DE69505087D1 - Mikrowellenplasmabrenner und Verfahren zur dessen Erzeugung - Google Patents
Mikrowellenplasmabrenner und Verfahren zur dessen ErzeugungInfo
- Publication number
- DE69505087D1 DE69505087D1 DE69505087T DE69505087T DE69505087D1 DE 69505087 D1 DE69505087 D1 DE 69505087D1 DE 69505087 T DE69505087 T DE 69505087T DE 69505087 T DE69505087 T DE 69505087T DE 69505087 D1 DE69505087 D1 DE 69505087D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- plasma torch
- microwave plasma
- microwave
- torch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32229—Waveguides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3468—Vortex generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3478—Geometrical details
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Geometry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26233294 | 1994-10-26 | ||
JP26532194 | 1994-10-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69505087D1 true DE69505087D1 (de) | 1998-11-05 |
DE69505087T2 DE69505087T2 (de) | 1999-03-11 |
Family
ID=26545505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69505087T Expired - Fee Related DE69505087T2 (de) | 1994-10-26 | 1995-10-24 | Mikrowellenplasmabrenner und Verfahren zur dessen Erzeugung |
Country Status (7)
Country | Link |
---|---|
US (1) | US5734143A (de) |
EP (1) | EP0710054B1 (de) |
KR (1) | KR100189311B1 (de) |
CN (1) | CN1057422C (de) |
DE (1) | DE69505087T2 (de) |
MY (1) | MY138630A (de) |
TW (1) | TW285746B (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69733660T2 (de) * | 1996-11-04 | 2006-05-18 | Materials Modification, Inc. | Mikrowellenplasma chemischen synthese von ultrafeinen pulvern |
DE19713352A1 (de) * | 1997-03-29 | 1998-10-01 | Deutsch Zentr Luft & Raumfahrt | Plasmabrennersystem |
WO1999049705A1 (fr) * | 1998-03-20 | 1999-09-30 | Tokyo Electron Limited | Dispositif de traitement plasmique |
DE19814812C2 (de) * | 1998-04-02 | 2000-05-11 | Mut Mikrowellen Umwelt Technol | Plasmabrenner mit einem Mikrowellensender |
DE19847848C1 (de) * | 1998-10-16 | 2000-05-11 | R3 T Gmbh Rapid Reactive Radic | Vorrichtung und Erzeugung angeregter/ionisierter Teilchen in einem Plasma |
US6230651B1 (en) * | 1998-12-30 | 2001-05-15 | Lam Research Corporation | Gas injection system for plasma processing |
KR19990068381A (ko) * | 1999-05-11 | 1999-09-06 | 허방욱 | 마이크로웨이브플라즈마버너 |
US7091605B2 (en) * | 2001-09-21 | 2006-08-15 | Eastman Kodak Company | Highly moisture-sensitive electronic device element and method for fabrication |
DE19925790A1 (de) * | 1999-06-05 | 2000-12-07 | Inst Oberflaechenmodifizierung | Verfahren und Vorrichtung zur Bearbeitung von optischen und anderen Oberflächen mittels Hochrate-Plasmaprozessen |
US6215092B1 (en) | 1999-06-08 | 2001-04-10 | Alcatel | Plasma overcladding process and apparatus having multiple plasma torches |
SE521904C2 (sv) * | 1999-11-26 | 2003-12-16 | Ladislav Bardos | Anordning för hybridplasmabehandling |
US6225745B1 (en) | 1999-12-17 | 2001-05-01 | Axcelis Technologies, Inc. | Dual plasma source for plasma process chamber |
AUPQ861500A0 (en) * | 2000-07-06 | 2000-08-03 | Varian Australia Pty Ltd | Plasma source for spectrometry |
US20020122896A1 (en) * | 2001-03-02 | 2002-09-05 | Skion Corporation | Capillary discharge plasma apparatus and method for surface treatment using the same |
US20030070620A1 (en) * | 2001-10-15 | 2003-04-17 | Cooperberg David J. | Tunable multi-zone gas injection system |
US6761776B2 (en) | 2001-12-06 | 2004-07-13 | Paul B. Bowlin | Torch cutter exhaust system |
JP2004074254A (ja) * | 2002-08-21 | 2004-03-11 | Komatsu Sanki Kk | プラズマアークまたはレーザによる切断加工機、およびその切断方法 |
US6963044B2 (en) * | 2003-10-08 | 2005-11-08 | General Electric Compnay | Coating apparatus and processes for forming low oxide coatings |
WO2005098083A2 (en) * | 2004-04-07 | 2005-10-20 | Michigan State University | Miniature microwave plasma torch application and method of use thereof |
US7164095B2 (en) * | 2004-07-07 | 2007-01-16 | Noritsu Koki Co., Ltd. | Microwave plasma nozzle with enhanced plume stability and heating efficiency |
US7189939B2 (en) * | 2004-09-01 | 2007-03-13 | Noritsu Koki Co., Ltd. | Portable microwave plasma discharge unit |
WO2007013875A2 (en) * | 2004-09-01 | 2007-02-01 | Amarante Technologies, Inc. | A portable microwave plasma discharge unit |
US7271363B2 (en) * | 2004-09-01 | 2007-09-18 | Noritsu Koki Co., Ltd. | Portable microwave plasma systems including a supply line for gas and microwaves |
GB2442990A (en) * | 2004-10-04 | 2008-04-23 | C Tech Innovation Ltd | Microwave plasma apparatus |
KR100689037B1 (ko) * | 2005-08-24 | 2007-03-08 | 삼성전자주식회사 | 마이크로파 공명 플라즈마 발생장치 및 그것을 구비하는플라즈마 처리 시스템 |
JP4822813B2 (ja) * | 2005-11-07 | 2011-11-24 | コマツ産機株式会社 | 熱切断加工機 |
JP4852997B2 (ja) * | 2005-11-25 | 2012-01-11 | 東京エレクトロン株式会社 | マイクロ波導入装置及びプラズマ処理装置 |
US7679024B2 (en) * | 2005-12-23 | 2010-03-16 | Lam Research Corporation | Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber |
US7562638B2 (en) * | 2005-12-23 | 2009-07-21 | Lam Research Corporation | Methods and arrangement for implementing highly efficient plasma traps |
US20070284342A1 (en) * | 2006-06-09 | 2007-12-13 | Morten Jorgensen | Plasma treatment method and apparatus |
US8748785B2 (en) * | 2007-01-18 | 2014-06-10 | Amastan Llc | Microwave plasma apparatus and method for materials processing |
KR101119627B1 (ko) | 2007-03-29 | 2012-03-07 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
US9000321B2 (en) * | 2007-06-22 | 2015-04-07 | Komatsu Industries Corporation | Thermal cutter with sound absorbent walls |
JP5421551B2 (ja) * | 2008-06-11 | 2014-02-19 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
KR101174277B1 (ko) * | 2008-07-09 | 2012-08-16 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
WO2010064818A2 (ko) * | 2008-12-02 | 2010-06-10 | 트리플코어스코리아 | 상압 플라즈마 발생 장치 및 이를 이용한 상압 플라즈마 발생 방법 |
KR101100916B1 (ko) | 2008-12-02 | 2012-01-02 | (주)트리플코어스코리아 | 상압 플라즈마 발생 장치 및 이를 이용한 상압 플라즈마 발생 방법 |
DE102011015263B4 (de) * | 2010-03-26 | 2014-07-24 | Hq-Dielectrics Gmbh | Vorrichtung und Verfahren zum Behandeln von Substraten |
IT1399441B1 (it) * | 2010-04-12 | 2013-04-19 | Cebora Spa | Torcia per il taglio al plasma. |
US10658161B2 (en) * | 2010-10-15 | 2020-05-19 | Applied Materials, Inc. | Method and apparatus for reducing particle defects in plasma etch chambers |
US10477665B2 (en) * | 2012-04-13 | 2019-11-12 | Amastan Technologies Inc. | Microwave plasma torch generating laminar flow for materials processing |
JP6323849B2 (ja) | 2012-08-28 | 2018-05-16 | アジレント・テクノロジーズ・インクAgilent Technologies, Inc. | 電磁導波路およびプラズマ源を含む機器、プラズマ生成方法 |
FR2995913B1 (fr) * | 2012-09-24 | 2014-10-10 | Commissariat Energie Atomique | Procede de formation d'une couche de silicium epitaxiee. |
US9374853B2 (en) | 2013-02-08 | 2016-06-21 | Letourneau University | Method for joining two dissimilar materials and a microwave system for accomplishing the same |
JP5717888B2 (ja) * | 2013-02-25 | 2015-05-13 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9550694B2 (en) | 2014-03-31 | 2017-01-24 | Corning Incorporated | Methods and apparatus for material processing using plasma thermal source |
US9533909B2 (en) | 2014-03-31 | 2017-01-03 | Corning Incorporated | Methods and apparatus for material processing using atmospheric thermal plasma reactor |
US20160200618A1 (en) * | 2015-01-08 | 2016-07-14 | Corning Incorporated | Method and apparatus for adding thermal energy to a glass melt |
WO2017021808A1 (en) * | 2015-07-31 | 2017-02-09 | Agilent Technologies, Inc. | Chambers for microwave plasma generation |
DE102017115438A1 (de) | 2017-06-06 | 2018-12-06 | Fricke Und Mallah Microwave Technology Gmbh | Vorrichtung zum erzeugen eines plasmastrahls im mhz- und ghzbereich mit tem- und hohlleitermoden |
US11019712B2 (en) * | 2018-05-01 | 2021-05-25 | Sunbeam Technologies, Llc | Method and apparatus for torsional magnetic reconnection |
US11930582B2 (en) | 2018-05-01 | 2024-03-12 | Sunbeam Technologies, Llc | Method and apparatus for torsional magnetic reconnection |
US20200258718A1 (en) * | 2019-02-07 | 2020-08-13 | Mattson Technology, Inc. | Gas Supply With Angled Injectors In Plasma Processing Apparatus |
CA3132345A1 (en) * | 2019-04-05 | 2020-10-08 | Pyrowave Inc. | Coupler for microwave pyrolysis systems |
CN111715489B (zh) * | 2020-07-01 | 2022-07-05 | 矿冶科技集团有限公司 | 大尺寸筒形件可磨耗涂层喷涂方法 |
US20220152724A1 (en) * | 2020-11-17 | 2022-05-19 | Applied Materials, Inc. | Optical device having structural and refractive index gradation, and method of fabricating the same |
CN113097676B (zh) * | 2021-03-25 | 2022-03-29 | 广东省蓝波湾智能科技有限公司 | 一种波导同轴转换器 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2480552A1 (fr) * | 1980-04-10 | 1981-10-16 | Anvar | Generateur de plasma |
DE3729347A1 (de) * | 1986-09-05 | 1988-03-17 | Mitsubishi Electric Corp | Plasmaprozessor |
US5053678A (en) * | 1988-03-16 | 1991-10-01 | Hitachi, Ltd. | Microwave ion source |
JP2527150B2 (ja) * | 1989-07-25 | 1996-08-21 | 豊信 吉田 | マイクロ波熱プラズマ・ト―チ |
US5032202A (en) * | 1989-10-03 | 1991-07-16 | Martin Marietta Energy Systems, Inc. | Plasma generating apparatus for large area plasma processing |
US5081398A (en) * | 1989-10-20 | 1992-01-14 | Board Of Trustees Operating Michigan State University | Resonant radio frequency wave coupler apparatus using higher modes |
JPH03211284A (ja) * | 1990-01-17 | 1991-09-17 | Nippon Koshuha Kk | 多段熱プラズマ反応装置 |
DE69224183T2 (de) * | 1991-02-28 | 1998-06-18 | Komatsu Mfg Co Ltd | Plasmaschneidebrenner |
US5432315A (en) * | 1991-05-31 | 1995-07-11 | Hitachi, Ltd. | Plasma process apparatus including ground electrode with protection film |
DE69318480T2 (de) * | 1992-06-23 | 1998-09-17 | Nippon Telegraph & Telephone | Plasmabearbeitungsgerät |
FR2701797B1 (fr) * | 1993-02-18 | 1995-03-31 | Commissariat Energie Atomique | Coupleur de transfert d'une puissance micro-onde vers une nappe de plasma et source micro-onde linéaire pour le traitement de surfaces par plasma . |
-
1995
- 1995-10-19 TW TW084111068A patent/TW285746B/zh active
- 1995-10-23 US US08/546,834 patent/US5734143A/en not_active Expired - Fee Related
- 1995-10-24 DE DE69505087T patent/DE69505087T2/de not_active Expired - Fee Related
- 1995-10-24 EP EP95116716A patent/EP0710054B1/de not_active Expired - Lifetime
- 1995-10-25 CN CN95118293A patent/CN1057422C/zh not_active Expired - Fee Related
- 1995-10-25 MY MYPI95003208A patent/MY138630A/en unknown
- 1995-10-26 KR KR1019950038030A patent/KR100189311B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
MY138630A (en) | 2009-07-31 |
KR100189311B1 (ko) | 1999-06-01 |
DE69505087T2 (de) | 1999-03-11 |
TW285746B (de) | 1996-09-11 |
US5734143A (en) | 1998-03-31 |
CN1057422C (zh) | 2000-10-11 |
KR960013547A (ko) | 1996-05-22 |
EP0710054B1 (de) | 1998-09-30 |
CN1127978A (zh) | 1996-07-31 |
EP0710054A1 (de) | 1996-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |