WO1991014935A1 - Procede et appareil de controle du nettoyage - Google Patents
Procede et appareil de controle du nettoyage Download PDFInfo
- Publication number
- WO1991014935A1 WO1991014935A1 PCT/DK1991/000086 DK9100086W WO9114935A1 WO 1991014935 A1 WO1991014935 A1 WO 1991014935A1 DK 9100086 W DK9100086 W DK 9100086W WO 9114935 A1 WO9114935 A1 WO 9114935A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measuring
- dust
- adhesive foil
- adhesive
- exposed
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000004140 cleaning Methods 0.000 title claims abstract description 6
- 239000000853 adhesive Substances 0.000 claims abstract description 40
- 230000001070 adhesive effect Effects 0.000 claims abstract description 40
- 239000011888 foil Substances 0.000 claims abstract description 39
- 239000000428 dust Substances 0.000 claims abstract description 35
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 239000002390 adhesive tape Substances 0.000 claims description 10
- 230000005855 radiation Effects 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 4
- 230000008602 contraction Effects 0.000 claims description 2
- 238000010407 vacuum cleaning Methods 0.000 claims description 2
- 238000005070 sampling Methods 0.000 claims 3
- 239000002245 particle Substances 0.000 description 11
- 238000004458 analytical method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
- A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
- A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
- A47L9/2857—User input or output elements for control, e.g. buttons, switches or displays
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
- A47L9/00—Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
- A47L9/28—Installation of the electric equipment, e.g. adaptation or attachment to the suction cleaner; Controlling suction cleaners by electric means
- A47L9/2805—Parameters or conditions being sensed
- A47L9/281—Parameters or conditions being sensed the amount or condition of incoming dirt or dust
- A47L9/2815—Parameters or conditions being sensed the amount or condition of incoming dirt or dust using optical detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
- G01N15/0612—Optical scan of the deposits
Definitions
- a method and an apparatus for cleaning control are provided.
- the invention relates to a method of cleaning control by measuring the degree of dirt on a surface by means of a dust collecting adhesive foil, in which an optical measuring is effected of an area of adhesive foil exposed to dust and a comparison of the obtained measuring value with a reference value, and a mesuring apparatus for carrying out the method.
- the method according to the invention is characterized in that the area of the adhesive foil exposed to dust is placed substantially perpendicular to the radiation axis of a laser beam emitted from a laser beam source which laser beam after passage through the adhesive foil is focused on an intensity measuring photodetector, the output signal of which is fed to a measuring instrument the display of which is compared to the reference value.
- the measuring apparatus is characterized by comprising a laser beam source with associated optical members for the generation of a beam of substantially parallel laser rays, a holder designed to arrange an adhesive foil dust probe and means for positioning said holder in said parallel beams with the adhesive foil substantially perpendicular to the axis of radiation and means for focusing the beam passing through the adhesive foil holder on an intensity measuring photodetector and a measuring instrument for measuring the output signal of the detector and comparing it to a reference value.
- the simplification is obtained by merely measuring the quantity of directly transmitted (laser) light, i.e. light that is neither absorbed nor scattered by the dust particles on the adhesive tape.
- Fig. 1 illustrates a dust-absorbing adhesive tape
- Fig. 2 is a side elevation of the adhesive tape
- Fig. 3 is a sketch of a measuring apparatus according to the invention.
- Fig. 4 illustrates a holder, disposed on a vacuum cleaner pipe, for the exposure of the adhesive foil by measuring the dirt degree of a shaggy surface.
- the adhesive foil illustrated in Figs 1 and 2 Prior to use the adhesive foil illustrated in Figs 1 and 2 is provided on its adhesive surface with a cover sheet, not shown. Immediately before the exposure of the adhesive foil the cover sheet is removed and a reference measurement of the unexposed adhesive tape is either effected at once, or part of the adhesive tape is maintained unexposed (see Figs 1 and 2) for effecting the reference measurement later on.
- the exposure on a smooth surface is obtained by pressing the adhesive foil against the surface, the adhesive side facing downwards; on a shaggy surface by arranging the adhesive foil in a holder, illustrated in Fig. 4, inserted in a vacuum cleaner pipe, and subsequent vacuum cleaning of the shaggy surface for a predetermined period.
- said holder may have a turbulence forming, conical contraction as illustrated in Fig. 4.
- the adhesive tape After exposure, the adhesive tape is placed in measuring position within the measuring apparatus in Fig. 3, in which laser beams from a laser diode LD by means of lenses L 1 and L 2 are made to impinge on the adhesive foil in a parallel beam at the measuring position S. Part of the incident laser light will then be scattered and part of the light will be absorbed by the dust particles on the adhesive foil, while the remainder by means of a lens L 3 with relatively large focal length (f) will be focused, preferably through a pinhole diaphragm P s , on a detector D s , for measuring the transmitted intensity whose output signal is fed to the measuring instrument M for displaying a measuring figure.
- a lens L 3 with relatively large focal length (f) preferably through a pinhole diaphragm P s , on a detector D s , for measuring the transmitted intensity whose output signal is fed to the measuring instrument M for displaying a measuring figure.
- E is the extinction coefficient and A is the area of the projection of dust perpendicular to the light beam.
- E depends on the ratio between the par ticle size and the wavelength of the light and is close to 2 when this ratio is large (Broomhead et al, 1960). In practice E is an average value determined by the optical properties and the actual size of the particles.
- Scattered light within 3° from the main beam is by and large merely due to diffraction.
- ⁇ (pinhole) 0.2 mm, 0.3 mm, 0.6 mm, 1.0 mm, 2.0 mm and 3.0 mm, corresponding to detection angles of 0,024°, 0,036°, 0,072°, 0,12°, 0,24° and 0,36°, respectively, be obtained numeric values giving a rough description of the particle size distribution.
- the radiation source is preferably a laser diode and the photodetector a photodiode and the apparatus has been made portable by accommodating a battery for power supply to the measuring circuitry.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
On décrit un procédé et un appareil de contrôle du nettoyage par la mesure de la quantité de saletés présentes sur une surface au moyen d'une feuille adhésive réceptrice de poussières. On mesure par des moyens optiques une zone de la feuille adhésive exposée aux poussières et on compare la valeur mesurée à une valeur de référence. La mesure optique est réalisée par une source de faisceau laser avec des éléments optiques associés afin de générer un faisceau de rayons laser essentiellement parallèles. On envoie lesdits rayons à travers la feuille adhésive de façon sensiblement perpendiculaire, et on les focalise ensuite sur un détecteur en vue de leur affichage sur un instrument de mesure. L'appareil peut être construit sous une forme portative grâce à la simplicité de ce procédé et de la conception dudit apareil.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO923521A NO923521D0 (no) | 1990-03-22 | 1992-09-10 | Fremgangsmaate og apparat for rengjoeringskontroll |
FI924223A FI924223A (fi) | 1990-03-22 | 1992-09-21 | Foerfarande och apparat foer rengoeringskontroll |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK74390A DK163538C (da) | 1990-03-22 | 1990-03-22 | Fremgangsmaade og maaleapparat til rengoeringskontrol |
DK743/90 | 1990-03-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1991014935A1 true WO1991014935A1 (fr) | 1991-10-03 |
Family
ID=8097027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DK1991/000086 WO1991014935A1 (fr) | 1990-03-22 | 1991-03-20 | Procede et appareil de controle du nettoyage |
Country Status (3)
Country | Link |
---|---|
DK (1) | DK163538C (fr) |
FI (1) | FI924223A (fr) |
WO (1) | WO1991014935A1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000039566A1 (fr) * | 1998-12-17 | 2000-07-06 | Act - Advanced Cleaning Technics Ab | Instrument et procede de mesure du degre de poussiere et de salete sur une surface |
US6850328B1 (en) * | 1997-04-18 | 2005-02-01 | Lasse Leirfall | Monitoring dust deposition |
WO2012007376A1 (fr) * | 2010-07-13 | 2012-01-19 | Krämer Ag, Bassersdorf | Procédé d'évaluation de particules adhérant à un corps |
DE102010040069A1 (de) * | 2010-08-31 | 2012-03-01 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Verfahren und System zum Extrahieren von Proben nach der Strukturierung von Mikrostrukturbauelementen |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2896574A (en) * | 1956-05-15 | 1959-07-28 | Larsen Johannes Peter | Milking claw for a milking machine |
DK172219B1 (da) * | 1994-09-23 | 1998-01-05 | Peter Vinzents | Støvprøvetagningsudstyr |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4402607A (en) * | 1980-05-16 | 1983-09-06 | Gca Corporation | Automatic detector for microscopic dust on large-area, optically unpolished surfaces |
GB2119506A (en) * | 1982-03-23 | 1983-11-16 | Canon Kk | Inspecting photomasks for dust |
US4598997A (en) * | 1982-02-15 | 1986-07-08 | Rca Corporation | Apparatus and method for detecting defects and dust on a patterned surface |
WO1987007024A1 (fr) * | 1986-05-05 | 1987-11-19 | Hughes Aircraft Company | Procede et appareil d'identification d'une matiere particulaire |
DE3626724A1 (de) * | 1986-08-07 | 1988-02-11 | Siemens Ag | Anordnung zur oberflaechenpruefung |
US4767213A (en) * | 1986-02-05 | 1988-08-30 | Interlava Ag | Optical indication and operation monitoring unit for vacuum cleaners |
-
1990
- 1990-03-22 DK DK74390A patent/DK163538C/da not_active IP Right Cessation
-
1991
- 1991-03-20 WO PCT/DK1991/000086 patent/WO1991014935A1/fr active Application Filing
-
1992
- 1992-09-21 FI FI924223A patent/FI924223A/fi not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4402607A (en) * | 1980-05-16 | 1983-09-06 | Gca Corporation | Automatic detector for microscopic dust on large-area, optically unpolished surfaces |
US4598997A (en) * | 1982-02-15 | 1986-07-08 | Rca Corporation | Apparatus and method for detecting defects and dust on a patterned surface |
GB2119506A (en) * | 1982-03-23 | 1983-11-16 | Canon Kk | Inspecting photomasks for dust |
US4767213A (en) * | 1986-02-05 | 1988-08-30 | Interlava Ag | Optical indication and operation monitoring unit for vacuum cleaners |
WO1987007024A1 (fr) * | 1986-05-05 | 1987-11-19 | Hughes Aircraft Company | Procede et appareil d'identification d'une matiere particulaire |
DE3626724A1 (de) * | 1986-08-07 | 1988-02-11 | Siemens Ag | Anordnung zur oberflaechenpruefung |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN, Vol. 11, No. 203, P591; & JP,A,62 025 244, (23-02-1987), HITACHI LTD. * |
PATENT ABSTRACTS OF JAPAN, Vol. 12, No. 51, P667; & JP,A,62 197 751, (01-09-1987), TOSHIBA CORP. * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6850328B1 (en) * | 1997-04-18 | 2005-02-01 | Lasse Leirfall | Monitoring dust deposition |
WO2000039566A1 (fr) * | 1998-12-17 | 2000-07-06 | Act - Advanced Cleaning Technics Ab | Instrument et procede de mesure du degre de poussiere et de salete sur une surface |
WO2012007376A1 (fr) * | 2010-07-13 | 2012-01-19 | Krämer Ag, Bassersdorf | Procédé d'évaluation de particules adhérant à un corps |
EP2410317A1 (fr) * | 2010-07-13 | 2012-01-25 | Krämer AG Bassersdorf | Procédé d'évaluation de particules adhérant à un corps |
DE102010040069A1 (de) * | 2010-08-31 | 2012-03-01 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Verfahren und System zum Extrahieren von Proben nach der Strukturierung von Mikrostrukturbauelementen |
US20120052601A1 (en) * | 2010-08-31 | 2012-03-01 | Globalfoundries Inc. | Method and System for Extracting Samples After Patterning of Microstructure Devices |
US8435885B2 (en) * | 2010-08-31 | 2013-05-07 | GlobalFoundries, Inc. | Method and system for extracting samples after patterning of microstructure devices |
Also Published As
Publication number | Publication date |
---|---|
DK163538B (da) | 1992-03-09 |
DK163538C (da) | 1992-08-03 |
DK74390D0 (da) | 1990-03-22 |
FI924223A0 (fi) | 1992-09-21 |
FI924223A (fi) | 1992-09-21 |
DK74390A (da) | 1991-09-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5803606A (en) | Surface photothermic testing device | |
US5159412A (en) | Optical measurement device with enhanced sensitivity | |
US4402607A (en) | Automatic detector for microscopic dust on large-area, optically unpolished surfaces | |
US4876458A (en) | Apparatus for measuring particles in liquid | |
RU94019480A (ru) | Способ и устройство определения измерительного параметра/ов/ объекта | |
JP2003515738A (ja) | 特に不透明液滴といったような実質的に球形の粒子のサイズを回折によって測定するための装置 | |
JPH0237536B2 (fr) | ||
US4728196A (en) | Arrangement for determining a surface structure, especially for roughness | |
JPS63241336A (ja) | 粒径測定装置 | |
JP3446410B2 (ja) | レーザ回折式粒度分布測定装置 | |
JP3258889B2 (ja) | 散乱式粒度分布測定装置における光軸調整方法 | |
US5859705A (en) | Apparatus and method for using light scattering to determine the size of particles virtually independent of refractive index | |
WO1991014935A1 (fr) | Procede et appareil de controle du nettoyage | |
KR950014849A (ko) | 콜로이드 매체의 박막에 의해 산란된 광도 측정용 검출기 | |
GB1298658A (en) | Photometer for measuring total radiant energy at selected angles | |
JPS6017340A (ja) | 紙の光学的な特性を測定する装置 | |
JPH05215664A (ja) | サブミクロン粒子の検出方法および装置 | |
JP3106521B2 (ja) | 透明基板の光学的検査装置 | |
JPS6370148A (ja) | 微細粒度分布測定装置 | |
JPH03214038A (ja) | 空気中に散布されたエアロゾルと粉麈などの測定装置 | |
JPH0638064B2 (ja) | 粒子解析装置 | |
WO2000031514A1 (fr) | Instrument de mesure de la diffusion de la lumiere | |
US5212393A (en) | Sample cell for diffraction-scattering measurement of particle size distributions | |
US4286875A (en) | Diffractometer | |
JPH1090158A (ja) | 浮遊粒子群の濃度及び粒度の測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA FI JP NO US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IT LU NL SE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 924223 Country of ref document: FI |
|
NENP | Non-entry into the national phase |
Ref country code: CA |