DE69318203T2 - Kapazitiver Mikrosensor mit geringer parasitärer Kapazität und Verfahren zur dessen Herstellung - Google Patents

Kapazitiver Mikrosensor mit geringer parasitärer Kapazität und Verfahren zur dessen Herstellung

Info

Publication number
DE69318203T2
DE69318203T2 DE69318203T DE69318203T DE69318203T2 DE 69318203 T2 DE69318203 T2 DE 69318203T2 DE 69318203 T DE69318203 T DE 69318203T DE 69318203 T DE69318203 T DE 69318203T DE 69318203 T2 DE69318203 T2 DE 69318203T2
Authority
DE
Germany
Prior art keywords
production
parasitic capacitance
low parasitic
capacitive microsensor
microsensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69318203T
Other languages
English (en)
Other versions
DE69318203D1 (de
Inventor
Isabelle Thomas
Pierre-Olivier Lefort
Christophe Legoux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Application granted granted Critical
Publication of DE69318203D1 publication Critical patent/DE69318203D1/de
Publication of DE69318203T2 publication Critical patent/DE69318203T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE69318203T 1992-02-20 1993-02-16 Kapazitiver Mikrosensor mit geringer parasitärer Kapazität und Verfahren zur dessen Herstellung Expired - Fee Related DE69318203T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9202190A FR2687777B1 (fr) 1992-02-20 1992-02-20 Micro-capteur capacitif a faible capacite parasite et procede de fabrication.

Publications (2)

Publication Number Publication Date
DE69318203D1 DE69318203D1 (de) 1998-06-04
DE69318203T2 true DE69318203T2 (de) 1998-08-27

Family

ID=9427029

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318203T Expired - Fee Related DE69318203T2 (de) 1992-02-20 1993-02-16 Kapazitiver Mikrosensor mit geringer parasitärer Kapazität und Verfahren zur dessen Herstellung

Country Status (4)

Country Link
US (1) US5381300A (de)
EP (1) EP0557217B1 (de)
DE (1) DE69318203T2 (de)
FR (1) FR2687777B1 (de)

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US5665915A (en) * 1992-03-25 1997-09-09 Fuji Electric Co., Ltd. Semiconductor capacitive acceleration sensor
JP3151956B2 (ja) * 1992-09-04 2001-04-03 株式会社村田製作所 加速度センサ
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
EP0623824B1 (de) * 1993-05-05 1996-11-06 LITEF GmbH Mikromechanische Beschleunigungsmessvorrichtung und Verfahren zu deren Herstellung
US5476819A (en) * 1993-07-26 1995-12-19 Litton Systems, Inc. Substrate anchor for undercut silicon on insulator microstructures
EP0720733B1 (de) * 1993-09-24 1999-03-17 Rosemount Inc. Drucküberträger mit isoliermembran
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US5576483A (en) * 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
US6026677A (en) * 1993-10-01 2000-02-22 Hysitron, Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US5546805A (en) * 1994-08-12 1996-08-20 Coyote Engineering Services, Inc. Angle and angular acceleration sensors
US5596222A (en) * 1994-08-12 1997-01-21 The Charles Stark Draper Laboratory, Inc. Wafer of transducer chips
US5545912A (en) * 1994-10-27 1996-08-13 Motorola, Inc. Electronic device enclosure including a conductive cap and substrate
US5535626A (en) * 1994-12-21 1996-07-16 Breed Technologies, Inc. Sensor having direct-mounted sensing element
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
JPH11258265A (ja) * 1998-03-16 1999-09-24 Akebono Brake Ind Co Ltd 半導体加速度センサ及びその製造方法
JP4124867B2 (ja) * 1998-07-14 2008-07-23 松下電器産業株式会社 変換装置
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
CN1151367C (zh) 2000-01-06 2004-05-26 罗斯蒙德公司 微机电系统(mems)用的电互联的晶粒生长
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US7238999B2 (en) * 2005-01-21 2007-07-03 Honeywell International Inc. High performance MEMS packaging architecture
EP2514713B1 (de) 2011-04-20 2013-10-02 Tronics Microsystems S.A. Mikroelektromechanische Systemvorrichtung (MEMS-Vorrichtung)
KR20120119845A (ko) * 2011-04-22 2012-10-31 삼성전기주식회사 관성센서 및 그의 제조방법
DE102014100246A1 (de) * 2014-01-10 2015-07-16 Polyic Gmbh & Co. Kg Kapazitives Sensorelement sowie Verfahren zur Herstellung dazu
US9752900B2 (en) 2015-07-10 2017-09-05 Wyrobek International, Inc. Multi-plate capacitive transducer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion

Also Published As

Publication number Publication date
EP0557217B1 (de) 1998-04-29
US5381300A (en) 1995-01-10
FR2687777B1 (fr) 1994-05-20
EP0557217A1 (de) 1993-08-25
FR2687777A1 (fr) 1993-08-27
DE69318203D1 (de) 1998-06-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee