DE69420464T2 - Rotationserfassungsvorrichtung und zugehörige Skala - Google Patents

Rotationserfassungsvorrichtung und zugehörige Skala

Info

Publication number
DE69420464T2
DE69420464T2 DE69420464T DE69420464T DE69420464T2 DE 69420464 T2 DE69420464 T2 DE 69420464T2 DE 69420464 T DE69420464 T DE 69420464T DE 69420464 T DE69420464 T DE 69420464T DE 69420464 T2 DE69420464 T2 DE 69420464T2
Authority
DE
Germany
Prior art keywords
detection device
rotation detection
associated scale
scale
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69420464T
Other languages
English (en)
Other versions
DE69420464D1 (de
Inventor
Yasushi Kaneda
Koh Ishizuka
Satoshi Ishii
Kenji Hisamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP13857293A external-priority patent/JPH06347293A/ja
Priority claimed from JP03193994A external-priority patent/JP3303505B2/ja
Priority claimed from JP03194094A external-priority patent/JP3303506B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69420464D1 publication Critical patent/DE69420464D1/de
Application granted granted Critical
Publication of DE69420464T2 publication Critical patent/DE69420464T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69420464T 1993-06-10 1994-06-09 Rotationserfassungsvorrichtung und zugehörige Skala Expired - Fee Related DE69420464T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13857293A JPH06347293A (ja) 1993-06-10 1993-06-10 回転検出装置及び回転検出用のスケール
JP03193994A JP3303505B2 (ja) 1994-02-03 1994-02-03 光学式変位測定装置
JP03194094A JP3303506B2 (ja) 1994-02-03 1994-02-03 光学式変位測定装置

Publications (2)

Publication Number Publication Date
DE69420464D1 DE69420464D1 (de) 1999-10-14
DE69420464T2 true DE69420464T2 (de) 2000-04-13

Family

ID=27287524

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69420464T Expired - Fee Related DE69420464T2 (de) 1993-06-10 1994-06-09 Rotationserfassungsvorrichtung und zugehörige Skala

Country Status (3)

Country Link
US (1) US5537210A (de)
EP (1) EP0628791B1 (de)
DE (1) DE69420464T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178694A (ja) * 1994-12-27 1996-07-12 Canon Inc 変位センサ用のスケール
US5883384A (en) * 1996-04-16 1999-03-16 Canon Kabushiki Kaisha Rotational displacement information detection apparatus
JP2809190B2 (ja) * 1996-04-30 1998-10-08 日本電気株式会社 光アイソレータ
DE19809790B4 (de) * 1998-03-09 2005-12-22 Daimlerchrysler Ag Verfahren zur Ermittlung einer Drallstruktur in der Oberfläche eines feinbearbeiteten zylindrischen Werkstücks
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
ATE398768T1 (de) 2000-09-18 2008-07-15 Heidenhain Gmbh Dr Johannes Vorrichtung und verfahren zur erfassung der rotationsbewegung eines um eine achse drehbar gelagerten elementes
US20050040323A1 (en) * 2003-08-21 2005-02-24 Chee-Keong Chong Cylindrical encoder
DE10351560A1 (de) * 2003-11-03 2005-06-02 Metronic Ag Impulsgeber
US7135673B2 (en) * 2004-10-29 2006-11-14 The Boeing Company Imaging rotation angle absolute encoder
ATE480831T1 (de) * 2005-11-29 2010-09-15 Datalogic Spa Verfahren, blenden und optische empfangsgeräte für verbesserte tiefenschärfe bei einem linearen optischen codeleser
US7636165B2 (en) 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
KR101184129B1 (ko) 2008-06-05 2012-09-18 미쓰비시덴키 가부시키가이샤 광학식 인코더
JP5170046B2 (ja) 2009-09-18 2013-03-27 株式会社安川電機 ロータリエンコーダ、ロータリモータ、ロータリモータシステム、ディスク及びロータリエンコーダの製造方法
JP5170045B2 (ja) * 2009-09-18 2013-03-27 株式会社安川電機 リニアエンコーダ、リニアモータ、リニアモータシステム、メインスケール及びリニアエンコーダの製造方法
JP5489616B2 (ja) * 2009-09-28 2014-05-14 富士フイルム株式会社 インク組成物及び印刷物成型体の製造方法
JP5545366B2 (ja) 2010-05-31 2014-07-09 株式会社安川電機 ロータリエンコーダ、ロータリモータ及びロータリモータシステム
JP5126290B2 (ja) * 2010-06-07 2013-01-23 株式会社安川電機 エンコーダ、サーボモータ、サーボユニット及びエンコーダの製造方法
WO2012029927A1 (ja) 2010-09-02 2012-03-08 株式会社安川電機 エンコーダ、サーボモータ、及びモータユニット
US9383229B2 (en) 2010-10-31 2016-07-05 Avego Technologies General Ip (Singapore) Pte. Ltd. Optical reflective encoder with multi-faceted flat-faced lens
EP2623939B1 (de) 2012-02-03 2016-06-29 Siemens Aktiengesellschaft Messwertgeber sowie System mit einer Antriebseinheit und einem Messwertgeber

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB909916A (en) * 1958-06-11 1962-11-07 Ferranti Ltd Improvements relating to measuring apparatus
DE1773428C2 (de) * 1968-05-14 1973-09-13 Secretary Of State For Defence Of The United Kingdom Of Great Britain And Northern Ireland, London Vorrichtung zur Bestimmung der Lage eines beweglichen Bauteils relativ zu einem festen Bezugssystem
US3688570A (en) * 1970-06-05 1972-09-05 Polaroid Corp Angular deflection meter
US3935447A (en) * 1971-09-01 1976-01-27 Burroughs Corporation Angular motion detection apparatus
US4528448A (en) * 1982-05-13 1985-07-09 Benson, Inc. Plane linear grating for optically encoding information
US4541716A (en) * 1983-04-15 1985-09-17 Rca Corporation Detection of defects in a circular or spiral diffraction grating
JPS61256223A (ja) * 1985-05-09 1986-11-13 Matsushita Electric Ind Co Ltd ロ−タリ−エンコ−ダ
JPS6254122A (ja) * 1985-09-03 1987-03-09 Toshiba Corp ロ−タリ−エンコ−ダ
JPS62204121A (ja) * 1986-03-05 1987-09-08 Sanyo Denki Co Ltd 光透過式エンコ−ダ
JPS6336111A (ja) * 1986-07-30 1988-02-16 Canon Inc 光学式エンコ−ダ
DE3807011C1 (de) * 1988-03-04 1989-04-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JP2709088B2 (ja) * 1988-08-24 1998-02-04 株式会社リコー 回転量測定方法
JPH02285214A (ja) * 1989-04-26 1990-11-22 Canon Inc 測長器及びそれに用いるスケール部材
JP2780409B2 (ja) * 1990-01-20 1998-07-30 キヤノン株式会社 角度検出装置
US5121371A (en) * 1990-06-18 1992-06-09 Bernoulli Optical Systems Company Optical servo system for magnetic disk
US5118932A (en) * 1990-11-13 1992-06-02 Hughes Aircraft Company Shaft rotation rate sensor with a diffraction grating producing a velocity-related beat frequency
US5204524A (en) * 1991-03-22 1993-04-20 Mitutoyo Corporation Two-dimensional optical encoder with three gratings in each dimension
JP3218657B2 (ja) * 1991-12-04 2001-10-15 キヤノン株式会社 ロータリーエンコーダ
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics

Also Published As

Publication number Publication date
DE69420464D1 (de) 1999-10-14
EP0628791A3 (de) 1995-07-05
EP0628791A2 (de) 1994-12-14
US5537210A (en) 1996-07-16
EP0628791B1 (de) 1999-09-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee