DE69322778D1 - Vakuumplatte - Google Patents

Vakuumplatte

Info

Publication number
DE69322778D1
DE69322778D1 DE69322778T DE69322778T DE69322778D1 DE 69322778 D1 DE69322778 D1 DE 69322778D1 DE 69322778 T DE69322778 T DE 69322778T DE 69322778 T DE69322778 T DE 69322778T DE 69322778 D1 DE69322778 D1 DE 69322778D1
Authority
DE
Germany
Prior art keywords
support plate
vacuum
pct
modules
lip seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322778T
Other languages
English (en)
Other versions
DE69322778T2 (de
Inventor
David Gibbs Close Davies
Laurence Petrie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HORST WITTE GERAETEBAU BARSKAMP E.K., 21354 BLECKED
Original Assignee
CARNE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB929209716A external-priority patent/GB9209716D0/en
Application filed by CARNE filed Critical CARNE
Application granted granted Critical
Publication of DE69322778D1 publication Critical patent/DE69322778D1/de
Publication of DE69322778T2 publication Critical patent/DE69322778T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Jigs For Machine Tools (AREA)
  • Manipulator (AREA)
DE69322778T 1992-05-06 1993-04-29 Vakuumplatte Expired - Fee Related DE69322778T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB929209716A GB9209716D0 (en) 1992-05-06 1992-05-06 Vacuum plates
IL10404092A IL104040A (en) 1992-05-06 1992-12-09 Vacuum plates and a vacuum plate system
PCT/GB1993/000902 WO1993022104A1 (en) 1992-05-06 1993-04-29 Vacuum plates

Publications (2)

Publication Number Publication Date
DE69322778D1 true DE69322778D1 (de) 1999-02-04
DE69322778T2 DE69322778T2 (de) 1999-12-02

Family

ID=26300829

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69322778T Expired - Fee Related DE69322778T2 (de) 1992-05-06 1993-04-29 Vakuumplatte

Country Status (9)

Country Link
US (1) US5671910A (de)
EP (1) EP0640024B1 (de)
JP (1) JPH08500296A (de)
CN (1) CN1086163A (de)
AT (1) ATE174835T1 (de)
AU (1) AU4268193A (de)
DE (1) DE69322778T2 (de)
MY (1) MY109505A (de)
WO (1) WO1993022104A1 (de)

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US5727434A (en) * 1993-08-13 1998-03-17 Ryobi America Corporation Circular saw air table
US5987729A (en) * 1994-06-24 1999-11-23 Moran; Thomas F. Multiple plenum suction hold down device
FR2729892B1 (fr) * 1995-01-31 1997-07-18 Nicolas Michel Dispositif de tables a depression de machines a graver
US5572786A (en) * 1995-09-11 1996-11-12 Aluminum Company Of America Method for holding a workpiece by vacuum
US6073681A (en) * 1997-12-31 2000-06-13 Temptronic Corporation Workpiece chuck
US6328096B1 (en) * 1997-12-31 2001-12-11 Temptronic Corporation Workpiece chuck
US6058676A (en) * 1998-10-07 2000-05-09 Lucent Technologies Inc. Lid guide for electronic devices
US6203621B1 (en) * 1999-05-24 2001-03-20 Trw Inc. Vacuum chuck for holding thin sheet material
US6176652B1 (en) * 1999-07-08 2001-01-23 Chunghwa Picture Tubes, Ltd. Drilling machine with vacuum suction table
US6182957B1 (en) 1999-08-12 2001-02-06 International Business Machines Corporation Apparatus and method for holding a flexible product in a flat and secure position
AU2001281182A1 (en) * 2000-08-11 2002-02-25 Incyte Genomics, Inc. Microarray retrieval unit
TW456582U (en) * 2000-11-17 2001-09-21 Ind Tech Res Inst Non-contact sheet clamping device
US7153186B2 (en) * 2002-09-13 2006-12-26 Towa Intercon Technology, Inc. Jet singulation
TW200406026A (en) * 2002-09-13 2004-04-16 Intercon Technology Inc Jet singulation
SG115602A1 (en) * 2003-01-09 2005-10-28 Disco Corp Conveying device for a plate-like workpiece
JP4470199B2 (ja) * 2003-09-25 2010-06-02 Ｓｍｃ株式会社 半導体基板の温度調節装置
EP1750895A1 (de) * 2004-05-08 2007-02-14 Hueck Folien GmbH & Co. KG Spannvorrichtung für das laserschweissen von nickel-shims
US7134649B2 (en) * 2004-05-27 2006-11-14 The Boeing Company Conformal vacuum cup apparatus and method
DE502005008460D1 (de) * 2004-12-27 2009-12-17 Kulicke & Soffa Die Bonding Gm Vorrichtung zum fixieren eines flächigen objekts, insbesondere eines substrats auf einer arbeitsfläche mittels unterdruck
US20060180579A1 (en) * 2005-02-11 2006-08-17 Towa Intercon Technology, Inc. Multidirectional cutting chuck
DE102005036970A1 (de) * 2005-07-07 2007-01-11 Rohde & Schwarz Gmbh & Co. Kg Vorrichtung zum Fixieren einer Nutzenplatte und entsprechendes Bearbeitungsverfahren
CN100391696C (zh) * 2005-09-15 2008-06-04 江南大学 自适应真空吸盘工作台
CN100515662C (zh) * 2006-01-24 2009-07-22 鸿富锦精密工业（深圳）有限公司 一种滚圆镜片的治具
DE102006059963A1 (de) * 2006-12-19 2008-06-26 GM Global Technology Operations, Inc., Detroit Bördelbett, Bördeleinrichtung sowie Verfahren zum Bördeln von Werkstücken
US20080164646A1 (en) * 2007-01-09 2008-07-10 Chi Wah Cheng Workholder for supporting electronic devices
CN101733651B (zh) * 2008-11-11 2012-05-30 苏州春兴精工股份有限公司 用于多孔薄板加工用的真空夹具及其使用方法
DE102009018434B4 (de) * 2009-04-22 2023-11-30 Ev Group Gmbh Aufnahmeeinrichtung zur Aufnahme von Halbleitersubstraten
DE102009044305A1 (de) * 2009-10-21 2011-05-05 Fooke Gmbh Verfahren zum Halten und Bearbeiten eines Werkstückes mit Spannplatte, sowie Vorrichtung zum Aussteifen eines Werkstückes mit Spannplatte
IL203353A (en) * 2010-01-17 2015-10-29 Orbotech Ltd Empty grip system
CN102270596B (zh) * 2010-06-02 2013-09-11 上海微电子装备有限公司 吸盘及其承片台
US8858744B2 (en) 2011-11-18 2014-10-14 Nike, Inc. Multi-functional manufacturing tool
US9010827B2 (en) 2011-11-18 2015-04-21 Nike, Inc. Switchable plate manufacturing vacuum tool
JP5918003B2 (ja) * 2012-04-27 2016-05-18 Ｔｏｗａ株式会社 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法
CN103264362A (zh) * 2013-05-06 2013-08-28 苏州金牛精密机械有限公司 一种真空吸盘定位治具
ITMI20131002A1 (it) * 2013-06-18 2014-12-19 Atom Spa Tavolo di taglio con aspirazione differenziata per la stabilizzazione del materiale da recidere
WO2015015481A1 (en) * 2013-07-28 2015-02-05 Hewlett-Packard Industrial Printing Ltd. Media support
US9227261B2 (en) * 2013-08-06 2016-01-05 Globalfoundries Inc. Vacuum carriers for substrate bonding
WO2015038082A2 (en) * 2013-09-16 2015-03-19 Yüksel Eyüp Osman Segmented plate system
CN104669762B (zh) * 2015-03-24 2017-03-29 京东方科技集团股份有限公司 一种真空贴合装置
CN105108355B (zh) * 2015-09-18 2017-10-17 京东方科技集团股份有限公司 承载台、承载装置和激光切割设备
JP6782087B2 (ja) * 2016-03-28 2020-11-11 株式会社日本マイクロニクス シート治具、ステージ、製造装置、及び二次電池の製造方法
US10151338B2 (en) * 2016-06-06 2018-12-11 Adam Thomas Ochrimenko Pliable material with integral suction recess for attachment to a surface
CN105965420B (zh) * 2016-07-04 2018-07-06 湖北三江航天红阳机电有限公司 一种真空夹持装置及方法
CN106252058A (zh) * 2016-08-22 2016-12-21 泰州新源电工器材有限公司 一种撑条台阶的加工设备及其加工方法
WO2019053752A1 (de) * 2017-09-13 2019-03-21 Esto Srl Vakuumspann vorrichtung zum aufspannen von werkstücken mittels unterdruck
CN108098412A (zh) * 2018-01-04 2018-06-01 鄂州富晶电子技术有限公司 一种免密封模块化真空夹具
KR102194573B1 (ko) * 2019-01-08 2020-12-23 이효길 진공척 모듈 및 그를 가지는 공정시스템
EP3909723A1 (de) * 2020-05-13 2021-11-17 Joulin Cemma Vakuumgreifvorrichtung mit durch magnetische anziehung gesicherter schaumstoffschicht

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE148023C (de) *
GB646862A (en) * 1948-03-31 1950-11-29 Oliver Helsur Calhoun Work holder
US2782574A (en) * 1954-09-16 1957-02-26 Gen Dynamics Corp Work holder
DE1923833C3 (de) * 1969-05-09 1975-11-27 Vereinigte Flugtechnische Werke - Fokker Gmbh, 2800 Bremen System zum Aufbau von Vorrichtungen zum Aufspannen von Werkstücken auf Werkzeug maschinentischen
US3598006A (en) * 1970-02-02 1971-08-10 Gerber Garment Technology Inc Method for working on sheet material and other objects
JPS51126382A (en) * 1975-04-28 1976-11-04 Sekisui Chem Co Ltd An apparatus for separation of fluid
SU650776A1 (ru) * 1977-05-25 1979-03-05 Предприятие П/Я Р-6816 Вакуумный стол
US4221356A (en) * 1978-11-09 1980-09-09 Fortune William S Vacuum operated holding fixture
US4778326A (en) * 1983-05-24 1988-10-18 Vichem Corporation Method and means for handling semiconductor and similar electronic devices
DE3415713C2 (de) * 1984-04-27 1986-12-04 Werner Thieme GmbH & Co KG Maschinenfabrik, 7835 Teningen Siebdruckmaschine mit einem beweglichen Drucktisch
DE3763183D1 (de) * 1986-11-10 1990-07-19 Haas Laser Systems Ag Transportvorrichtung fuer perforierte plattenfoermige objekte.
DE8703223U1 (de) * 1987-03-03 1987-04-16 Modellbau Paul Apitz, 7913 Senden Vakuum-Spannplatte
NL8701603A (nl) * 1987-07-08 1989-02-01 Philips & Du Pont Optical Vacuuminrichting voor het vastzuigen van werkstukken.
JPH03270048A (ja) * 1990-03-19 1991-12-02 Fujitsu Ltd 真空チャック
US5028182A (en) * 1990-03-23 1991-07-02 Kyung Park Vacuum absorption device for use in glass sheet chamfering apparatus
JP2514490B2 (ja) * 1991-07-05 1996-07-10 株式会社ダイヘン 産業用ロボットの連動手動操作による教示制御方法
US5427363A (en) * 1993-06-14 1995-06-27 Cna Manufacturing Systems, Inc. End effector

Also Published As

Publication number Publication date
DE69322778T2 (de) 1999-12-02
JPH08500296A (ja) 1996-01-16
EP0640024B1 (de) 1998-12-23
ATE174835T1 (de) 1999-01-15
MY109505A (en) 1997-02-28
CN1086163A (zh) 1994-05-04
EP0640024A1 (de) 1995-03-01
AU4268193A (en) 1993-11-29
US5671910A (en) 1997-09-30
WO1993022104A1 (en) 1993-11-11

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HORST WITTE GERAETEBAU BARSKAMP E.K., 21354 BLECKED

8339 Ceased/non-payment of the annual fee