DE69410830D1 - Induktiv-gekoppelte plasma-zerstaübungskammer mit fähigkeiten zur zerstaübung von leitendem material - Google Patents

Induktiv-gekoppelte plasma-zerstaübungskammer mit fähigkeiten zur zerstaübung von leitendem material

Info

Publication number
DE69410830D1
DE69410830D1 DE69410830T DE69410830T DE69410830D1 DE 69410830 D1 DE69410830 D1 DE 69410830D1 DE 69410830 T DE69410830 T DE 69410830T DE 69410830 T DE69410830 T DE 69410830T DE 69410830 D1 DE69410830 D1 DE 69410830D1
Authority
DE
Germany
Prior art keywords
inductive
ability
conductive material
coupled plasma
plasma spraying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69410830T
Other languages
English (en)
Other versions
DE69410830T2 (de
Inventor
Robert Bayer
Alexander D Lantsman
James Seirmarco
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of DE69410830D1 publication Critical patent/DE69410830D1/de
Application granted granted Critical
Publication of DE69410830T2 publication Critical patent/DE69410830T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0209—Avoiding or diminishing effects of eddy currents

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
DE69410830T 1994-10-25 1994-11-28 Induktiv-gekoppelte plasma-zerstaübungskammer mit fähigkeiten zur zerstaübung von leitendem material Expired - Lifetime DE69410830T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/326,743 US5569363A (en) 1994-10-25 1994-10-25 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities
PCT/US1994/013758 WO1996013051A1 (en) 1994-10-25 1994-11-28 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities

Publications (2)

Publication Number Publication Date
DE69410830D1 true DE69410830D1 (de) 1998-07-09
DE69410830T2 DE69410830T2 (de) 1998-10-01

Family

ID=23273518

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69410830T Expired - Lifetime DE69410830T2 (de) 1994-10-25 1994-11-28 Induktiv-gekoppelte plasma-zerstaübungskammer mit fähigkeiten zur zerstaübung von leitendem material

Country Status (9)

Country Link
US (1) US5569363A (de)
EP (1) EP0788654B1 (de)
JP (1) JP3513542B2 (de)
KR (1) KR100349426B1 (de)
AU (1) AU1332895A (de)
CA (1) CA2202530A1 (de)
DE (1) DE69410830T2 (de)
TW (1) TW277203B (de)
WO (1) WO1996013051A1 (de)

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US7320734B2 (en) 2000-08-11 2008-01-22 Applied Materials, Inc. Plasma immersion ion implantation system including a plasma source having low dissociation and low minimum plasma voltage
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US7479456B2 (en) 2004-08-26 2009-01-20 Applied Materials, Inc. Gasless high voltage high contact force wafer contact-cooling electrostatic chuck
US6551446B1 (en) 2000-08-11 2003-04-22 Applied Materials Inc. Externally excited torroidal plasma source with a gas distribution plate
US6453842B1 (en) * 2000-08-11 2002-09-24 Applied Materials Inc. Externally excited torroidal plasma source using a gas distribution plate
US7430984B2 (en) * 2000-08-11 2008-10-07 Applied Materials, Inc. Method to drive spatially separate resonant structure with spatially distinct plasma secondaries using a single generator and switching elements
US6494986B1 (en) * 2000-08-11 2002-12-17 Applied Materials, Inc. Externally excited multiple torroidal plasma source
US7183177B2 (en) 2000-08-11 2007-02-27 Applied Materials, Inc. Silicon-on-insulator wafer transfer method using surface activation plasma immersion ion implantation for wafer-to-wafer adhesion enhancement
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US7137354B2 (en) 2000-08-11 2006-11-21 Applied Materials, Inc. Plasma immersion ion implantation apparatus including a plasma source having low dissociation and low minimum plasma voltage
US6730605B2 (en) 2001-04-12 2004-05-04 Tokyo Electron Limited Redistribution of copper deposited films
KR100481313B1 (ko) * 2001-11-09 2005-04-07 최대규 유도결합 플라즈마 반응기
US6984574B2 (en) 2002-01-23 2006-01-10 Mosel Vitelic, Inc. Cobalt silicide fabrication using protective titanium
US7183716B2 (en) * 2003-02-04 2007-02-27 Veeco Instruments, Inc. Charged particle source and operation thereof
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US7244474B2 (en) 2004-03-26 2007-07-17 Applied Materials, Inc. Chemical vapor deposition plasma process using an ion shower grid
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US7358192B2 (en) 2004-04-08 2008-04-15 Applied Materials, Inc. Method and apparatus for in-situ film stack processing
US7767561B2 (en) 2004-07-20 2010-08-03 Applied Materials, Inc. Plasma immersion ion implantation reactor having an ion shower grid
US8058156B2 (en) 2004-07-20 2011-11-15 Applied Materials, Inc. Plasma immersion ion implantation reactor having multiple ion shower grids
US7666464B2 (en) 2004-10-23 2010-02-23 Applied Materials, Inc. RF measurement feedback control and diagnostics for a plasma immersion ion implantation reactor
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US7422775B2 (en) 2005-05-17 2008-09-09 Applied Materials, Inc. Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing
US7312162B2 (en) 2005-05-17 2007-12-25 Applied Materials, Inc. Low temperature plasma deposition process for carbon layer deposition
US7109098B1 (en) 2005-05-17 2006-09-19 Applied Materials, Inc. Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing
US7335611B2 (en) 2005-08-08 2008-02-26 Applied Materials, Inc. Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer
US7312148B2 (en) 2005-08-08 2007-12-25 Applied Materials, Inc. Copper barrier reflow process employing high speed optical annealing
US7429532B2 (en) 2005-08-08 2008-09-30 Applied Materials, Inc. Semiconductor substrate process using an optically writable carbon-containing mask
US7323401B2 (en) 2005-08-08 2008-01-29 Applied Materials, Inc. Semiconductor substrate process using a low temperature deposited carbon-containing hard mask
US20070068795A1 (en) * 2005-09-26 2007-03-29 Jozef Brcka Hollow body plasma uniformity adjustment device and method
US7679024B2 (en) * 2005-12-23 2010-03-16 Lam Research Corporation Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber
US7554053B2 (en) * 2005-12-23 2009-06-30 Lam Research Corporation Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
US7562638B2 (en) * 2005-12-23 2009-07-21 Lam Research Corporation Methods and arrangement for implementing highly efficient plasma traps
KR101287898B1 (ko) * 2009-08-25 2013-07-19 캐논 아네르바 가부시키가이샤 플라즈마 처리 장치 및 디바이스의 제조 방법
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Also Published As

Publication number Publication date
KR100349426B1 (ko) 2003-01-06
EP0788654A1 (de) 1997-08-13
JP3513542B2 (ja) 2004-03-31
CA2202530A1 (en) 1996-05-02
WO1996013051A1 (en) 1996-05-02
JPH10507875A (ja) 1998-07-28
EP0788654B1 (de) 1998-06-03
US5569363A (en) 1996-10-29
DE69410830T2 (de) 1998-10-01
AU1332895A (en) 1996-05-15
TW277203B (de) 1996-06-01

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