DE69316468T2 - Greifvorrichtung für Halter für Silizum-Plättchen - Google Patents

Greifvorrichtung für Halter für Silizum-Plättchen

Info

Publication number
DE69316468T2
DE69316468T2 DE1993616468 DE69316468T DE69316468T2 DE 69316468 T2 DE69316468 T2 DE 69316468T2 DE 1993616468 DE1993616468 DE 1993616468 DE 69316468 T DE69316468 T DE 69316468T DE 69316468 T2 DE69316468 T2 DE 69316468T2
Authority
DE
Germany
Prior art keywords
holders
gripping device
silicon wafers
wafers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1993616468
Other languages
English (en)
Other versions
DE69316468D1 (de
Inventor
Bruno Brou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
SGS Thomson Microelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Thomson Microelectronics SA filed Critical SGS Thomson Microelectronics SA
Publication of DE69316468D1 publication Critical patent/DE69316468D1/de
Application granted granted Critical
Publication of DE69316468T2 publication Critical patent/DE69316468T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B7/00—Pliers; Other hand-held gripping tools with jaws on pivoted limbs; Details applicable generally to pivoted-limb hand tools
    • B25B7/02—Jaws

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
DE1993616468 1992-07-08 1993-07-05 Greifvorrichtung für Halter für Silizum-Plättchen Expired - Fee Related DE69316468T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9208818A FR2693395B1 (fr) 1992-07-08 1992-07-08 Outil de préhension de nacelles pour plaquettes de silicium.

Publications (2)

Publication Number Publication Date
DE69316468D1 DE69316468D1 (de) 1998-02-26
DE69316468T2 true DE69316468T2 (de) 1998-07-02

Family

ID=9431975

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1993616468 Expired - Fee Related DE69316468T2 (de) 1992-07-08 1993-07-05 Greifvorrichtung für Halter für Silizum-Plättchen

Country Status (3)

Country Link
EP (1) EP0579562B1 (de)
DE (1) DE69316468T2 (de)
FR (1) FR2693395B1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101967915B1 (ko) * 2017-01-18 2019-04-10 엠티코리아(주) 패스너 집게

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1667934A (en) * 1927-01-28 1928-05-01 Henze Paul Piston-supporting device
US3790203A (en) * 1972-09-05 1974-02-05 Guarantee Specialty Mfg Co Parts handling means
US4195871A (en) * 1978-06-12 1980-04-01 Codi Corporation Diffusion boat and grip
DE7911899U1 (de) * 1979-04-24 1979-07-19 Hazet-Werk Hermann Zerver Gmbh & Co Kg, 5630 Remscheid Vorrichtung zum Spreizen eines Anzugsbleches für eine Rohrschelle
FR2582636B1 (fr) * 1985-05-28 1988-01-22 Merille Daniel Pince pour l'ouverture de bocaux pressurises
US5036733A (en) * 1988-04-12 1991-08-06 Tiholiz Ivan C Co-aptive instruments with non-slip surfaces and method for their manufacture
US5023989A (en) * 1989-11-22 1991-06-18 Hargrave David L Tool for repairing pop-up sprinklers

Also Published As

Publication number Publication date
DE69316468D1 (de) 1998-02-26
FR2693395A1 (fr) 1994-01-14
FR2693395B1 (fr) 1994-10-14
EP0579562B1 (de) 1998-01-21
EP0579562A1 (de) 1994-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee