DE69513994T2 - Verfahren zur herstellung eines minidimensionierten massenspektrometers - Google Patents

Verfahren zur herstellung eines minidimensionierten massenspektrometers

Info

Publication number
DE69513994T2
DE69513994T2 DE69513994T DE69513994T DE69513994T2 DE 69513994 T2 DE69513994 T2 DE 69513994T2 DE 69513994 T DE69513994 T DE 69513994T DE 69513994 T DE69513994 T DE 69513994T DE 69513994 T2 DE69513994 T2 DE 69513994T2
Authority
DE
Germany
Prior art keywords
minidimensioned
producing
mass spectrometer
spectrometer
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69513994T
Other languages
English (en)
Other versions
DE69513994D1 (de
Inventor
Joseph Kotvas
Timothy Braggins
Robert Young
Carl Freidhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
Northrop Grumman Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of DE69513994D1 publication Critical patent/DE69513994D1/de
Application granted granted Critical
Publication of DE69513994T2 publication Critical patent/DE69513994T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, MicroElectro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
DE69513994T 1994-10-07 1995-09-21 Verfahren zur herstellung eines minidimensionierten massenspektrometers Expired - Lifetime DE69513994T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/320,619 US5492867A (en) 1993-09-22 1994-10-07 Method for manufacturing a miniaturized solid state mass spectrograph
PCT/US1995/011919 WO1996011493A1 (en) 1994-10-07 1995-09-21 Method for manufacturing a miniaturized mass spectrograph

Publications (2)

Publication Number Publication Date
DE69513994D1 DE69513994D1 (de) 2000-01-20
DE69513994T2 true DE69513994T2 (de) 2000-07-13

Family

ID=23247210

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513994T Expired - Lifetime DE69513994T2 (de) 1994-10-07 1995-09-21 Verfahren zur herstellung eines minidimensionierten massenspektrometers

Country Status (6)

Country Link
US (1) US5492867A (de)
EP (1) EP0784862B1 (de)
JP (1) JP3713558B2 (de)
CA (1) CA2202059C (de)
DE (1) DE69513994T2 (de)
WO (1) WO1996011493A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU7805498A (en) * 1997-06-03 1998-12-21 California Institute Of Technology Miniature micromachined quadrupole mass spectrometer array and method of making the same
US6815669B1 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Longitudinal field driven ion mobility filter and detection system
US6806463B2 (en) * 1999-07-21 2004-10-19 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6690004B2 (en) * 1999-07-21 2004-02-10 The Charles Stark Draper Laboratory, Inc. Method and apparatus for electrospray-augmented high field asymmetric ion mobility spectrometry
US6495823B1 (en) 1999-07-21 2002-12-17 The Charles Stark Draper Laboratory, Inc. Micromachined field asymmetric ion mobility filter and detection system
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US7005632B2 (en) * 2002-04-12 2006-02-28 Sionex Corporation Method and apparatus for control of mobility-based ion species identification
US7098449B1 (en) 1999-07-21 2006-08-29 The Charles Stark Draper Laboratory, Inc. Spectrometer chip assembly
US6590207B2 (en) * 2000-05-08 2003-07-08 Mass Sensors, Inc. Microscale mass spectrometric chemical-gas sensor
ATE553372T1 (de) * 2001-06-30 2012-04-15 Dh Technologies Dev Pte Ltd System zum sammeln von daten und zur identifizierung unbekannter substanzen in einem elektrischen feld
US7091481B2 (en) * 2001-08-08 2006-08-15 Sionex Corporation Method and apparatus for plasma generation
US7274015B2 (en) * 2001-08-08 2007-09-25 Sionex Corporation Capacitive discharge plasma ion source
GB2384908B (en) * 2002-02-05 2005-05-04 Microsaic Systems Ltd Mass spectrometry
US7122794B1 (en) 2002-02-21 2006-10-17 Sionex Corporation Systems and methods for ion mobility control
EP1627223A1 (de) * 2003-04-01 2006-02-22 The Charles Stark Draper Laboratory, INC. Nichtinvasive atemanalyse mittels ionenmobilitätsspektrometrie mit feldasymmetrie
US7470898B2 (en) * 2003-04-01 2008-12-30 The Charles Stark Draper Laboratory, Inc. Monitoring drinking water quality using differential mobility spectrometry
CA2551991A1 (en) * 2004-01-13 2005-07-28 Sionex Corporation Methods and apparatus for enhanced sample identification based on combined analytical techniques
US7057170B2 (en) 2004-03-12 2006-06-06 Northrop Grumman Corporation Compact ion gauge using micromachining and MISOC devices
US7399959B2 (en) * 2004-12-03 2008-07-15 Sionex Corporation Method and apparatus for enhanced ion based sample filtering and detection
EP1913379A2 (de) 2005-07-26 2008-04-23 Sionex Corporation Auf ionenmobilität basierender ultrakompakter analysator, verfahren und system
US7402799B2 (en) * 2005-10-28 2008-07-22 Northrop Grumman Corporation MEMS mass spectrometer
EP1865533B1 (de) * 2006-06-08 2014-09-17 Microsaic Systems PLC Mikromechanische Vakuumschnittstelle für ein Ionisierungssystem
GB2438892A (en) * 2006-06-08 2007-12-12 Microsaic Systems Ltd Microengineered vacuum interface for an electrospray ionization system
WO2008094704A2 (en) 2007-02-01 2008-08-07 Sionex Corporation Differential mobility spectrometer pre-filter assembly for a mass spectrometer
EP1959476A1 (de) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
US7649171B1 (en) * 2007-05-21 2010-01-19 Northrop Grumman Corporation Miniature mass spectrometer for the analysis of biological small molecules
GB2483314B (en) 2010-12-07 2013-03-06 Microsaic Systems Plc Miniature mass spectrometer system
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
US10319572B2 (en) 2017-09-28 2019-06-11 Northrop Grumman Systems Corporation Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC voltages
US20200152437A1 (en) 2018-11-14 2020-05-14 Northrop Grumman Systems Corporation Tapered magnetic ion transport tunnel for particle collection
US10755827B1 (en) 2019-05-17 2020-08-25 Northrop Grumman Systems Corporation Radiation shield

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967589A (en) * 1987-12-23 1990-11-06 Ricoh Company, Ltd. Gas detecting device
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
US5209119A (en) * 1990-12-12 1993-05-11 Regents Of The University Of Minnesota Microdevice for sensing a force
US5270574A (en) * 1991-08-01 1993-12-14 Texas Instruments Incorporated Vacuum micro-chamber for encapsulating a microelectronics device
US5141460A (en) * 1991-08-20 1992-08-25 Jaskie James E Method of making a field emission electron source employing a diamond coating
GB2262649B (en) * 1991-12-13 1995-03-01 Marconi Gec Ltd Energy analyser
US5427975A (en) * 1993-05-10 1995-06-27 Delco Electronics Corporation Method of micromachining an integrated sensor on the surface of a silicon wafer
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer

Also Published As

Publication number Publication date
DE69513994D1 (de) 2000-01-20
US5492867A (en) 1996-02-20
CA2202059C (en) 2005-08-09
EP0784862A1 (de) 1997-07-23
WO1996011493A1 (en) 1996-04-18
JPH10512997A (ja) 1998-12-08
EP0784862B1 (de) 1999-12-15
JP3713558B2 (ja) 2005-11-09
CA2202059A1 (en) 1996-04-18

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Legal Events

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN

R082 Change of representative

Ref document number: 784862

Country of ref document: EP

Representative=s name: NEUGEBAUER, JUERGEN, DIPL.-PHYS.UNIV. M.A./SUN, DE