Heizungsvorrichtung und Verfahren zur Herstellung der Heizungsvorrichtung
US8580593B2 (en) * 2009-09-10 2013-11-12 Micron Technology, Inc. Epitaxial formation structures and associated methods of manufacturing solid state lighting devices
WO2012056807A1 (ja) 2010-10-25 2012-05-03 日本碍子株式会社 セラミックス材料、積層体、半導体製造装置用部材及びスパッタリングターゲット部材
WO2012056808A1 (ja) 2010-10-25 2012-05-03 日本碍子株式会社 セラミックス材料、半導体製造装置用部材、スパッタリングターゲット部材及びセラミックス材料の製造方法
JP6078450B2 (ja) 2012-10-26 2017-02-08 日本碍子株式会社 半導体製造装置用部材及びその製法
KR102276101B1 (ko) 2013-12-27 2021-07-13 엔지케이 인슐레이터 엘티디 접합재 조성물, 질화알루미늄 접합체 및 그 제법
JP6370062B2 (ja) * 2014-02-28 2018-08-08 日本特殊陶業株式会社 窒化アルミニウム接合体およびその製造方法
JP6878677B2 (ja) 2018-07-13 2021-06-02 日本碍子株式会社 セラミックヒータ
JP6959201B2 (ja) 2018-08-29 2021-11-02 日本碍子株式会社 セラミックヒータ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920370B1 (de) * 1970-12-28 1974-05-24
JPS6026076B2 (ja) * 1979-05-31 1985-06-21 日本碍子株式会社 セラミツクス物品の接合方法
US4960736A (en) * 1986-09-16 1990-10-02 Lanxide Technology Company, Lp Surface bonding of ceramic bodies
US5240171A (en) * 1987-05-21 1993-08-31 Lanxide Technology Company, Lp Method for surface bonding of ceramic bodies
JP2823626B2 (ja) * 1990-01-19 1998-11-11 信越化学工業株式会社 Ｍｎ―Ｚｎフェライト接合体の製造方法
EP1120817B8 (de) * 1991-03-26 2007-10-10 Ngk Insulators, Ltd. Verwendung eines korrosion beständigen Substratshalters
JP2677921B2 (ja) * 1991-03-26 1997-11-17 日本碍子株式会社 半導体設置用装置
JP2783980B2 (ja) * 1994-09-01 1998-08-06 日本碍子株式会社 接合体およびその製造方法

Also Published As

Publication number Publication date
US6071465A (en) 2000-06-06
EP0699643B1 (de) 2000-05-10
EP0699643A2 (de) 1996-03-06
KR0148432B1 (ko) 1998-11-16
US5721062A (en) 1998-02-24
EP0699643A3 (de) 1996-09-25
JP2783980B2 (ja) 1998-08-06
KR960010589A (ko) 1996-04-20
JPH0873280A (ja) 1996-03-19
DE69516772T2 (de) 2001-04-05

Similar Documents

Publication Publication Date Title
DE69516772D1 (de) Verbundene Gegenstände und Verfahren zur Herstellung derselben
DE69426225D1 (de) Schleifartikel und Verfahren zur Herstellung derselben
DE69528111T2 (de) Biosensor und Verfahren zur Herstellung desselben
DE69506950D1 (de) Graphitschaummaterialien und Verfahren zur Herstellung derselben
DE69527054T2 (de) Retroreflektierender gegenstand und verfahren zur herstellung
DE69413860T2 (de) Transistoren und Verfahren zur Herstellung
DE69528625D1 (de) Mehrschichtige Formteile und Verfahren zur Herstellung derselben
DE69530954D1 (de) Mikromechanisches Bauelement und Verfahren zur Herstellung desselben
DE69529966D1 (de) Tintenzusammensetzung und Verfahren zur Herstellung derselben
DE69208454T2 (de) Türmatte und Verfahren zur Herstellung derselben
DE59401845D1 (de) Rotor und Verfahren zur Herstellung desselben
DE19681517T1 (de) Dekorationsfolie und Verfahren zur Herstellung derselben
DE69614804T2 (de) Verbundwerkstoff und Verfahren zur Herstellung desselben
DE59502030D1 (de) Schlaucheinheit und Verfahren zur Herstellung derselben
DE69324511D1 (de) Mehrschichtig geformter Gegenstand und Verfahren zur dessen Herstellung
DE69506776T2 (de) Vakuumschalter und Verfahren zur Herstellung desselben
DE19580280T1 (de) Schleifmaterialbogen und Verfahren zur Herstellung desselben
DE69507874T2 (de) Bildschirm und Verfahren zur Herstellung desselben
DE69112277D1 (de) Mehrfarbiges Produkt und Verfahren zur Herstellung desselben.
DE69510170T2 (de) Bildschirm und Verfahren zur Herstellung desselben
DE59606485D1 (de) Verfahren zur Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden
DE59606489D1 (de) Verfahren zur Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden
DE69612764T2 (de) Oberfläche konditionierungsgegenständen und verfahren zur herstellung
DE59606657D1 (de) Verfahren zur Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden
DE59606488D1 (de) Verfahren zur Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden

Legal Events

Date Code Title Description
8364 No opposition during term of opposition