DE69511207T2 - Festkörperkondensator und mikrofonvorrichtungen - Google Patents

Festkörperkondensator und mikrofonvorrichtungen

Info

Publication number
DE69511207T2
DE69511207T2 DE69511207T DE69511207T DE69511207T2 DE 69511207 T2 DE69511207 T2 DE 69511207T2 DE 69511207 T DE69511207 T DE 69511207T DE 69511207 T DE69511207 T DE 69511207T DE 69511207 T2 DE69511207 T2 DE 69511207T2
Authority
DE
Germany
Prior art keywords
microphone devices
solid condenser
condenser
solid
microphone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69511207T
Other languages
English (en)
Other versions
DE69511207D1 (de
Inventor
Peter Loeppert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Knowles Electronics LLC
Original Assignee
Knowles Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Knowles Electronics LLC filed Critical Knowles Electronics LLC
Publication of DE69511207D1 publication Critical patent/DE69511207D1/de
Application granted granted Critical
Publication of DE69511207T2 publication Critical patent/DE69511207T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers
DE69511207T 1994-05-05 1995-05-05 Festkörperkondensator und mikrofonvorrichtungen Expired - Fee Related DE69511207T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/238,965 US5490220A (en) 1992-03-18 1994-05-05 Solid state condenser and microphone devices
PCT/US1995/005642 WO1995031082A1 (en) 1994-05-05 1995-05-05 Solid state condenser and microphone devices

Publications (2)

Publication Number Publication Date
DE69511207D1 DE69511207D1 (de) 1999-09-09
DE69511207T2 true DE69511207T2 (de) 2000-02-03

Family

ID=22900067

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69511207T Expired - Fee Related DE69511207T2 (de) 1994-05-05 1995-05-05 Festkörperkondensator und mikrofonvorrichtungen

Country Status (6)

Country Link
US (1) US5490220A (de)
EP (1) EP0707781B1 (de)
AU (1) AU2472595A (de)
DE (1) DE69511207T2 (de)
DK (1) DK0707781T3 (de)
WO (1) WO1995031082A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10052196B4 (de) * 2000-02-15 2005-07-14 Mitsubishi Denki K.K. Mikrofoneinheit

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WO1995031082A1 (en) 1995-11-16
DK0707781T3 (da) 2000-01-31
AU2472595A (en) 1995-11-29
EP0707781A1 (de) 1996-04-24
DE69511207D1 (de) 1999-09-09
US5490220A (en) 1996-02-06
EP0707781B1 (de) 1999-08-04

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