DE69320977T2 - Ferroelektrischer dünnfilm-wanderwellen-umdrehungssensor - Google Patents

Ferroelektrischer dünnfilm-wanderwellen-umdrehungssensor

Info

Publication number
DE69320977T2
DE69320977T2 DE69320977T DE69320977T DE69320977T2 DE 69320977 T2 DE69320977 T2 DE 69320977T2 DE 69320977 T DE69320977 T DE 69320977T DE 69320977 T DE69320977 T DE 69320977T DE 69320977 T2 DE69320977 T2 DE 69320977T2
Authority
DE
Germany
Prior art keywords
hiking
thin film
ferroelectric thin
shaft revolution
revolution sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320977T
Other languages
English (en)
Other versions
DE69320977D1 (de
Inventor
Lawrence Wan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEI Electronics Inc
Original Assignee
BEI Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEI Electronics Inc filed Critical BEI Electronics Inc
Application granted granted Critical
Publication of DE69320977D1 publication Critical patent/DE69320977D1/de
Publication of DE69320977T2 publication Critical patent/DE69320977T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
DE69320977T 1992-10-05 1993-05-24 Ferroelektrischer dünnfilm-wanderwellen-umdrehungssensor Expired - Fee Related DE69320977T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US95558992A 1992-10-05 1992-10-05
PCT/US1993/004935 WO1994008245A1 (en) 1992-10-05 1993-05-24 Ferroelectric thin film travelling wave rotation sensor

Publications (2)

Publication Number Publication Date
DE69320977D1 DE69320977D1 (de) 1998-10-15
DE69320977T2 true DE69320977T2 (de) 1999-01-28

Family

ID=25497045

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320977T Expired - Fee Related DE69320977T2 (de) 1992-10-05 1993-05-24 Ferroelektrischer dünnfilm-wanderwellen-umdrehungssensor

Country Status (7)

Country Link
US (2) US5533394A (de)
EP (1) EP0664003B1 (de)
JP (1) JP3421340B2 (de)
KR (1) KR100277425B1 (de)
CA (1) CA2145543C (de)
DE (1) DE69320977T2 (de)
WO (1) WO1994008245A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0171009B1 (ko) * 1995-12-07 1999-05-01 양승택 원판 진동형 마이크로 자이로스코프 및 그의 제조방법
DE19844588C2 (de) * 1998-09-29 2001-03-22 Michael Gaede Geber für Fahrtrichtungsanzeiger
JP2003509670A (ja) 1999-09-17 2003-03-11 キオニックス インク 電気分離式マイクロ機械ジャイロスコープ
EP1429357A1 (de) * 2002-12-09 2004-06-16 IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. Folientastatur mit mehrlagigen Einzelfolien
EP1959234A1 (de) * 2007-02-13 2008-08-20 STMicroelectronics S.r.l. Mikroelektromechanischer Gyroskop mit Ausgleich der nichtharmonischer Nebenwellen der kapazitiven Kopplung und der Steuermethode eines mikroelektromechanisches Gyroskops

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3307409A (en) * 1959-02-26 1967-03-07 Jr George C Newton Method of and apparatus for measuring angular motion
GB8404668D0 (en) * 1984-02-22 1984-03-28 Burdess J S Gyroscopic devices
US4644793A (en) * 1984-09-07 1987-02-24 The Marconi Company Limited Vibrational gyroscope

Also Published As

Publication number Publication date
US5533395A (en) 1996-07-09
CA2145543C (en) 2002-10-15
JPH08502124A (ja) 1996-03-05
EP0664003A4 (de) 1995-11-15
CA2145543A1 (en) 1994-04-14
US5533394A (en) 1996-07-09
WO1994008245A1 (en) 1994-04-14
EP0664003B1 (de) 1998-09-09
KR100277425B1 (ko) 2001-01-15
JP3421340B2 (ja) 2003-06-30
EP0664003A1 (de) 1995-07-26
DE69320977D1 (de) 1998-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee