DE69416288D1 - Elektrostatische Halteplatte mit Isolator aus Oxiden - Google Patents
Elektrostatische Halteplatte mit Isolator aus OxidenInfo
- Publication number
- DE69416288D1 DE69416288D1 DE69416288T DE69416288T DE69416288D1 DE 69416288 D1 DE69416288 D1 DE 69416288D1 DE 69416288 T DE69416288 T DE 69416288T DE 69416288 T DE69416288 T DE 69416288T DE 69416288 D1 DE69416288 D1 DE 69416288D1
- Authority
- DE
- Germany
- Prior art keywords
- holding plate
- oxide insulator
- electrostatic holding
- electrostatic
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/169,911 US5535507A (en) | 1993-12-20 | 1993-12-20 | Method of making electrostatic chuck with oxide insulator |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69416288D1 true DE69416288D1 (de) | 1999-03-11 |
DE69416288T2 DE69416288T2 (de) | 1999-08-19 |
Family
ID=22617724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69416288T Expired - Lifetime DE69416288T2 (de) | 1993-12-20 | 1994-11-08 | Elektrostatische Halteplatte mit Isolator aus Oxiden |
Country Status (4)
Country | Link |
---|---|
US (1) | US5535507A (de) |
EP (1) | EP0660378B1 (de) |
JP (1) | JP2614422B2 (de) |
DE (1) | DE69416288T2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5467249A (en) * | 1993-12-20 | 1995-11-14 | International Business Machines Corporation | Electrostatic chuck with reference electrode |
US5463525A (en) * | 1993-12-20 | 1995-10-31 | International Business Machines Corporation | Guard ring electrostatic chuck |
US5592358A (en) * | 1994-07-18 | 1997-01-07 | Applied Materials, Inc. | Electrostatic chuck for magnetic flux processing |
EP0764979A3 (de) * | 1995-09-20 | 1998-07-15 | Hitachi, Ltd. | Elektrostatische Anziehungselektrode und Herstellungsverfahren dafür |
US5835333A (en) * | 1995-10-30 | 1998-11-10 | Lam Research Corporation | Negative offset bipolar electrostatic chucks |
US5812361A (en) * | 1996-03-29 | 1998-09-22 | Lam Research Corporation | Dynamic feedback electrostatic wafer chuck |
US5761023A (en) * | 1996-04-25 | 1998-06-02 | Applied Materials, Inc. | Substrate support with pressure zones having reduced contact area and temperature feedback |
US5793192A (en) * | 1996-06-28 | 1998-08-11 | Lam Research Corporation | Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system |
US5740009A (en) * | 1996-11-29 | 1998-04-14 | Applied Materials, Inc. | Apparatus for improving wafer and chuck edge protection |
US5904779A (en) * | 1996-12-19 | 1999-05-18 | Lam Research Corporation | Wafer electrical discharge control by wafer lifter system |
US5835335A (en) * | 1997-03-26 | 1998-11-10 | Lam Research Corporation | Unbalanced bipolar electrostatic chuck power supplies and methods thereof |
US5880923A (en) * | 1997-06-09 | 1999-03-09 | Applied Materials Inc. | Method and apparatus for improved retention of a semiconductor wafer within a semiconductor wafer processing system |
JP4130255B2 (ja) * | 1998-04-08 | 2008-08-06 | キヤノンアネルバ株式会社 | プラズマ処理装置 |
US5905626A (en) * | 1998-04-12 | 1999-05-18 | Dorsey Gage, Inc. | Electrostatic chuck with ceramic pole protection |
US6639783B1 (en) * | 1998-09-08 | 2003-10-28 | Applied Materials, Inc. | Multi-layer ceramic electrostatic chuck with integrated channel |
US6228278B1 (en) | 1998-09-30 | 2001-05-08 | Lam Research Corporation | Methods and apparatus for determining an etch endpoint in a plasma processing system |
WO2000041229A1 (fr) * | 1998-12-28 | 2000-07-13 | Tokyo Electron Limited | Appareil a plasma et electrode inferieure associee |
US6362946B1 (en) * | 1999-11-02 | 2002-03-26 | Varian Semiconductor Equipment Associates, Inc. | Electrostatic wafer clamp having electrostatic seal for retaining gas |
US6538873B1 (en) | 1999-11-02 | 2003-03-25 | Varian Semiconductor Equipment Associates, Inc. | Active electrostatic seal and electrostatic vacuum pump |
KR100502268B1 (ko) * | 2000-03-01 | 2005-07-22 | 가부시끼가이샤 히다치 세이사꾸쇼 | 플라즈마처리장치 및 방법 |
US6583980B1 (en) * | 2000-08-18 | 2003-06-24 | Applied Materials Inc. | Substrate support tolerant to thermal expansion stresses |
TW478026B (en) | 2000-08-25 | 2002-03-01 | Hitachi Ltd | Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield |
US6554954B2 (en) * | 2001-04-03 | 2003-04-29 | Applied Materials Inc. | Conductive collar surrounding semiconductor workpiece in plasma chamber |
US6986865B2 (en) * | 2002-07-10 | 2006-01-17 | Watlow Electric Manufacturing Company | Method for manufacturing an electrostatic chuck |
US20040079289A1 (en) * | 2002-10-23 | 2004-04-29 | Kellerman Peter L. | Electrostatic chuck wafer port and top plate with edge shielding and gas scavenging |
CN100390955C (zh) * | 2003-03-19 | 2008-05-28 | 东京毅力科创株式会社 | 使用静电卡盘的基板保持机构及其制造方法 |
EP1635388A4 (de) * | 2003-06-17 | 2009-10-21 | Creative Tech Corp | Dipolare elektrostatische einspannvorrichtung |
WO2005004229A1 (ja) * | 2003-07-08 | 2005-01-13 | Future Vision Inc. | 基板ステージ用静電チャック及びそれに用いる電極ならびにそれらを備えた処理システム |
JP4514587B2 (ja) * | 2004-11-29 | 2010-07-28 | 京セラ株式会社 | 基板保持部材 |
WO2007066572A1 (ja) * | 2005-12-06 | 2007-06-14 | Creative Technology Corporation | 静電チャック用電極シート及び静電チャック |
WO2009014846A1 (en) * | 2007-07-20 | 2009-01-29 | Applied Materials, Inc. | Rf choke for gas delivery to an rf driven electrode in a plasma processing apparatus |
US8336891B2 (en) * | 2008-03-11 | 2012-12-25 | Ngk Insulators, Ltd. | Electrostatic chuck |
JP5609663B2 (ja) * | 2011-01-18 | 2014-10-22 | 旭硝子株式会社 | ガラス基板保持手段、およびそれを用いたeuvマスクブランクスの製造方法 |
US9472444B2 (en) | 2012-08-23 | 2016-10-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer support device |
US10727092B2 (en) * | 2012-10-17 | 2020-07-28 | Applied Materials, Inc. | Heated substrate support ring |
US20140265165A1 (en) * | 2013-03-14 | 2014-09-18 | International Business Machines Corporation | Wafer-to-wafer fusion bonding chuck |
KR102155512B1 (ko) * | 2017-05-22 | 2020-09-14 | (주)코미코 | 반도체 제조용 정전척의 아킹 현상 개선방법 |
CN108321103A (zh) * | 2018-03-12 | 2018-07-24 | 中国电子科技集团公司第十三研究所 | 晶圆夹具及电感耦合等离子刻蚀系统 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3993123A (en) * | 1975-10-28 | 1976-11-23 | International Business Machines Corporation | Gas encapsulated cooling module |
DD143131A1 (de) * | 1979-04-26 | 1980-07-30 | Ute Bergner | Vorrichtung zum elektrostatischen halten von werkstuecken,insbesondere halbleiterscheiben |
JP2680338B2 (ja) * | 1988-03-31 | 1997-11-19 | 株式会社東芝 | 静電チャック装置 |
FR2661039B1 (fr) * | 1990-04-12 | 1997-04-30 | Commissariat Energie Atomique | Porte-substrat electrostatique. |
US5055964A (en) * | 1990-09-07 | 1991-10-08 | International Business Machines Corporation | Electrostatic chuck having tapered electrodes |
US5213349A (en) * | 1991-12-18 | 1993-05-25 | Elliott Joe C | Electrostatic chuck |
US5350479A (en) * | 1992-12-02 | 1994-09-27 | Applied Materials, Inc. | Electrostatic chuck for high power plasma processing |
US5384682A (en) * | 1993-03-22 | 1995-01-24 | Toto Ltd. | Electrostatic chuck |
-
1993
- 1993-12-20 US US08/169,911 patent/US5535507A/en not_active Expired - Lifetime
-
1994
- 1994-10-31 JP JP26648694A patent/JP2614422B2/ja not_active Expired - Fee Related
- 1994-11-08 DE DE69416288T patent/DE69416288T2/de not_active Expired - Lifetime
- 1994-11-08 EP EP94480121A patent/EP0660378B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69416288T2 (de) | 1999-08-19 |
EP0660378A1 (de) | 1995-06-28 |
US5535507A (en) | 1996-07-16 |
EP0660378B1 (de) | 1999-01-27 |
JPH07201962A (ja) | 1995-08-04 |
JP2614422B2 (ja) | 1997-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: DOREEY GAGE CO.INC., POUGHKEEPSIE, N.Y., US |
|
8328 | Change in the person/name/address of the agent |
Free format text: SCHWAN SCHWAN SCHORER, 81739 MUENCHEN |