DE69333837D1 - Verfahren zur Hybridisierung und Positionierung eines optoelektrischen Bauelements hinsichtlich eines integrierten Lichtwellenleiters - Google Patents
Verfahren zur Hybridisierung und Positionierung eines optoelektrischen Bauelements hinsichtlich eines integrierten LichtwellenleitersInfo
- Publication number
- DE69333837D1 DE69333837D1 DE69333837T DE69333837T DE69333837D1 DE 69333837 D1 DE69333837 D1 DE 69333837D1 DE 69333837 T DE69333837 T DE 69333837T DE 69333837 T DE69333837 T DE 69333837T DE 69333837 D1 DE69333837 D1 DE 69333837D1
- Authority
- DE
- Germany
- Prior art keywords
- hybridizing
- regard
- positioning
- optical waveguide
- integrated optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/424—Mounting of the optical light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4256—Details of housings
- G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/1012—Auxiliary members for bump connectors, e.g. spacers
- H01L2224/10152—Auxiliary members for bump connectors, e.g. spacers being formed on an item to be connected not being a semiconductor or solid-state body
- H01L2224/10165—Alignment aids
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81136—Aligning involving guiding structures, e.g. spacers or supporting members
- H01L2224/81138—Aligning involving guiding structures, e.g. spacers or supporting members the guiding structures being at least partially left in the finished device
- H01L2224/81139—Guiding structures on the body
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81136—Aligning involving guiding structures, e.g. spacers or supporting members
- H01L2224/81138—Aligning involving guiding structures, e.g. spacers or supporting members the guiding structures being at least partially left in the finished device
- H01L2224/8114—Guiding structures outside the body
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- H—ELECTRICITY
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8119—Arrangement of the bump connectors prior to mounting
- H01L2224/81191—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed only on the semiconductor or solid-state body
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
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- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9210040A FR2694841B1 (fr) | 1992-08-14 | 1992-08-14 | Procédé d'hybridation et de positionnement d'un composant opto-électronique et application de ce procédé au positionnement de ce composant par rapport à un guide optique intégré. |
FR9210040 | 1992-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69333837D1 true DE69333837D1 (de) | 2005-08-04 |
DE69333837T2 DE69333837T2 (de) | 2006-05-04 |
Family
ID=9432865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69333837T Expired - Lifetime DE69333837T2 (de) | 1992-08-14 | 1993-08-11 | Verfahren zur Hybridisierung und Positionierung eines optoelektrischen Bauelements hinsichtlich eines integrierten Lichtwellenleiters |
Country Status (4)
Country | Link |
---|---|
US (1) | US5321786A (de) |
EP (1) | EP0588675B1 (de) |
DE (1) | DE69333837T2 (de) |
FR (1) | FR2694841B1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774343A (ja) * | 1993-08-31 | 1995-03-17 | Fujitsu Ltd | 集積化光装置及びその製造方法 |
JP3302458B2 (ja) * | 1993-08-31 | 2002-07-15 | 富士通株式会社 | 集積化光装置及び製造方法 |
DE4423112A1 (de) * | 1994-07-01 | 1996-01-04 | Bosch Gmbh Robert | Verfahren zum Herstellen und Justieren eines Halbleiterbauelements |
JPH0990173A (ja) * | 1995-09-27 | 1997-04-04 | Furukawa Electric Co Ltd:The | 表面実装モジュールとその製造方法 |
FR2748853A1 (fr) * | 1996-05-20 | 1997-11-21 | Commissariat Energie Atomique | Systeme de composants a hybrider et procede d'hybridation autorisant un defaut de planeite des composants |
FR2749672B1 (fr) * | 1996-06-06 | 1998-07-03 | Commissariat Energie Atomique | Positionnement vertical d'un composant optoelectronique sur un support, en regard d'un guide optique integre a ce support |
JP3792358B2 (ja) * | 1997-07-30 | 2006-07-05 | 京セラ株式会社 | 光接続部品及びその製造方法 |
EP1122567A1 (de) | 2000-02-02 | 2001-08-08 | Corning Incorporated | Passive Ausrichtung unter Verwendung von geneigter Sockelwand |
US6614966B2 (en) * | 2000-03-22 | 2003-09-02 | Matsushita Electric Industrial Co., Ltd. | Optical waveguide device integrated module and method of manufacturing the same |
GB2381082A (en) * | 2001-10-17 | 2003-04-23 | Marconi Caswell Ltd | Optical waveguide with alignment feature in core layer |
WO2005004295A2 (en) * | 2003-06-27 | 2005-01-13 | Applied Materials, Inc. | Pulsed quantum dot laser system with low jitter |
US20060222024A1 (en) * | 2005-03-15 | 2006-10-05 | Gray Allen L | Mode-locked semiconductor lasers with quantum-confined active region |
US20060227825A1 (en) * | 2005-04-07 | 2006-10-12 | Nl-Nanosemiconductor Gmbh | Mode-locked quantum dot laser with controllable gain properties by multiple stacking |
GB0511300D0 (en) * | 2005-06-03 | 2005-07-13 | Ct For Integrated Photonics Th | Control of vertical axis for passive alignment of optical components with wave guides |
US8411711B2 (en) * | 2005-12-07 | 2013-04-02 | Innolume Gmbh | Semiconductor laser with low relative intensity noise of individual longitudinal modes and optical transmission system incorporating the laser |
US7561607B2 (en) * | 2005-12-07 | 2009-07-14 | Innolume Gmbh | Laser source with broadband spectrum emission |
US7835408B2 (en) * | 2005-12-07 | 2010-11-16 | Innolume Gmbh | Optical transmission system |
JP2009518833A (ja) * | 2005-12-07 | 2009-05-07 | インノルメ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 広帯域スペクトル発光を有するレーザ光源 |
US20090317033A1 (en) * | 2008-06-20 | 2009-12-24 | Industrial Technology Research Institute | Integrated circuit and photonic board thereof |
US11181688B2 (en) | 2009-10-13 | 2021-11-23 | Skorpios Technologies, Inc. | Integration of an unprocessed, direct-bandgap chip into a silicon photonic device |
US9882073B2 (en) * | 2013-10-09 | 2018-01-30 | Skorpios Technologies, Inc. | Structures for bonding a direct-bandgap chip to a silicon photonic device |
FR2994331B1 (fr) | 2012-07-31 | 2014-09-12 | Commissariat Energie Atomique | Procede d'assemblage de deux composants electroniques entre eux, de type flip-chip |
US9217836B2 (en) * | 2012-10-23 | 2015-12-22 | Kotura, Inc. | Edge coupling of optical devices |
US9608403B2 (en) | 2014-11-03 | 2017-03-28 | International Business Machines Corporation | Dual bond pad structure for photonics |
US20160291269A1 (en) | 2015-04-01 | 2016-10-06 | Coriant Advanced Technology, LLC | Photonic integrated circuit chip packaging |
CN113555449B (zh) * | 2020-04-03 | 2024-03-15 | 华为技术有限公司 | 半导体器件及其制备方法和通信设备 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54142988A (en) * | 1978-04-28 | 1979-11-07 | Hitachi Ltd | Photo semiconductor device |
JPS60188913A (ja) * | 1984-03-08 | 1985-09-26 | Matsushita Electric Ind Co Ltd | 光回路デバイス |
JP2539406B2 (ja) * | 1987-02-04 | 1996-10-02 | 株式会社日立製作所 | 固体光ピツクアツプ |
FR2646558B1 (fr) * | 1989-04-26 | 1994-04-01 | Commissariat A Energie Atomique | Procede et machine d'interconnexion de composants electriques par elements de soudure |
US5023881A (en) * | 1990-06-19 | 1991-06-11 | At&T Bell Laboratories | Photonics module and alignment method |
US5230030A (en) * | 1992-04-24 | 1993-07-20 | Motorola, Inc. | Interface coupling electronic circuitry |
-
1992
- 1992-08-14 FR FR9210040A patent/FR2694841B1/fr not_active Expired - Fee Related
-
1993
- 1993-08-11 EP EP93402042A patent/EP0588675B1/de not_active Expired - Lifetime
- 1993-08-11 DE DE69333837T patent/DE69333837T2/de not_active Expired - Lifetime
- 1993-08-16 US US08/106,547 patent/US5321786A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0588675B1 (de) | 2005-06-29 |
FR2694841A1 (fr) | 1994-02-18 |
DE69333837T2 (de) | 2006-05-04 |
EP0588675A1 (de) | 1994-03-23 |
US5321786A (en) | 1994-06-14 |
FR2694841B1 (fr) | 1994-09-09 |
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