DE69511804T2 - Vakuum-Pumpvorrichtung - Google Patents

Vakuum-Pumpvorrichtung

Info

Publication number
DE69511804T2
DE69511804T2 DE69511804T DE69511804T DE69511804T2 DE 69511804 T2 DE69511804 T2 DE 69511804T2 DE 69511804 T DE69511804 T DE 69511804T DE 69511804 T DE69511804 T DE 69511804T DE 69511804 T2 DE69511804 T2 DE 69511804T2
Authority
DE
Germany
Prior art keywords
motor
vacuum pumping
bearings
prone
reaction products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69511804T
Other languages
English (en)
Other versions
DE69511804D1 (de
Inventor
Yutaka Hirakawa
Shun-Ichi Aiyoshizawa
Toshiharu Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69511804D1 publication Critical patent/DE69511804D1/de
Application granted granted Critical
Publication of DE69511804T2 publication Critical patent/DE69511804T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/005—Cooling of bearings of magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE69511804T 1994-07-28 1995-06-07 Vakuum-Pumpvorrichtung Expired - Fee Related DE69511804T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19587494 1994-07-28

Publications (2)

Publication Number Publication Date
DE69511804D1 DE69511804D1 (de) 1999-10-07
DE69511804T2 true DE69511804T2 (de) 2000-04-06

Family

ID=16348429

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69511804T Expired - Fee Related DE69511804T2 (de) 1994-07-28 1995-06-07 Vakuum-Pumpvorrichtung

Country Status (4)

Country Link
US (1) US5618167A (de)
EP (1) EP0694699B1 (de)
KR (1) KR100347274B1 (de)
DE (1) DE69511804T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
US6093001A (en) * 1997-05-02 2000-07-25 University Of Pittsburgh Rotary pump having a bearing which dissipates heat
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
JP3735749B2 (ja) * 1997-07-22 2006-01-18 光洋精工株式会社 ターボ分子ポンプ
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
JP3084622B2 (ja) * 1997-08-13 2000-09-04 セイコー精機株式会社 ターボ分子ポンプ
DE19804768B4 (de) * 1998-02-06 2006-08-24 Pfeiffer Vacuum Gmbh Rotorlagerung für eine Gasreibungspumpe
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
CN1281901C (zh) * 2001-02-13 2006-10-25 埃德蒙兹有限公司 转子通风机
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
DE10142567A1 (de) 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2003254285A (ja) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd ポンプ装置
JP2003269369A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
JP2007323784A (ja) * 2006-06-05 2007-12-13 Hitachi Ltd ディスク装置
US20110200460A1 (en) * 2008-08-19 2011-08-18 Manabu Nonaka Vacuum pump
DE102011075097A1 (de) * 2011-05-02 2012-11-08 Krones Aktiengesellschaft Vorrichtung zum Bewegen eines Fluids
US9097135B2 (en) * 2011-10-06 2015-08-04 Aktiebolaget Skf Power harvesting bearing configuration
US9343646B2 (en) * 2011-10-06 2016-05-17 Aktiebolaget Skf Thermo-electric power harvesting bearing configuration
JP6069981B2 (ja) * 2012-09-10 2017-02-01 株式会社島津製作所 ターボ分子ポンプ
DE102013100853A1 (de) * 2013-01-29 2014-07-31 Pfeiffer Vacuum Gmbh Verfahren zum Beschichten und/oder Lackieren von Magnetringen eines Rotor-Magnetlagers, Rotor-Magnetlager sowie Vakuumpumpe
GB2534047B (en) * 2013-09-05 2017-05-03 Baker Hughes Inc Thermoelectric cooling devices on electrical submersible pump
JP6289148B2 (ja) * 2014-02-14 2018-03-07 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる断熱スペーサ
JP6353257B2 (ja) * 2014-03-31 2018-07-04 エドワーズ株式会社 排気口部品、および真空ポンプ
JP6666696B2 (ja) * 2015-11-16 2020-03-18 エドワーズ株式会社 真空ポンプ
CN105317839A (zh) 2015-12-14 2016-02-10 珠海格力节能环保制冷技术研究中心有限公司 磁悬浮轴承定子组件及制作方法
EP3657022B1 (de) 2018-11-22 2022-09-07 Pfeiffer Vacuum Gmbh Vakuumpumpe mit einem peltierelement
GB2586019A (en) * 2019-07-29 2021-02-03 Edwards Ltd Molecular vacuum pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3761197A (en) * 1972-02-18 1973-09-25 D Kelly Variable speed vapor turbine
DE2757599A1 (de) * 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
SU881372A1 (ru) * 1980-04-11 1981-11-15 Предприятие П/Я А-3634 Турбомолекул рный вакуумный насос
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
JPS58131430A (ja) * 1982-01-30 1983-08-05 Mitsubishi Heavy Ind Ltd 静圧軸受の冷却装置
JPS63140121A (ja) * 1986-11-29 1988-06-11 Yaskawa Electric Mfg Co Ltd 流体軸受用冷却装置
US4744220A (en) * 1987-01-29 1988-05-17 James M. Kerner Thermoelectric heating and/or cooling system using liquid for heat exchange
JPS6489933A (en) * 1987-09-29 1989-04-05 Seiko Epson Corp Superconducting motor
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
DE4123282A1 (de) * 1991-07-13 1993-01-14 Irbit Research & Consulting Ag Dichtelement
US5180293A (en) * 1992-03-20 1993-01-19 Hewlett-Packard Company Thermoelectrically cooled pumping system
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
JP3616639B2 (ja) * 1992-06-19 2005-02-02 ウナクシス ドイチュラント ホールディング ゲゼルシャフト ミット ベシュレンクテル ハフツング 気体摩擦真空ポンプ
JPH0678505A (ja) * 1992-08-25 1994-03-18 Seiko Instr Inc 超小型モータ
US5423479A (en) * 1993-03-29 1995-06-13 Galen E. Nichols Thermoelectric actuator for temperature control systems
US5315830B1 (en) * 1993-04-14 1998-04-07 Marlow Ind Inc Modular thermoelectric assembly
US5465581A (en) * 1993-08-24 1995-11-14 Hewlett-Packard Analytical system having energy efficient pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe

Also Published As

Publication number Publication date
EP0694699B1 (de) 1999-09-01
DE69511804D1 (de) 1999-10-07
US5618167A (en) 1997-04-08
EP0694699A1 (de) 1996-01-31
KR100347274B1 (ko) 2002-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee