DE69427067D1 - Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht - Google Patents

Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht

Info

Publication number
DE69427067D1
DE69427067D1 DE69427067T DE69427067T DE69427067D1 DE 69427067 D1 DE69427067 D1 DE 69427067D1 DE 69427067 T DE69427067 T DE 69427067T DE 69427067 T DE69427067 T DE 69427067T DE 69427067 D1 DE69427067 D1 DE 69427067D1
Authority
DE
Germany
Prior art keywords
thin film
scattered
light
films
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69427067T
Other languages
English (en)
Other versions
DE69427067T2 (de
Inventor
Frank Pinier
Bill Woodley
Patrick Patin
Didier Frot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IFP Energies Nouvelles IFPEN
Sematech
Original Assignee
IFP Energies Nouvelles IFPEN
Sematech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IFP Energies Nouvelles IFPEN, Sematech filed Critical IFP Energies Nouvelles IFPEN
Publication of DE69427067D1 publication Critical patent/DE69427067D1/de
Application granted granted Critical
Publication of DE69427067T2 publication Critical patent/DE69427067T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/49Scattering, i.e. diffuse reflection within a body or fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
DE69427067T 1993-11-24 1994-11-23 Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht Expired - Fee Related DE69427067T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9314347A FR2712977B1 (fr) 1993-11-24 1993-11-24 Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.

Publications (2)

Publication Number Publication Date
DE69427067D1 true DE69427067D1 (de) 2001-05-17
DE69427067T2 DE69427067T2 (de) 2001-08-02

Family

ID=9453395

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69427067T Expired - Fee Related DE69427067T2 (de) 1993-11-24 1994-11-23 Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht

Country Status (9)

Country Link
US (1) US5572321A (de)
EP (1) EP0654661B1 (de)
JP (1) JPH0843292A (de)
KR (1) KR950014849A (de)
AT (1) ATE200578T1 (de)
CA (1) CA2136583A1 (de)
DE (1) DE69427067T2 (de)
ES (1) ES2158884T3 (de)
FR (1) FR2712977B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE216073T1 (de) * 1996-11-04 2002-04-15 Chefaro Ireland Ltd Prüfeinrichtung für körperflüssigkeiten
US6246474B1 (en) * 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
KR100437024B1 (ko) * 2001-10-18 2004-06-23 엘지전자 주식회사 박막 검사 방법 및 그 장치
US20040081625A1 (en) * 2002-10-21 2004-04-29 Schering Corporation Nasal formulations for the treatment of allergies
US7375813B2 (en) * 2004-10-21 2008-05-20 Eastman Kodak Company Method and system for diffusion attenuated total reflection based concentration sensing
US8614792B2 (en) * 2009-03-04 2013-12-24 Malvern Instruments, Ltd. Particle characterization
JP5659479B2 (ja) * 2009-10-21 2015-01-28 東洋製罐グループホールディングス株式会社 培養容器内の細胞の計数方法、及び細胞計数用装置
WO2010103748A1 (ja) 2009-03-09 2010-09-16 東洋製罐株式会社 細胞培養方法、細胞培養装置、容器内の計数対象物の計数方法、及び計数用装置
FR2947338B1 (fr) * 2009-06-26 2011-07-15 Inst Francais Du Petrole Methode perfectionnee de mesure granulometrique
FR2947339B1 (fr) * 2009-06-26 2011-07-15 Inst Francais Du Petrole Granulometre perfectionne
JP5672342B2 (ja) * 2013-07-09 2015-02-18 東洋製罐グループホールディングス株式会社 計数用装置
EP2860513B1 (de) 2013-10-08 2018-04-25 Anton Paar GmbH Probenanalysevorrichtung und Probenanalyseverfahren zur Kompensierung von Verzerrungen im Zusammenhang mit dem Brechungsindex
CN105527224B (zh) * 2014-09-29 2019-02-22 安东帕有限公司 一种用于分析样品的设备和方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3621243A (en) * 1967-01-23 1971-11-16 Freeport Sulphur Co Apparatus and process for determining particle size by x-ray absorption analysis
SU1121602A1 (ru) * 1981-02-13 1984-10-30 Казанский ордена Трудового Красного Знамени авиационный институт Устройство дл измерени размеров и счетной концентрации аэрозольных частиц
FI77330C (fi) * 1986-01-08 1989-02-10 K Patents Oy Foerfarande foer belysning av partiklar i en mellanprodukt foer optisk analys och optisk partikelanalysator.
JP2529966B2 (ja) * 1987-03-28 1996-09-04 株式会社東芝 粒径測定装置
JPH0820371B2 (ja) * 1988-01-21 1996-03-04 株式会社ニコン 欠陥検査装置及び欠陥検査方法
US5061065A (en) * 1989-10-20 1991-10-29 Pacific Scientific Company Particle contamination detection in fluids through the external section of a laser
US5198369A (en) * 1990-04-25 1993-03-30 Canon Kabushiki Kaisha Sample measuring method using agglomeration reaction of microcarriers
US5172182A (en) * 1991-05-31 1992-12-15 Sting Donald W Internal reflectance element with very small sample contacting surface

Also Published As

Publication number Publication date
EP0654661A1 (de) 1995-05-24
FR2712977B1 (fr) 1996-01-26
US5572321A (en) 1996-11-05
JPH0843292A (ja) 1996-02-16
CA2136583A1 (fr) 1995-05-25
ES2158884T3 (es) 2001-09-16
DE69427067T2 (de) 2001-08-02
FR2712977A1 (fr) 1995-06-02
KR950014849A (ko) 1995-06-16
ATE200578T1 (de) 2001-04-15
EP0654661B1 (de) 2001-04-11

Similar Documents

Publication Publication Date Title
DE69427067T2 (de) Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht
US5198872A (en) Apparatus for detecting the wavelength of laser light
US5260584A (en) Instrument for measuring reflective properties of paper and other opaque materials
WO1998028661A3 (en) Optical height meter, surface-inspection device provided with such a height meter, and lithographic apparatus provided with the inspection device
KR830008309A (ko) 광학적 판독성 정보조직 판독 및 서입용장치
KR930013681A (ko) 박막 두께 측정 장치
DK646488A (da) Apparat til identifikation af moenter
JPS63241336A (ja) 粒径測定装置
CA2166662A1 (fr) Dispositif de mesure colorimetrique d'un ecran d'affichage
FR2404198A1 (fr) Procede et appareil de visee pour alignement de dispositifs optiques recevant des radiations non visibles
JPH0467889B2 (de)
US4587414A (en) Apparatus for adjusting the position of an edge with surface portions reflecting different wavelengths of light
DE3175624D1 (en) Fingerprint sensor delivering an output signal corresponding to the topographic relief of a finger to be examined
DE69214340D1 (de) Elektrooptisches Messgerät
JPH09196630A (ja) 光学定数測定装置および顕微鏡
US4839528A (en) Particle analyzing apparatus using an afocal light beam
JP2002139309A (ja) 光学特性測定装置、膜厚測定装置、研磨終点判定装置及び研磨装置
JPS60222756A (ja) 異物検査装置
JPH08128941A (ja) 粒度分布測定装置
JPH04313005A (ja) 膜厚測定装置
JPS57153206A (en) Light interference measuring device
GB1568212A (en) Interferometric methods for measuring surface displacements or differences in surface shape
JP3319720B2 (ja) エッジ検出装置
SU857916A1 (ru) Способ контрол нестабильности положени кинопленки вдоль оптической оси киноаппарата
JPH01147306A (ja) 膜厚測定装置

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee