DE69410918T2 - Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur - Google Patents
Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser StrukturInfo
- Publication number
- DE69410918T2 DE69410918T2 DE69410918T DE69410918T DE69410918T2 DE 69410918 T2 DE69410918 T2 DE 69410918T2 DE 69410918 T DE69410918 T DE 69410918T DE 69410918 T DE69410918 T DE 69410918T DE 69410918 T2 DE69410918 T2 DE 69410918T2
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- thin film
- manufacturing process
- film element
- process therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/486—Fine ceramics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
- C04B2237/348—Zirconia, hafnia, zirconates or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25729793 | 1993-10-14 | ||
JP14832094A JP3280799B2 (ja) | 1993-10-14 | 1994-06-29 | 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電/電歪膜型素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69410918D1 DE69410918D1 (de) | 1998-07-16 |
DE69410918T2 true DE69410918T2 (de) | 1998-12-17 |
Family
ID=26478558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69410918T Expired - Lifetime DE69410918T2 (de) | 1993-10-14 | 1994-10-13 | Zirconiummembranstruktur, Herstellungsverfahren hierfür, und Piezoelektrisch/Elektrostriktives Dünnfilmelement mit dieser Struktur |
Country Status (4)
Country | Link |
---|---|
US (2) | US5517076A (de) |
EP (1) | EP0649008B1 (de) |
JP (1) | JP3280799B2 (de) |
DE (1) | DE69410918T2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6004644A (en) * | 1994-07-26 | 1999-12-21 | Ngk Insulators, Ltd. | Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure |
JP3280799B2 (ja) * | 1993-10-14 | 2002-05-13 | 日本碍子株式会社 | 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電/電歪膜型素子 |
US5634999A (en) * | 1994-09-06 | 1997-06-03 | Ngk Insulators, Ltd. | Method of producing ceramic diaphragm structure having convex diaphragm portion |
EP0857702B1 (de) * | 1994-11-09 | 2000-08-23 | Ngk Insulators, Ltd. | Verfahren zur Herstellung eines keramischen Substrates |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3439570B2 (ja) * | 1995-05-08 | 2003-08-25 | 日本碍子株式会社 | ダイヤフラム構造体 |
US5728244A (en) * | 1995-05-26 | 1998-03-17 | Ngk Insulators, Ltd. | Process for production of ceramic member having fine throughholes |
JP3320947B2 (ja) * | 1995-05-26 | 2002-09-03 | 日本碍子株式会社 | 微細貫通孔を有するセラミック部材 |
US5696423A (en) * | 1995-06-29 | 1997-12-09 | Motorola, Inc. | Temperature compenated resonator and method |
JP3320596B2 (ja) * | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3429126B2 (ja) * | 1996-01-09 | 2003-07-22 | 日本碍子株式会社 | 微細貫通孔を有するセラミック部材の製造方法 |
JP3267151B2 (ja) * | 1996-04-12 | 2002-03-18 | ミノルタ株式会社 | 圧電振動部材およびその製造方法 |
EP0813254B1 (de) * | 1996-06-14 | 2001-10-17 | Ngk Insulators, Ltd. | Verfahren zur Herstellung einer keramischen Membranstruktur |
US5895702A (en) * | 1996-07-16 | 1999-04-20 | Ngk Insulators, Ltd. | Ceramic member |
US5958165A (en) * | 1996-07-19 | 1999-09-28 | Ngk Insulators, Ltd. | Method of manufacturing ceramic member |
US6072269A (en) * | 1996-07-23 | 2000-06-06 | Ngk Insulators, Ltd. | Ceramic member with an electrode and a plurality of tapered through holes for controlling the ejection of particles by switching the sign of a charge on the electrode |
JP3904240B2 (ja) * | 1996-11-29 | 2007-04-11 | 日本碍子株式会社 | セラミック素子 |
JP3592023B2 (ja) * | 1997-03-04 | 2004-11-24 | 日本碍子株式会社 | 機能性膜素子の製造方法 |
WO1998041822A1 (en) * | 1997-03-20 | 1998-09-24 | Crotzer David R | Dust sensor apparatus |
US6247371B1 (en) * | 1997-04-04 | 2001-06-19 | Ngk Insulators, Ltd. | Three-axis sensor |
DE59804701D1 (de) | 1997-12-23 | 2002-08-08 | Unaxis Balzers Ag | Membrane für eine kapazitive vakuummesszelle |
EP1070239B1 (de) | 1997-12-23 | 2002-04-24 | Unaxis Balzers Aktiengesellschaft | Kapazitive vakuummesszelle |
DE19859914A1 (de) * | 1998-07-22 | 2000-02-03 | Samsung Electro Mech | Verfahren zum Herstellen eines Aktuators für einen Tintenstrahldruckkopf |
US6592696B1 (en) | 1998-10-09 | 2003-07-15 | Motorola, Inc. | Method for fabricating a multilayered structure and the structures formed by the method |
US6572830B1 (en) * | 1998-10-09 | 2003-06-03 | Motorola, Inc. | Integrated multilayered microfludic devices and methods for making the same |
EP1314472A1 (de) * | 1998-10-09 | 2003-05-28 | Motorola, Inc. | Integrierte Vielschichtmikrofluidbauteile und Verfahren zu ihrer Herstellung |
JP3965515B2 (ja) * | 1999-10-01 | 2007-08-29 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
US6249075B1 (en) | 1999-11-18 | 2001-06-19 | Lucent Technologies Inc. | Surface micro-machined acoustic transducers |
US6424237B1 (en) * | 2000-12-21 | 2002-07-23 | Agilent Technologies, Inc. | Bulk acoustic resonator perimeter reflection system |
DE10240671A1 (de) * | 2002-09-04 | 2004-03-18 | Christian Bauer Gmbh + Co | Klopfsensor eines Verbrennungsmotors |
JP2004301321A (ja) * | 2003-03-14 | 2004-10-28 | Ntn Corp | オルタネータ用軸受およびプーリ用軸受 |
US7141915B2 (en) * | 2003-07-22 | 2006-11-28 | Ngk Insulators, Ltd. | Actuator device |
WO2005008798A1 (ja) * | 2003-07-22 | 2005-01-27 | Ngk Insulators, Ltd. | アクチュエータ素子 |
DE102004005954A1 (de) * | 2004-02-02 | 2005-08-18 | E.G.O. Elektro-Gerätebau GmbH | Bedieneinrichtung für ein Elektrogerät mit einem Bedien-Feld und einem Sensorelement darunter sowie Verfahren zum Betrieb der Bedieneinrichtung |
KR100747459B1 (ko) * | 2005-10-21 | 2007-08-09 | 엘지전자 주식회사 | 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기 |
US8850893B2 (en) * | 2007-12-05 | 2014-10-07 | Valtion Teknillinen Tutkimuskeskus | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
DE102008046336A1 (de) * | 2008-09-09 | 2010-03-11 | Osram Gesellschaft mit beschränkter Haftung | LTCC-Schichtstapel |
CN114249603A (zh) * | 2021-11-10 | 2022-03-29 | 湖南大学 | 一种氧化铝隔膜及其制备方法和应用 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4525464A (en) * | 1984-06-12 | 1985-06-25 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften | Ceramic body of zirconium dioxide (ZrO2) and method for its preparation |
GB2161647A (en) * | 1984-07-10 | 1986-01-15 | Gen Electric Co Plc | Piezoelectric devices |
US4656455A (en) * | 1984-07-20 | 1987-04-07 | Toyama Prefecture | Humidity-sensing element |
JPH065217B2 (ja) * | 1985-03-07 | 1994-01-19 | 日産自動車株式会社 | 空燃比制御装置 |
DE3702838A1 (de) * | 1986-02-01 | 1987-08-13 | Fuji Electric Co Ltd | Sauerstoffsensor und verfahren zu seiner herstellung |
JPS62213399A (ja) * | 1986-03-12 | 1987-09-19 | Omron Tateisi Electronics Co | 圧電磁器 |
JPH0731091B2 (ja) * | 1987-05-27 | 1995-04-10 | 日本碍子株式会社 | 歪検出器 |
US5089455A (en) * | 1989-08-11 | 1992-02-18 | Corning Incorporated | Thin flexible sintered structures |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
DE69223096T2 (de) * | 1991-07-18 | 1998-05-28 | Ngk Insulators Ltd | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3106026B2 (ja) * | 1993-02-23 | 2000-11-06 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5526112A (en) * | 1993-03-05 | 1996-06-11 | Sahagen; Armen N. | Probe for monitoring a fluid medium |
DE69413619T2 (de) * | 1993-07-27 | 1999-04-01 | Ngk Insulators Ltd | Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid |
JP3280799B2 (ja) * | 1993-10-14 | 2002-05-13 | 日本碍子株式会社 | 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電/電歪膜型素子 |
-
1994
- 1994-06-29 JP JP14832094A patent/JP3280799B2/ja not_active Expired - Lifetime
- 1994-10-12 US US08/321,912 patent/US5517076A/en not_active Expired - Lifetime
- 1994-10-13 DE DE69410918T patent/DE69410918T2/de not_active Expired - Lifetime
- 1994-10-13 EP EP94307514A patent/EP0649008B1/de not_active Expired - Lifetime
-
1995
- 1995-09-06 US US08/524,042 patent/US5733670A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0649008B1 (de) | 1998-06-10 |
EP0649008A2 (de) | 1995-04-19 |
US5733670A (en) | 1998-03-31 |
US5517076A (en) | 1996-05-14 |
EP0649008A3 (de) | 1995-10-18 |
DE69410918D1 (de) | 1998-07-16 |
JPH07162048A (ja) | 1995-06-23 |
JP3280799B2 (ja) | 2002-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |