DE69410553D1 - Vorrichtung und Verfahren zur Belichtung eines lichtempfindlichen Substrats - Google Patents

Vorrichtung und Verfahren zur Belichtung eines lichtempfindlichen Substrats

Info

Publication number
DE69410553D1
DE69410553D1 DE69410553T DE69410553T DE69410553D1 DE 69410553 D1 DE69410553 D1 DE 69410553D1 DE 69410553 T DE69410553 T DE 69410553T DE 69410553 T DE69410553 T DE 69410553T DE 69410553 D1 DE69410553 D1 DE 69410553D1
Authority
DE
Germany
Prior art keywords
exposing
photosensitive substrate
photosensitive
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69410553T
Other languages
English (en)
Other versions
DE69410553T2 (de
Inventor
Rudolf Dr Zertani
Rafail Bronstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agfa Gevaert AG
Original Assignee
Agfa Gevaert AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agfa Gevaert AG filed Critical Agfa Gevaert AG
Application granted granted Critical
Publication of DE69410553D1 publication Critical patent/DE69410553D1/de
Publication of DE69410553T2 publication Critical patent/DE69410553T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G03F7/2055—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser for the production of printing plates; Exposure of liquid photohardening compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69410553T 1993-08-08 1994-08-01 Vorrichtung und Verfahren zur Belichtung eines lichtempfindlichen Substrats Expired - Fee Related DE69410553T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL106619A IL106619A0 (en) 1993-08-08 1993-08-08 Apparatus and method for exposing a photosensitive substrate

Publications (2)

Publication Number Publication Date
DE69410553D1 true DE69410553D1 (de) 1998-07-02
DE69410553T2 DE69410553T2 (de) 1998-09-17

Family

ID=11065132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69410553T Expired - Fee Related DE69410553T2 (de) 1993-08-08 1994-08-01 Vorrichtung und Verfahren zur Belichtung eines lichtempfindlichen Substrats

Country Status (3)

Country Link
EP (1) EP0639799B1 (de)
DE (1) DE69410553T2 (de)
IL (1) IL106619A0 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9507140D0 (en) * 1995-04-06 1995-05-31 Icg Ltd Platesetter
DE19923679C1 (de) * 1999-05-22 2001-03-08 Krause Biagosch Gmbh Belichtungsvorrichtung
US6262825B1 (en) * 1999-08-24 2001-07-17 Napp Systems, Inc. Apparatus and method for the enhanced imagewise exposure of a photosensitive material
US7632625B2 (en) * 2004-05-25 2009-12-15 Roberts David H Method of pre-exposing relief image printing plate
JP5080009B2 (ja) 2005-03-22 2012-11-21 日立ビアメカニクス株式会社 露光方法
JP4410134B2 (ja) * 2005-03-24 2010-02-03 日立ビアメカニクス株式会社 パターン露光方法及び装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU544060B2 (en) * 1980-07-28 1985-05-16 Polychrome Corp. Accelerated diazo sensitised
DE4013358A1 (de) * 1990-04-26 1991-10-31 Hoechst Ag Verfahren zur herstellung von druckformen oder photoresists durch bildmaessiges bestrahlen eines photopolymerisierbaren aufzeichnungsmaterials
JP2705312B2 (ja) * 1990-12-06 1998-01-28 ソニー株式会社 投影露光方法
DE9210460U1 (de) * 1992-08-05 1992-09-24 Hoechst Ag, 65929 Frankfurt Laserbelichtungsgerät für bildmäßig zu belichtende Druckformen
FR2697646B1 (fr) * 1992-11-03 1995-01-13 Digipress Sa Procédé pour la préparation de compositions photosensibles à base de résines polymérisables et dispositif pour l'exécution de ce procédé.

Also Published As

Publication number Publication date
DE69410553T2 (de) 1998-09-17
EP0639799B1 (de) 1998-05-27
IL106619A0 (en) 1993-12-08
EP0639799A1 (de) 1995-02-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee