DE69310315D1 - Vibratordrehungsmessaufnehmer - Google Patents

Vibratordrehungsmessaufnehmer

Info

Publication number
DE69310315D1
DE69310315D1 DE69310315T DE69310315T DE69310315D1 DE 69310315 D1 DE69310315 D1 DE 69310315D1 DE 69310315 T DE69310315 T DE 69310315T DE 69310315 T DE69310315 T DE 69310315T DE 69310315 D1 DE69310315 D1 DE 69310315D1
Authority
DE
Germany
Prior art keywords
rotation sensor
vibrator rotation
vibrator
sensor
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69310315T
Other languages
English (en)
Other versions
DE69310315T2 (de
Inventor
Takeshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69310315D1 publication Critical patent/DE69310315D1/de
Application granted granted Critical
Publication of DE69310315T2 publication Critical patent/DE69310315T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69310315T 1992-11-04 1993-10-29 Vibratordrehungsmessaufnehmer Expired - Lifetime DE69310315T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4321312A JPH06147902A (ja) 1992-11-04 1992-11-04 振動ジャイロ

Publications (2)

Publication Number Publication Date
DE69310315D1 true DE69310315D1 (de) 1997-06-05
DE69310315T2 DE69310315T2 (de) 1997-11-06

Family

ID=18131183

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310315T Expired - Lifetime DE69310315T2 (de) 1992-11-04 1993-10-29 Vibratordrehungsmessaufnehmer

Country Status (4)

Country Link
US (1) US5476007A (de)
EP (1) EP0597338B1 (de)
JP (1) JPH06147902A (de)
DE (1) DE69310315T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69423667T2 (de) * 1993-03-01 2000-11-23 Murata Manufacturing Co Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor
JP3714974B2 (ja) * 1993-12-16 2005-11-09 株式会社デンソー 振動型角速度検出装置
JPH08159779A (ja) 1994-12-02 1996-06-21 Murata Mfg Co Ltd 振動ジャイロ
JP3291968B2 (ja) * 1994-12-15 2002-06-17 株式会社村田製作所 振動ジャイロ
JPH08247770A (ja) * 1995-03-14 1996-09-27 Murata Mfg Co Ltd 振動ジャイロ
JP2996137B2 (ja) * 1995-03-31 1999-12-27 株式会社村田製作所 振動ジャイロ
JPH08278146A (ja) * 1995-04-03 1996-10-22 Murata Mfg Co Ltd 振動ジャイロ
JPH09105639A (ja) * 1995-08-08 1997-04-22 Murata Mfg Co Ltd 振動ジャイロおよびその製造方法
US5656777A (en) * 1996-06-13 1997-08-12 Alliedsignal, Inc. Miniature box vibrating gyroscope
US5696323A (en) * 1996-06-25 1997-12-09 Alliedsignal, Inc. Two bar resonant beam Coriolis rate sensor
JPH10115526A (ja) 1996-10-15 1998-05-06 Ngk Insulators Ltd 振動ジャイロ・センサ及び振動ジャイロ・センサの製造方法
US6192756B1 (en) * 1998-02-12 2001-02-27 Ngk Insulators, Ltd. Vibrators vibratory gyroscopes a method of detecting a turning angular rate and a linear accelerometer
EP2392897B1 (de) * 2010-01-12 2014-06-11 Sony Corporation Winkelgeschwindigkeitssensor, elektronische vorrichtung und verfahren zur winkelgeschwindigkeitserkennung
WO2012081457A1 (ja) 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
JP5807344B2 (ja) 2011-02-25 2015-11-10 ソニー株式会社 角速度センサ及び電子機器
WO2013039125A1 (ja) * 2011-09-12 2013-03-21 日本電気株式会社 圧電振動センサ
DE112016002627T5 (de) * 2015-06-11 2018-02-22 Georgia Tech Research Corporation MEMS-Trägheitsmessvorrichtung mit geneigten Elektroden zur Abstimmung der Quadratur
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3739202A (en) * 1970-08-28 1973-06-12 W Cady Instrument for responding to mechanical vibration of acceleration andfor converting the same into electric energy
JPS6416911A (en) * 1987-07-10 1989-01-20 Nippon Denki Home Electronics Vibration gyro
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
GB2215054B (en) * 1988-02-19 1992-09-30 Yazaki Corp Oscillatory angular velocity detecting apparatus
JPH0354414A (ja) * 1989-07-24 1991-03-08 Yazaki Corp 角速度センサ
JPH03172714A (ja) * 1989-11-30 1991-07-26 Murata Mfg Co Ltd 検出回路
IT1285616B1 (it) * 1996-03-15 1998-06-18 Gd Spa Metodo per l'incarto di un prodotto

Also Published As

Publication number Publication date
DE69310315T2 (de) 1997-11-06
US5476007A (en) 1995-12-19
EP0597338A1 (de) 1994-05-18
JPH06147902A (ja) 1994-05-27
EP0597338B1 (de) 1997-05-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition