DE69417189T2 - Kaskadierte Hochspannungsnetzwerkschaltung - Google Patents

Kaskadierte Hochspannungsnetzwerkschaltung

Info

Publication number
DE69417189T2
DE69417189T2 DE69417189T DE69417189T DE69417189T2 DE 69417189 T2 DE69417189 T2 DE 69417189T2 DE 69417189 T DE69417189 T DE 69417189T DE 69417189 T DE69417189 T DE 69417189T DE 69417189 T2 DE69417189 T2 DE 69417189T2
Authority
DE
Germany
Prior art keywords
high voltage
voltage network
network circuit
cascaded high
cascaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69417189T
Other languages
English (en)
Other versions
DE69417189D1 (de
Inventor
Mohamad M Mojaradi
Tuan A Vo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE69417189D1 publication Critical patent/DE69417189D1/de
Application granted granted Critical
Publication of DE69417189T2 publication Critical patent/DE69417189T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/4824Pads with extended contours, e.g. grid structure, branch structure, finger structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/402Field plates
    • H01L29/405Resistive arrangements, e.g. resistive or semi-insulating field plates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7816Lateral DMOS transistors, i.e. LDMOS transistors
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/10Modifications for increasing the maximum permissible switched voltage
    • H03K17/102Modifications for increasing the maximum permissible switched voltage in field-effect transistor switches
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69417189T 1993-12-21 1994-12-20 Kaskadierte Hochspannungsnetzwerkschaltung Expired - Fee Related DE69417189T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/170,848 US5382826A (en) 1993-12-21 1993-12-21 Stacked high voltage transistor unit

Publications (2)

Publication Number Publication Date
DE69417189D1 DE69417189D1 (de) 1999-04-22
DE69417189T2 true DE69417189T2 (de) 1999-07-08

Family

ID=22621514

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69417189T Expired - Fee Related DE69417189T2 (de) 1993-12-21 1994-12-20 Kaskadierte Hochspannungsnetzwerkschaltung

Country Status (4)

Country Link
US (1) US5382826A (de)
EP (1) EP0660415B1 (de)
JP (1) JPH07202004A (de)
DE (1) DE69417189T2 (de)

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JPH05283702A (ja) * 1992-04-03 1993-10-29 Hitachi Ltd 複合制御型半導体装置及びそれを使用した電力変換装置
US5486718A (en) * 1994-07-05 1996-01-23 Motorola, Inc. High voltage planar edge termination structure and method of making same
US5600149A (en) * 1995-10-30 1997-02-04 Xerox Corporation Power supply regulator
US5936874A (en) * 1997-06-19 1999-08-10 Micron Technology, Inc. High density semiconductor memory and method of making
EP0944113B1 (de) 1998-02-24 2005-11-09 STMicroelectronics S.r.l. Schutzstruktur für integrierte elektronische Hochspannungsanordnungen
US5918137A (en) * 1998-04-27 1999-06-29 Spectrian, Inc. MOS transistor with shield coplanar with gate electrode
US6680515B1 (en) * 2000-11-10 2004-01-20 Monolithic Power Systems, Inc. Lateral high voltage transistor having spiral field plate and graded concentration doping
US20040201078A1 (en) * 2003-04-11 2004-10-14 Liping Ren Field plate structure for high voltage devices
SE0302810D0 (sv) * 2003-10-24 2003-10-24 Infineon Technologies Ag Monolithically integrated circuit comprising a thin film resistor, and fabrication method thereof
JP5395137B2 (ja) * 2004-02-24 2014-01-22 セイコーインスツル株式会社 高電圧動作電界効果トランジスタとそのバイアス回路およびその高電圧動作回路要素
DE102004019345B4 (de) * 2004-04-21 2007-02-08 Austriamicrosystems Ag Ausgangsstufenanordnung
US20050274985A1 (en) * 2004-05-26 2005-12-15 Adlerstein Michael G RF decoupled field plate for FETs
DE102004039620B4 (de) * 2004-08-06 2006-10-12 Atmel Germany Gmbh Integrierte Schaltung, die eine vorgegebene Spannungsfestigkeit besitzt
US7183626B2 (en) * 2004-11-17 2007-02-27 International Rectifier Corporation Passivation structure with voltage equalizing loops
CN101405871A (zh) * 2004-11-24 2009-04-08 美高森美公司 用于宽禁带功率器件的结终端结构
US7955943B2 (en) * 2005-01-25 2011-06-07 Semiconductor Components Industries, Llc High voltage sensor device and method therefor
US7709292B2 (en) * 2006-09-29 2010-05-04 Sadwick Laurence P Processes and packaging for high voltage integrated circuits, electronic devices, and circuits
US7782644B2 (en) * 2007-03-03 2010-08-24 Sadwick Laurence P Method and apparatus for supplying power
US8009452B1 (en) * 2007-03-03 2011-08-30 Sadwick Laurence P Multiple driver power supply
US7709908B2 (en) * 2007-08-10 2010-05-04 United Microelectronics Corp. High-voltage MOS transistor device
US8289054B2 (en) * 2009-08-26 2012-10-16 Alfred E. Mann Foundation For Scientific Research High voltage differential pair and op amp in low voltage process
US8339189B2 (en) * 2009-08-26 2012-12-25 Alfred E. Mann Foundation For Scientific Research High voltage current source and voltage expander in low voltage process
US8461903B1 (en) * 2009-09-11 2013-06-11 Rf Micro Devices, Inc. SOI switch enhancement
US20110062554A1 (en) * 2009-09-17 2011-03-17 Hsing Michael R High voltage floating well in a silicon die
US8598637B2 (en) * 2009-09-18 2013-12-03 Monolithic Power Systems, Inc. High voltage junction field effect transistor with spiral field plate
TWI503956B (zh) * 2009-09-30 2015-10-11 Semiconductor Components Ind 高電壓感測器設備及其方法
US8587073B2 (en) 2010-10-15 2013-11-19 Taiwan Semiconductor Manufacturing Company, Ltd. High voltage resistor
US8786050B2 (en) 2011-05-04 2014-07-22 Taiwan Semiconductor Manufacturing Company, Ltd. High voltage resistor with biased-well
US8664741B2 (en) 2011-06-14 2014-03-04 Taiwan Semiconductor Manufacturing Company Ltd. High voltage resistor with pin diode isolation
US9373619B2 (en) 2011-08-01 2016-06-21 Taiwan Semiconductor Manufacturing Company, Ltd. High voltage resistor with high voltage junction termination
US20130161740A1 (en) * 2011-12-21 2013-06-27 Donald R. Disney Lateral High-Voltage Transistor with Buried Resurf Layer and Associated Method for Manufacturing the Same
US8766357B2 (en) 2012-03-01 2014-07-01 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for high voltage MOS transistor
US8975950B2 (en) 2012-07-07 2015-03-10 Skyworks Solutions, Inc. Switching device having a discharge circuit for improved intermodulation distortion performance
US10147724B2 (en) 2012-07-07 2018-12-04 Skyworks Solutions, Inc. Feed-forward circuit to improve intermodulation distortion performance of radio-frequency switch
US9160328B2 (en) 2012-07-07 2015-10-13 Skyworks Solutions, Inc. Circuits, devices, methods and applications related to silicon-on-insulator based radio-frequency switches
US9276570B2 (en) 2012-07-07 2016-03-01 Skyworks Solutions, Inc. Radio-frequency switch having gate node voltage compensation network
US9059702B2 (en) 2012-07-07 2015-06-16 Skyworks Solutions, Inc. Switch linearization by non-linear compensation of a field-effect transistor
US9148194B2 (en) 2012-07-07 2015-09-29 Skyworks Solutions, Inc. Radio-frequency switch system having improved intermodulation distortion performance
US9628075B2 (en) 2012-07-07 2017-04-18 Skyworks Solutions, Inc. Radio-frequency switch having dynamic body coupling
JP2014017962A (ja) * 2012-07-09 2014-01-30 Denso Corp 起動回路付半導体装置
CN103579313A (zh) * 2012-08-10 2014-02-12 上海华虹Nec电子有限公司 提高高压ldmos器件击穿电压的结构
JP2014063771A (ja) * 2012-09-19 2014-04-10 Toshiba Corp 半導体装置
US9013225B2 (en) 2013-02-04 2015-04-21 Skyworks Solutions, Inc. RF switches having increased voltage swing uniformity
US8786397B1 (en) * 2013-02-07 2014-07-22 Excelliance Mos Corporation Electric field resistor
CN103219898B (zh) * 2013-04-02 2016-06-01 苏州博创集成电路设计有限公司 具有电流采样和启动结构的半导体装置
US9948281B2 (en) 2016-09-02 2018-04-17 Peregrine Semiconductor Corporation Positive logic digitally tunable capacitor
US10608623B2 (en) 2016-12-21 2020-03-31 Qorvo US. Inc. Transistor-based radio frequency (RF) switch
US10320379B2 (en) 2016-12-21 2019-06-11 Qorvo Us, Inc. Transistor-based radio frequency (RF) switch
DE102017130213B4 (de) * 2017-12-15 2021-10-21 Infineon Technologies Ag Planarer feldeffekttransistor
US10886911B2 (en) 2018-03-28 2021-01-05 Psemi Corporation Stacked FET switch bias ladders
US10236872B1 (en) * 2018-03-28 2019-03-19 Psemi Corporation AC coupling modules for bias ladders
US10505530B2 (en) 2018-03-28 2019-12-10 Psemi Corporation Positive logic switch with selectable DC blocking circuit
US11476849B2 (en) 2020-01-06 2022-10-18 Psemi Corporation High power positive logic switch

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE785747A (fr) * 1971-07-02 1973-01-02 Philips Nv Dispositif semiconducteur
US4333225A (en) * 1978-12-18 1982-06-08 Xerox Corporation Method of making a circular high voltage field effect transistor
US4288806A (en) * 1979-05-29 1981-09-08 Xerox Corporation High voltage MOSFET with overlapping electrode structure

Also Published As

Publication number Publication date
DE69417189D1 (de) 1999-04-22
EP0660415B1 (de) 1999-03-17
US5382826A (en) 1995-01-17
EP0660415A1 (de) 1995-06-28
JPH07202004A (ja) 1995-08-04

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee