DE69420917D1 - Verfahren, um gestapelte Halbleiterchips zusammenzuschalten und Bauelement - Google Patents
Verfahren, um gestapelte Halbleiterchips zusammenzuschalten und BauelementInfo
- Publication number
- DE69420917D1 DE69420917D1 DE69420917T DE69420917T DE69420917D1 DE 69420917 D1 DE69420917 D1 DE 69420917D1 DE 69420917 T DE69420917 T DE 69420917T DE 69420917 T DE69420917 T DE 69420917T DE 69420917 D1 DE69420917 D1 DE 69420917D1
- Authority
- DE
- Germany
- Prior art keywords
- component
- semiconductor chips
- stacked semiconductor
- interconnecting stacked
- interconnecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06551—Conductive connections on the side of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06575—Auxiliary carrier between devices, the carrier having no electrical connection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06579—TAB carriers; beam leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06582—Housing for the assembly, e.g. chip scale package [CSP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9309964A FR2709020B1 (fr) | 1993-08-13 | 1993-08-13 | Procédé d'interconnexion de pastilles semi-conductrices en trois dimensions, et composant en résultant. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69420917D1 true DE69420917D1 (de) | 1999-11-04 |
DE69420917T2 DE69420917T2 (de) | 2000-02-17 |
Family
ID=9450196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69420917T Expired - Lifetime DE69420917T2 (de) | 1993-08-13 | 1994-08-05 | Verfahren, um gestapelte Halbleiterchips zusammenzuschalten und Bauelement |
Country Status (8)
Country | Link |
---|---|
US (1) | US5637536A (de) |
EP (1) | EP0638933B1 (de) |
JP (1) | JPH08502631A (de) |
KR (1) | KR950703793A (de) |
CA (1) | CA2146868A1 (de) |
DE (1) | DE69420917T2 (de) |
FR (1) | FR2709020B1 (de) |
WO (1) | WO1995005677A1 (de) |
Families Citing this family (72)
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US5354695A (en) | 1992-04-08 | 1994-10-11 | Leedy Glenn J | Membrane dielectric isolation IC fabrication |
US5985693A (en) * | 1994-09-30 | 1999-11-16 | Elm Technology Corporation | High density three-dimensional IC interconnection |
US6714625B1 (en) * | 1992-04-08 | 2004-03-30 | Elm Technology Corporation | Lithography device for semiconductor circuit pattern generation |
US6376921B1 (en) | 1995-11-08 | 2002-04-23 | Fujitsu Limited | Semiconductor device, method for fabricating the semiconductor device, lead frame and method for producing the lead frame |
US6159770A (en) * | 1995-11-08 | 2000-12-12 | Fujitsu Limited | Method and apparatus for fabricating semiconductor device |
US6072239A (en) | 1995-11-08 | 2000-06-06 | Fujitsu Limited | Device having resin package with projections |
US6329711B1 (en) | 1995-11-08 | 2001-12-11 | Fujitsu Limited | Semiconductor device and mounting structure |
US6861290B1 (en) * | 1995-12-19 | 2005-03-01 | Micron Technology, Inc. | Flip-chip adaptor package for bare die |
US5817530A (en) * | 1996-05-20 | 1998-10-06 | Micron Technology, Inc. | Use of conductive lines on the back side of wafers and dice for semiconductor interconnects |
US5778522A (en) * | 1996-05-20 | 1998-07-14 | Staktek Corporation | Method of manufacturing a high density integrated circuit module with complex electrical interconnect rails having electrical interconnect strain relief |
US5915167A (en) * | 1997-04-04 | 1999-06-22 | Elm Technology Corporation | Three dimensional structure memory |
US6551857B2 (en) | 1997-04-04 | 2003-04-22 | Elm Technology Corporation | Three dimensional structure integrated circuits |
USRE43112E1 (en) | 1998-05-04 | 2012-01-17 | Round Rock Research, Llc | Stackable ball grid array package |
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US6121576A (en) | 1998-09-02 | 2000-09-19 | Micron Technology, Inc. | Method and process of contact to a heat softened solder ball array |
JP3575001B2 (ja) | 1999-05-07 | 2004-10-06 | アムコー テクノロジー コリア インコーポレーティド | 半導体パッケージ及びその製造方法 |
JP3398721B2 (ja) * | 1999-05-20 | 2003-04-21 | アムコー テクノロジー コリア インコーポレーティド | 半導体パッケージ及びその製造方法 |
USRE40112E1 (en) | 1999-05-20 | 2008-02-26 | Amkor Technology, Inc. | Semiconductor package and method for fabricating the same |
JP2001077301A (ja) * | 1999-08-24 | 2001-03-23 | Amkor Technology Korea Inc | 半導体パッケージ及びその製造方法 |
FR2802706B1 (fr) * | 1999-12-15 | 2002-03-01 | 3D Plus Sa | Procede et dispositif d'interconnexion en trois dimensions de composants electroniques |
KR20010064907A (ko) * | 1999-12-20 | 2001-07-11 | 마이클 디. 오브라이언 | 와이어본딩 방법 및 이를 이용한 반도체패키지 |
US6414396B1 (en) | 2000-01-24 | 2002-07-02 | Amkor Technology, Inc. | Package for stacked integrated circuits |
FR2805082B1 (fr) * | 2000-02-11 | 2003-01-31 | 3D Plus Sa | Procede d'interconnexion en trois dimensions et dispositif electronique obtenu par ce procede |
KR100559664B1 (ko) | 2000-03-25 | 2006-03-10 | 앰코 테크놀로지 코리아 주식회사 | 반도체패키지 |
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FR2923081B1 (fr) * | 2007-10-26 | 2009-12-11 | 3D Plus | Procede d'interconnexion verticale de modules electroniques 3d par des vias. |
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FR2940521B1 (fr) | 2008-12-19 | 2011-11-11 | 3D Plus | Procede de fabrication collective de modules electroniques pour montage en surface |
FR2943176B1 (fr) | 2009-03-10 | 2011-08-05 | 3D Plus | Procede de positionnement des puces lors de la fabrication d'une plaque reconstituee |
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CN107994011B (zh) * | 2016-10-26 | 2020-06-02 | 晟碟信息科技(上海)有限公司 | 半导体封装体和制造半导体封装体的方法 |
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US5104820A (en) * | 1989-07-07 | 1992-04-14 | Irvine Sensors Corporation | Method of fabricating electronic circuitry unit containing stacked IC layers having lead rerouting |
FR2666190B1 (fr) * | 1990-08-24 | 1996-07-12 | Thomson Csf | Procede et dispositif d'encapsulation hermetique de composants electroniques. |
US5239199A (en) * | 1991-01-14 | 1993-08-24 | Texas Instruments Incorporated | Vertical lead-on-chip package |
FR2674680B1 (fr) * | 1991-03-26 | 1993-12-03 | Thomson Csf | Procede de realisation de connexions coaxiales pour composant electronique, et boitier de composant comportant de telles connexions. |
FR2688629A1 (fr) * | 1992-03-10 | 1993-09-17 | Thomson Csf | Procede et dispositif d'encapsulation en trois dimensions de pastilles semi-conductrices. |
US5343366A (en) * | 1992-06-24 | 1994-08-30 | International Business Machines Corporation | Packages for stacked integrated circuit chip cubes |
-
1993
- 1993-08-13 FR FR9309964A patent/FR2709020B1/fr not_active Expired - Fee Related
-
1994
- 1994-08-05 JP JP7506783A patent/JPH08502631A/ja active Pending
- 1994-08-05 CA CA002146868A patent/CA2146868A1/fr not_active Abandoned
- 1994-08-05 KR KR1019950701465A patent/KR950703793A/ko not_active Application Discontinuation
- 1994-08-05 US US08/416,704 patent/US5637536A/en not_active Expired - Lifetime
- 1994-08-05 DE DE69420917T patent/DE69420917T2/de not_active Expired - Lifetime
- 1994-08-05 WO PCT/FR1994/000986 patent/WO1995005677A1/fr active Application Filing
- 1994-08-05 EP EP94401817A patent/EP0638933B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69420917T2 (de) | 2000-02-17 |
EP0638933A1 (de) | 1995-02-15 |
WO1995005677A1 (fr) | 1995-02-23 |
EP0638933B1 (de) | 1999-09-29 |
CA2146868A1 (fr) | 1995-02-23 |
JPH08502631A (ja) | 1996-03-19 |
FR2709020A1 (fr) | 1995-02-17 |
US5637536A (en) | 1997-06-10 |
FR2709020B1 (fr) | 1995-09-08 |
KR950703793A (ko) | 1995-09-20 |
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