DE69510902T2 - Eingebettete Phasenverschiebungsmasken sowie Verfahren zu dessen Herstellung - Google Patents

Eingebettete Phasenverschiebungsmasken sowie Verfahren zu dessen Herstellung

Info

Publication number
DE69510902T2
DE69510902T2 DE69510902T DE69510902T DE69510902T2 DE 69510902 T2 DE69510902 T2 DE 69510902T2 DE 69510902 T DE69510902 T DE 69510902T DE 69510902 T DE69510902 T DE 69510902T DE 69510902 T2 DE69510902 T2 DE 69510902T2
Authority
DE
Germany
Prior art keywords
mask blank
present
areas
phase
smooth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69510902T
Other languages
English (en)
Other versions
DE69510902D1 (de
Inventor
Wilhelm Maurer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qimonda AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of DE69510902D1 publication Critical patent/DE69510902D1/de
Application granted granted Critical
Publication of DE69510902T2 publication Critical patent/DE69510902T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Networks Using Active Elements (AREA)
DE69510902T 1994-12-20 1995-10-20 Eingebettete Phasenverschiebungsmasken sowie Verfahren zu dessen Herstellung Expired - Lifetime DE69510902T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/359,790 US5679483A (en) 1994-12-20 1994-12-20 Embedded phase shifting photomasks and method for manufacturing same

Publications (2)

Publication Number Publication Date
DE69510902D1 DE69510902D1 (de) 1999-08-26
DE69510902T2 true DE69510902T2 (de) 2000-02-17

Family

ID=23415285

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69510902T Expired - Lifetime DE69510902T2 (de) 1994-12-20 1995-10-20 Eingebettete Phasenverschiebungsmasken sowie Verfahren zu dessen Herstellung

Country Status (7)

Country Link
US (1) US5679483A (de)
EP (1) EP0718691B1 (de)
JP (1) JP3205241B2 (de)
KR (1) KR100374207B1 (de)
AT (1) ATE182411T1 (de)
DE (1) DE69510902T2 (de)
TW (1) TW295678B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5897976A (en) * 1996-05-20 1999-04-27 E. I. Du Pont De Nemours And Company Attenuating embedded phase shift photomask blanks
US6555484B1 (en) * 1997-06-19 2003-04-29 Cypress Semiconductor Corp. Method for controlling the oxidation of implanted silicon
TW371327B (en) * 1998-05-01 1999-10-01 United Microelectronics Corp Phase-shifting mask (PSM) and method for making the same
JP2000206675A (ja) * 1999-01-12 2000-07-28 Nikon Corp 転写マスク用ブランクスおよび転写マスク
US20030157415A1 (en) * 2000-02-16 2003-08-21 Ziger David H. Apparatus and method for compensating critical dimension deviations across photomask
US6566016B1 (en) * 2000-06-28 2003-05-20 Koninklijke Philips Electronics N.V. Apparatus and method for compensating critical dimension deviations across photomask
DE10131534B4 (de) * 2001-06-29 2007-07-19 Infineon Technologies Ag Verfahren zum Herstellen einer Maske zum Belichten
KR100393230B1 (ko) * 2001-08-16 2003-07-31 삼성전자주식회사 잔막율을 조절할 수 있는 포토레지스트 패턴의 형성방법
US6841311B1 (en) * 2002-03-15 2005-01-11 Taiwan Semiconductor Manufacturing Company Cleaning process for phase shift masks
US20040241554A1 (en) * 2003-05-29 2004-12-02 Lsi Logic Corporation, Milpitas, Ca Ion implantation phase shift mask
US7276316B2 (en) * 2004-02-02 2007-10-02 International Business Machines Corporation Common second level frame exposure methods for making embedded attenuated phase shift masks
CN114859651A (zh) * 2022-07-05 2022-08-05 上海传芯半导体有限公司 反射型掩模基板及制备方法、反射型掩模版及制备方法
CN115755517B (zh) * 2022-11-18 2024-04-26 上海积塔半导体有限公司 掩模装置及其制造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE31220E (en) * 1977-11-30 1983-04-26 Ppg Industries, Inc. Electromigration method for making stained glass photomasks
AT382040B (de) * 1983-03-01 1986-12-29 Guenther Stangl Verfahren zur herstellung von optisch strukturierten filtern fuer elektromagnetische strahlung und optisch strukturierter filter
CA1313792C (en) * 1986-02-28 1993-02-23 Junji Hirokane Method of manufacturing photo-mask and photo-mask manufactured thereby
US4902899A (en) * 1987-06-01 1990-02-20 International Business Machines Corporation Lithographic process having improved image quality
US5260150A (en) * 1987-09-30 1993-11-09 Sharp Kabushiki Kaisha Photo-mask with light shielding film buried in substrate
DE69029503T2 (de) * 1989-10-13 1997-05-22 Toshiba Kawasaki Kk Aperturenmuster-Flachdruckplatte zur Herstellung einer Schattenmaske und Verfahren zur Herstellung dieser Maske
US5217830A (en) * 1991-03-26 1993-06-08 Micron Technology, Inc. Method of fabricating phase shifting reticles using ion implantation
US5208125A (en) * 1991-07-30 1993-05-04 Micron Technology, Inc. Phase shifting reticle fabrication using ion implantation
US5300379A (en) * 1992-08-21 1994-04-05 Intel Corporation Method of fabrication of inverted phase-shifted reticle

Also Published As

Publication number Publication date
KR100374207B1 (ko) 2004-05-10
EP0718691A2 (de) 1996-06-26
EP0718691B1 (de) 1999-07-21
DE69510902D1 (de) 1999-08-26
TW295678B (de) 1997-01-11
JP3205241B2 (ja) 2001-09-04
ATE182411T1 (de) 1999-08-15
JPH08240902A (ja) 1996-09-17
US5679483A (en) 1997-10-21
EP0718691A3 (de) 1996-10-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: QIMONDA AG, 81739 MUENCHEN, DE