DE69321822D1 - Photodiodenstruktur - Google Patents
PhotodiodenstrukturInfo
- Publication number
- DE69321822D1 DE69321822D1 DE69321822T DE69321822T DE69321822D1 DE 69321822 D1 DE69321822 D1 DE 69321822D1 DE 69321822 T DE69321822 T DE 69321822T DE 69321822 T DE69321822 T DE 69321822T DE 69321822 D1 DE69321822 D1 DE 69321822D1
- Authority
- DE
- Germany
- Prior art keywords
- photodiode structure
- photodiode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PN homojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93108156A EP0625803B1 (de) | 1993-05-19 | 1993-05-19 | Photodiodenstruktur |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69321822D1 true DE69321822D1 (de) | 1998-12-03 |
DE69321822T2 DE69321822T2 (de) | 1999-04-01 |
Family
ID=8212920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69321822T Expired - Fee Related DE69321822T2 (de) | 1993-05-19 | 1993-05-19 | Photodiodenstruktur |
Country Status (4)
Country | Link |
---|---|
US (1) | US5430321A (de) |
EP (1) | EP0625803B1 (de) |
JP (1) | JP3614184B2 (de) |
DE (1) | DE69321822T2 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2576766B2 (ja) * | 1993-07-08 | 1997-01-29 | 日本電気株式会社 | 半導体基板の製造方法 |
JPH1126741A (ja) * | 1997-07-04 | 1999-01-29 | Toshiba Corp | 固体撮像装置 |
US6023081A (en) * | 1997-11-14 | 2000-02-08 | Motorola, Inc. | Semiconductor image sensor |
US6133615A (en) * | 1998-04-13 | 2000-10-17 | Wisconsin Alumni Research Foundation | Photodiode arrays having minimized cross-talk between diodes |
US6157019A (en) * | 1999-03-31 | 2000-12-05 | Xerox Corporation | Edge photosite definition by opaque filter layer |
US6287886B1 (en) * | 1999-08-23 | 2001-09-11 | United Microelectronics Corp. | Method of forming a CMOS image sensor |
US6747638B2 (en) * | 2000-01-31 | 2004-06-08 | Semiconductor Energy Laboratory Co., Ltd. | Adhesion type area sensor and display device having adhesion type area sensor |
US6369426B2 (en) | 2000-04-27 | 2002-04-09 | Infineon Technologies North America Corp. | Transistor with integrated photodetector for conductivity modulation |
US6316284B1 (en) * | 2000-09-07 | 2001-11-13 | Xerox Corporation | Infrared correction in color scanners |
US6828642B2 (en) * | 2001-04-17 | 2004-12-07 | Lockhead Martin Corporation | Diffraction grating coupled infrared photodetector |
JP4123415B2 (ja) * | 2002-05-20 | 2008-07-23 | ソニー株式会社 | 固体撮像装置 |
DE10229463B4 (de) * | 2002-07-01 | 2008-12-11 | Qimonda Ag | Halbleiteranordnung und Verfahren zu ihrer Herstellung |
US7709921B2 (en) | 2008-08-27 | 2010-05-04 | Udt Sensors, Inc. | Photodiode and photodiode array with improved performance characteristics |
US7256470B2 (en) * | 2005-03-16 | 2007-08-14 | Udt Sensors, Inc. | Photodiode with controlled current leakage |
US8519503B2 (en) | 2006-06-05 | 2013-08-27 | Osi Optoelectronics, Inc. | High speed backside illuminated, front side contact photodiode array |
US8035183B2 (en) * | 2003-05-05 | 2011-10-11 | Udt Sensors, Inc. | Photodiodes with PN junction on both front and back sides |
US7656001B2 (en) * | 2006-11-01 | 2010-02-02 | Udt Sensors, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US7279731B1 (en) * | 2006-05-15 | 2007-10-09 | Udt Sensors, Inc. | Edge illuminated photodiodes |
US7057254B2 (en) * | 2003-05-05 | 2006-06-06 | Udt Sensors, Inc. | Front illuminated back side contact thin wafer detectors |
US7576369B2 (en) * | 2005-10-25 | 2009-08-18 | Udt Sensors, Inc. | Deep diffused thin photodiodes |
US7880258B2 (en) * | 2003-05-05 | 2011-02-01 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US7655999B2 (en) | 2006-09-15 | 2010-02-02 | Udt Sensors, Inc. | High density photodiodes |
US8164151B2 (en) * | 2007-05-07 | 2012-04-24 | Osi Optoelectronics, Inc. | Thin active layer fishbone photodiode and method of manufacturing the same |
US8120023B2 (en) | 2006-06-05 | 2012-02-21 | Udt Sensors, Inc. | Low crosstalk, front-side illuminated, back-side contact photodiode array |
US8686529B2 (en) | 2010-01-19 | 2014-04-01 | Osi Optoelectronics, Inc. | Wavelength sensitive sensor photodiodes |
US7242069B2 (en) | 2003-05-05 | 2007-07-10 | Udt Sensors, Inc. | Thin wafer detectors with improved radiation damage and crosstalk characteristics |
US7148528B2 (en) * | 2003-07-02 | 2006-12-12 | Micron Technology, Inc. | Pinned photodiode structure and method of formation |
US9178092B2 (en) | 2006-11-01 | 2015-11-03 | Osi Optoelectronics, Inc. | Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays |
US20100053802A1 (en) * | 2008-08-27 | 2010-03-04 | Masaki Yamashita | Low Power Disk-Drive Motor Driver |
WO2010031011A2 (en) | 2008-09-15 | 2010-03-18 | Udt Sensors, Inc. | Thin active layer fishbone photodiode with a shallow n+ layer and method of manufacturing the same |
US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
TWI496042B (zh) * | 2009-07-02 | 2015-08-11 | Semiconductor Energy Lab | 觸控面板及其驅動方法 |
US8916873B2 (en) | 2011-09-14 | 2014-12-23 | Infineon Technologies Ag | Photodetector with controllable spectral response |
US8975715B2 (en) | 2011-09-14 | 2015-03-10 | Infineon Technologies Ag | Photodetector and method for manufacturing the same |
DE102013018789A1 (de) | 2012-11-29 | 2014-06-05 | Infineon Technologies Ag | Steuern lichterzeugter Ladungsträger |
US8912615B2 (en) | 2013-01-24 | 2014-12-16 | Osi Optoelectronics, Inc. | Shallow junction photodiode for detecting short wavelength light |
JP6090060B2 (ja) * | 2013-08-23 | 2017-03-08 | 株式会社豊田中央研究所 | シングルフォトンアバランシェダイオード |
JP2018026536A (ja) * | 2016-08-09 | 2018-02-15 | エスアイアイ・セミコンダクタ株式会社 | 半導体装置の製造方法 |
JP2017005276A (ja) * | 2016-09-30 | 2017-01-05 | 株式会社豊田中央研究所 | シングルフォトンアバランシェダイオード |
GB2600954B (en) * | 2020-11-12 | 2023-06-28 | X Fab Global Services Gmbh | Low dark count rate semiconductor structures |
CN114784131B (zh) * | 2022-04-11 | 2023-05-16 | 西安微电子技术研究所 | 一种光敏二极管、一种光敏运放电路及一种光敏芯片 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50126188A (de) * | 1974-03-22 | 1975-10-03 | ||
FR2363197A1 (fr) * | 1976-08-23 | 1978-03-24 | Ibm | Structure de photo-diode amelioree donnant une reponse en couleur bleue renforcee |
JPS553633A (en) * | 1978-06-20 | 1980-01-11 | Sharp Corp | Manufacturing semiconductor device |
JPS5582472A (en) * | 1978-12-13 | 1980-06-21 | Ibm | Silicone solar energy converter |
JPS63102380A (ja) * | 1986-10-20 | 1988-05-07 | Fujitsu Ltd | 光センサ |
DE3876869D1 (de) * | 1987-06-22 | 1993-02-04 | Landis & Gyr Betriebs Ag | Photodetektor fuer ultraviolett und verfahren zur herstellung. |
US5243215A (en) * | 1990-05-31 | 1993-09-07 | Fuji Electric Co., Ltd. | Semiconductor photodiode device with reduced junction area |
JPH0491473A (ja) * | 1990-08-02 | 1992-03-24 | Canon Inc | 光電変換装置 |
-
1993
- 1993-05-19 DE DE69321822T patent/DE69321822T2/de not_active Expired - Fee Related
- 1993-05-19 EP EP93108156A patent/EP0625803B1/de not_active Expired - Lifetime
-
1994
- 1994-05-05 US US08/238,631 patent/US5430321A/en not_active Expired - Lifetime
- 1994-05-19 JP JP12954394A patent/JP3614184B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0625803A1 (de) | 1994-11-23 |
DE69321822T2 (de) | 1999-04-01 |
EP0625803B1 (de) | 1998-10-28 |
JPH0715028A (ja) | 1995-01-17 |
US5430321A (en) | 1995-07-04 |
JP3614184B2 (ja) | 2005-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AGILENT TECHNOLOGIES DEUTSCHLAND GMBH, 71034 BOEBL |
|
8339 | Ceased/non-payment of the annual fee |