FR2712977B1 - Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée. - Google Patents

Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.

Info

Publication number
FR2712977B1
FR2712977B1 FR9314347A FR9314347A FR2712977B1 FR 2712977 B1 FR2712977 B1 FR 2712977B1 FR 9314347 A FR9314347 A FR 9314347A FR 9314347 A FR9314347 A FR 9314347A FR 2712977 B1 FR2712977 B1 FR 2712977B1
Authority
FR
France
Prior art keywords
thin film
intensity
intended
scattered
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9314347A
Other languages
English (en)
Other versions
FR2712977A1 (fr
Inventor
Pinier Frank
Woodley Bill
Patin Patrick
Frot Didier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sematech
Original Assignee
Sematech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9314347A priority Critical patent/FR2712977B1/fr
Application filed by Sematech filed Critical Sematech
Priority to DE69427067T priority patent/DE69427067T2/de
Priority to US08/347,257 priority patent/US5572321A/en
Priority to EP94402682A priority patent/EP0654661B1/fr
Priority to AT94402682T priority patent/ATE200578T1/de
Priority to ES94402682T priority patent/ES2158884T3/es
Priority to CA002136583A priority patent/CA2136583A1/fr
Priority to KR1019940031011A priority patent/KR950014849A/ko
Priority to JP6313997A priority patent/JPH0843292A/ja
Publication of FR2712977A1 publication Critical patent/FR2712977A1/fr
Application granted granted Critical
Publication of FR2712977B1 publication Critical patent/FR2712977B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR9314347A 1993-11-24 1993-11-24 Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée. Expired - Lifetime FR2712977B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR9314347A FR2712977B1 (fr) 1993-11-24 1993-11-24 Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.
US08/347,257 US5572321A (en) 1993-11-24 1994-11-23 Detector for measuring the luminous intensity scattered by thin films of colloidal media
EP94402682A EP0654661B1 (fr) 1993-11-24 1994-11-23 Détecteur d'intensité lumineuse diffusée par des films de milieux colloidaux
AT94402682T ATE200578T1 (de) 1993-11-24 1994-11-23 Streulichtintensitätsdetektor für von filmen in kolloidalen medien gestreutes licht
DE69427067T DE69427067T2 (de) 1993-11-24 1994-11-23 Streulichtintensitätsdetektor für von Filmen in kolloidalen Medien gestreutes Licht
ES94402682T ES2158884T3 (es) 1993-11-24 1994-11-23 Detector de intensidad luminosa difundida por peliculas de medios coloidales.
CA002136583A CA2136583A1 (fr) 1993-11-24 1994-11-24 Detecteur d'intensite lumineuse diffusee par des films minces de milieux colloidaux
KR1019940031011A KR950014849A (ko) 1993-11-24 1994-11-24 콜로이드 매체의 박막에 의해 산란된 광도 측정용 검출기
JP6313997A JPH0843292A (ja) 1993-11-24 1994-11-24 コロイド状の媒体の薄層による散乱光の光度を測定する検知器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9314347A FR2712977B1 (fr) 1993-11-24 1993-11-24 Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.

Publications (2)

Publication Number Publication Date
FR2712977A1 FR2712977A1 (fr) 1995-06-02
FR2712977B1 true FR2712977B1 (fr) 1996-01-26

Family

ID=9453395

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9314347A Expired - Lifetime FR2712977B1 (fr) 1993-11-24 1993-11-24 Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.

Country Status (9)

Country Link
US (1) US5572321A (fr)
EP (1) EP0654661B1 (fr)
JP (1) JPH0843292A (fr)
KR (1) KR950014849A (fr)
AT (1) ATE200578T1 (fr)
CA (1) CA2136583A1 (fr)
DE (1) DE69427067T2 (fr)
ES (1) ES2158884T3 (fr)
FR (1) FR2712977B1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE216073T1 (de) * 1996-11-04 2002-04-15 Chefaro Ireland Ltd Prüfeinrichtung für körperflüssigkeiten
US6246474B1 (en) * 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
KR100437024B1 (ko) * 2001-10-18 2004-06-23 엘지전자 주식회사 박막 검사 방법 및 그 장치
US20040081625A1 (en) * 2002-10-21 2004-04-29 Schering Corporation Nasal formulations for the treatment of allergies
US7375813B2 (en) * 2004-10-21 2008-05-20 Eastman Kodak Company Method and system for diffusion attenuated total reflection based concentration sensing
US8614792B2 (en) * 2009-03-04 2013-12-24 Malvern Instruments, Ltd. Particle characterization
JP5659479B2 (ja) * 2009-10-21 2015-01-28 東洋製罐グループホールディングス株式会社 培養容器内の細胞の計数方法、及び細胞計数用装置
WO2010103748A1 (fr) 2009-03-09 2010-09-16 東洋製罐株式会社 Procédé de culture de cellules, dispositif de culture de cellules, procédé pour compter des substances cibles à compter dans un récipient et dispositif de comptage
FR2947338B1 (fr) * 2009-06-26 2011-07-15 Inst Francais Du Petrole Methode perfectionnee de mesure granulometrique
FR2947339B1 (fr) * 2009-06-26 2011-07-15 Inst Francais Du Petrole Granulometre perfectionne
JP5672342B2 (ja) * 2013-07-09 2015-02-18 東洋製罐グループホールディングス株式会社 計数用装置
EP2860513B1 (fr) 2013-10-08 2018-04-25 Anton Paar GmbH Système d'analyse d'un échantillon et procédé d'analyse d'un échantillon avec compensation des distorsions relatives à des indices de réfraction
CN105527224B (zh) * 2014-09-29 2019-02-22 安东帕有限公司 一种用于分析样品的设备和方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3621243A (en) * 1967-01-23 1971-11-16 Freeport Sulphur Co Apparatus and process for determining particle size by x-ray absorption analysis
SU1121602A1 (ru) * 1981-02-13 1984-10-30 Казанский ордена Трудового Красного Знамени авиационный институт Устройство дл измерени размеров и счетной концентрации аэрозольных частиц
FI77330C (fi) * 1986-01-08 1989-02-10 K Patents Oy Foerfarande foer belysning av partiklar i en mellanprodukt foer optisk analys och optisk partikelanalysator.
JP2529966B2 (ja) * 1987-03-28 1996-09-04 株式会社東芝 粒径測定装置
JPH0820371B2 (ja) * 1988-01-21 1996-03-04 株式会社ニコン 欠陥検査装置及び欠陥検査方法
US5061065A (en) * 1989-10-20 1991-10-29 Pacific Scientific Company Particle contamination detection in fluids through the external section of a laser
US5198369A (en) * 1990-04-25 1993-03-30 Canon Kabushiki Kaisha Sample measuring method using agglomeration reaction of microcarriers
US5172182A (en) * 1991-05-31 1992-12-15 Sting Donald W Internal reflectance element with very small sample contacting surface

Also Published As

Publication number Publication date
EP0654661A1 (fr) 1995-05-24
US5572321A (en) 1996-11-05
JPH0843292A (ja) 1996-02-16
CA2136583A1 (fr) 1995-05-25
ES2158884T3 (es) 2001-09-16
DE69427067D1 (de) 2001-05-17
DE69427067T2 (de) 2001-08-02
FR2712977A1 (fr) 1995-06-02
KR950014849A (ko) 1995-06-16
ATE200578T1 (de) 2001-04-15
EP0654661B1 (fr) 2001-04-11

Similar Documents

Publication Publication Date Title
FR2712977B1 (fr) Détecteur d'itensité lumineuse diffusée par des objets submicroniques en concentration élevée.
WO1998028661A3 (fr) Dispositif optique de mesure de hauteur, dispositif d'inspection de surface comportant ce dispositif de mesure de hauteur, et appareil lithographique comportant ce dispositif d'inspection
US5260584A (en) Instrument for measuring reflective properties of paper and other opaque materials
ATE170626T1 (de) Vorrichtung zum photothermischen prüfen einer oberfläche
KR20100033487A (ko) 광학 특성 센서
EP0360126A3 (fr) Méthode d'opération d'un détecteur optique de fumée et détecteur de fumée pour la mise en oeuvre de la méthode
WO1998052025A1 (fr) Procede et instrument de controle de surface
JPS63241336A (ja) 粒径測定装置
US4285597A (en) Goniophotometer for measuring the gloss and/or light diffusion of surfaces
DE69622896T2 (de) Verbesserungen an Oberflächenkrümmungsmessungen
DE3175624D1 (en) Fingerprint sensor delivering an output signal corresponding to the topographic relief of a finger to be examined
JP2004170320A (ja) 粒子径分布測定装置
MY117679A (en) Optical pickup device
DE69214340T2 (de) Elektrooptisches Messgerät
US4190367A (en) Device for establishing a condition at the surface of a subject
JPS5979122A (ja) レ−ザパワ−測定装置
JPS5610201A (en) Object dimension measuring device
WO1991014935A1 (fr) Procede et appareil de controle du nettoyage
JPH08128941A (ja) 粒度分布測定装置
EP0050144A1 (fr) Procédé de mesure de paramètres physiques d'un corps mobile, caractéristiques de son mouvement et de sa surface.
JP2002139309A (ja) 光学特性測定装置、膜厚測定装置、研磨終点判定装置及び研磨装置
JPS56145330A (en) Measuring device for light-scattering particulate
RU2148790C1 (ru) Способ и устройство для высокоточного бесконтактного измерения расстояний поверхностей
SU1305600A1 (ru) Устройство контрол относительной деформации текстильных материалов
JPS5497469A (en) Laser speed measuring apparatus