DE69320678T2 - Vorrichtung zur Detektion von Verschiebungsinformation - Google Patents

Vorrichtung zur Detektion von Verschiebungsinformation

Info

Publication number
DE69320678T2
DE69320678T2 DE69320678T DE69320678T DE69320678T2 DE 69320678 T2 DE69320678 T2 DE 69320678T2 DE 69320678 T DE69320678 T DE 69320678T DE 69320678 T DE69320678 T DE 69320678T DE 69320678 T2 DE69320678 T2 DE 69320678T2
Authority
DE
Germany
Prior art keywords
displacement information
detecting displacement
detecting
information
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69320678T
Other languages
English (en)
Other versions
DE69320678D1 (de
Inventor
Koh Ishizuka
Tetsuharu Nishimura
Hiroshi Kondo
Yasushi Kaneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP33740392A external-priority patent/JP2862448B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69320678D1 publication Critical patent/DE69320678D1/de
Application granted granted Critical
Publication of DE69320678T2 publication Critical patent/DE69320678T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69320678T 1992-04-07 1993-04-06 Vorrichtung zur Detektion von Verschiebungsinformation Expired - Lifetime DE69320678T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8544792 1992-04-07
JP33740392A JP2862448B2 (ja) 1991-12-20 1992-12-17 光学式変位センサ及びこれを用いた駆動システム

Publications (2)

Publication Number Publication Date
DE69320678D1 DE69320678D1 (de) 1998-10-08
DE69320678T2 true DE69320678T2 (de) 1999-03-25

Family

ID=26426451

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320678T Expired - Lifetime DE69320678T2 (de) 1992-04-07 1993-04-06 Vorrichtung zur Detektion von Verschiebungsinformation

Country Status (3)

Country Link
US (1) US5390022A (de)
EP (1) EP0565056B1 (de)
DE (1) DE69320678T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074993A (ja) * 1993-03-23 1995-01-10 Ricoh Co Ltd エンコーダ装置
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
WO1995020139A1 (en) * 1994-01-24 1995-07-27 Svg Lithography Systems, Inc. Grating-grating interferometric alignment system
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
JPH08210814A (ja) * 1994-10-12 1996-08-20 Canon Inc 光学式変位測定装置
JPH08210824A (ja) * 1995-02-07 1996-08-20 Canon Inc 回転検出装置及び回転制御装置
JPH08219812A (ja) * 1995-02-15 1996-08-30 Canon Inc 変位情報検出装置、変位情報検出用スケール及びこれを用いたドライブ制御装置
EP0729013B1 (de) * 1995-02-21 2002-07-17 Canon Kabushiki Kaisha Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
US6151185A (en) * 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
US6407815B2 (en) * 1998-07-02 2002-06-18 Sony Precision Technology Inc. Optical displacement measurement system
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
EP1045227B2 (de) 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) 2000-05-26 2001-12-07 Canon Inc 測定装置
GB0413710D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
DE102005053787B4 (de) * 2005-11-09 2019-11-28 Dr. Johannes Heidenhain Gmbh Optische Abtasteinheit sowie Verfahren zur Montage
KR101624505B1 (ko) * 2009-09-24 2016-05-26 삼성전자주식회사 3-ｄ 포인팅 감지 장치 및 방법
DE102010003157B4 (de) * 2010-03-23 2019-10-24 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
NL2006743A (en) * 2010-06-09 2011-12-12 Asml Netherlands Bv Position sensor and lithographic apparatus.
US8604413B2 (en) * 2011-06-13 2013-12-10 Mitutoyo Corporation Optical encoder including displacement sensing normal to the encoder scale grating surface
DE102013203713A1 (de) * 2013-03-05 2014-02-13 Carl Zeiss Smt Gmbh Inkrementalgeber und Lithographievorrichtung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4049965A (en) * 1975-03-06 1977-09-20 National Research Development Corporation Measurement apparatus
CH626169A5 (de) * 1976-11-25 1981-10-30 Leitz Ernst Gmbh
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
GB8432574D0 (en) * 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
DE3541199C1 (de) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
GB8615196D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
US4732483A (en) * 1987-03-19 1988-03-22 Zygo Corporation Interferometric surface profiler
FR2620244B1 (fr) * 1987-09-08 1990-01-12 Micro Controle Systeme pour le positionnement rigoureux d'un objet le long d'un axe
JPH01180615A (ja) * 1988-01-12 1989-07-18 Nec Corp クロック供給方式
GB2247313B (en) * 1988-02-22 1992-08-19 Mitutoyo Corp Optical encoder.
JPH07888Y2 (ja) 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
GB2216257B (en) * 1988-02-26 1992-06-24 Okuma Machinery Works Ltd Optical linear encoder
JPH02262064A (ja) * 1989-03-31 1990-10-24 Canon Inc レーザードップラー速度計
US5098190A (en) * 1989-08-07 1992-03-24 Optra, Inc. Meterology using interferometric measurement technology for measuring scale displacement with three output signals
JPH04229702A (ja) * 1990-06-20 1992-08-19 Canon Inc 信号処理方法及び装置、並びにこれを用いた変位検出装置等のシステム
JP3066923B2 (ja) * 1991-07-29 2000-07-17 キヤノン株式会社 エンコーダ及びこれを有するシステム
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics

Also Published As

Publication number Publication date
DE69320678D1 (de) 1998-10-08
EP0565056A2 (de) 1993-10-13
US5390022A (en) 1995-02-14
EP0565056B1 (de) 1998-09-02
EP0565056A3 (en) 1995-05-17

Similar Documents

Publication Publication Date Title
DE69320678T2 (de) Vorrichtung zur Detektion von Verschiebungsinformation
DE69322569T2 (de) Vorrichtung zur Erfassung von Rotationsinformationen
DE69427388T2 (de) Vorrichtung zur Regenerierung von Karteninformationen
DE69624281T2 (de) Vorrichtung zur Anzeige von Information
DE69332432D1 (de) Gerät zur identification von beweglichen objekten
DE69424347D1 (de) Vorrichtung zur Konversion von Anzeige-Information
DE69332365D1 (de) Vorrichtung zur Messung von Fluoreszenz
DE69033048D1 (de) System zur Positionsdetektion
DE69109856D1 (de) Vorrichtung zur multidimensionalen informationseingabe.
DE69220953D1 (de) Vorrichtung zur unterscheidung von münzen
DE69432388D1 (de) Vorrichtung zur Informationsbeschaffung zum Anzeigen von Dokumenten
DE59409256D1 (de) Vorrichtung zur Distanzmessung
DE69433432D1 (de) Vorrichtung zur Überwachung von Atrio-Ventrikulären Intervallen
DE68921750D1 (de) Einrichtung zur erkennung von zündaussetzern.
DE69411321T2 (de) Vorrichtung zum Nachweis von Fluoreszenz
DE69221133D1 (de) Vorrichtung zur auswechselung von stoffen
DE69320716D1 (de) Gerät zur Detektion von Verschiebungsinformation
DE69321329D1 (de) Vorrichtung zur Detektion einer Verschiebung
DE69121811D1 (de) Vorrichtung zur Lokalisierung und Identifizierung von Transpondern
DE69314107D1 (de) Optisches Gerät zur Informationsverarbeitung
DE69424629T2 (de) Vorrichtung zur Anzeige von Diagrammen
DE69502789T2 (de) Vorrichtung zur Positionsdetektion
DE69225623T2 (de) Gerät zur Eingabe handgeschriebener Information
DE69621981D1 (de) Vorrichtung zur Handhabung von Lösungen
DE69404659D1 (de) Vorrichtung zur detektion

Legal Events

Date Code Title Description
8364 No opposition during term of opposition