DE69315261D1 - Verfahren und Vorrichtung zur Herstellung von Siliciumnitridkeramik - Google Patents

Verfahren und Vorrichtung zur Herstellung von Siliciumnitridkeramik

Info

Publication number
DE69315261D1
DE69315261D1 DE69315261T DE69315261T DE69315261D1 DE 69315261 D1 DE69315261 D1 DE 69315261D1 DE 69315261 T DE69315261 T DE 69315261T DE 69315261 T DE69315261 T DE 69315261T DE 69315261 D1 DE69315261 D1 DE 69315261D1
Authority
DE
Germany
Prior art keywords
silicon nitride
nitride ceramic
producing silicon
producing
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315261T
Other languages
English (en)
Other versions
DE69315261T2 (de
Inventor
Yasushi Tsuzuki
Shin-Ichi Yamagata
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04184417A external-priority patent/JP3111657B2/ja
Priority claimed from JP04184416A external-priority patent/JP3111656B2/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69315261D1 publication Critical patent/DE69315261D1/de
Application granted granted Critical
Publication of DE69315261T2 publication Critical patent/DE69315261T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B21/00—Open or uncovered sintering apparatus; Other heat-treatment apparatus of like construction

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69315261T 1992-06-18 1993-06-17 Verfahren und Vorrichtung zur Herstellung von Siliciumnitridkeramik Expired - Fee Related DE69315261T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04184417A JP3111657B2 (ja) 1992-06-18 1992-06-18 窒化ケイ素焼結体の製造方法
JP04184416A JP3111656B2 (ja) 1992-06-18 1992-06-18 窒化ケイ素焼結体の製造方法及び製造装置

Publications (2)

Publication Number Publication Date
DE69315261D1 true DE69315261D1 (de) 1998-01-02
DE69315261T2 DE69315261T2 (de) 1998-03-12

Family

ID=26502490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315261T Expired - Fee Related DE69315261T2 (de) 1992-06-18 1993-06-17 Verfahren und Vorrichtung zur Herstellung von Siliciumnitridkeramik

Country Status (3)

Country Link
US (1) US5533930A (de)
EP (1) EP0574926B1 (de)
DE (1) DE69315261T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696015B2 (en) * 1999-03-03 2004-02-24 Sumitomo Special Metals Co., Ltd. Method for producing rare-earth magnet
CN1187152C (zh) * 1999-03-03 2005-02-02 株式会社新王磁材 稀土磁铁烧结用烧结箱及用该箱烧结处理的稀土磁铁制法
EP1832565A4 (de) * 2005-08-03 2007-10-17 Ibiden Co Ltd Vorrichtung zur siliziumcarbidbrennung und verfahren zur herstellung poröser sililzumcarbidkörper
JP5202810B2 (ja) * 2006-02-06 2013-06-05 古河電気工業株式会社 グラファイト加熱炉および光ファイバの製造方法
US7531769B2 (en) * 2006-06-13 2009-05-12 Guy Smith Carbon fiber composite muffle
CN101556110B (zh) * 2009-05-19 2012-07-11 江苏奥能耐火材料有限公司 含碳材料无氧化烧成电炉
CN102466403A (zh) * 2010-11-05 2012-05-23 施丽萍 推车炉窑
CN106288767B (zh) * 2016-09-18 2018-06-15 山东大学 一种碳碳复合材料高温连续加热炉
US20220065533A1 (en) * 2020-08-28 2022-03-03 Desktop Metal, Inc. Systems, devices, and methods for purifying atmosphere in a vacuum furnace
JP2024512431A (ja) * 2021-03-16 2024-03-19 ディーエスビー テクノロジーズ， エルエルシー 連続焼結炉で使用するためのラッキングシステム
DE102021108239B3 (de) 2021-03-31 2022-09-01 Vacuumschmelze Gmbh & Co. Kg Verfahren zur Wärmebehandlung eines Gegenstands

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2789808A (en) * 1954-11-05 1957-04-23 Lee Wilson Method of and apparatus for controlling circulation of furnace atmosphere
JPS5849509B2 (ja) * 1975-10-11 1983-11-04 科学技術庁無機材質研究所長 窒化珪素焼結体の製造法
DE3266050D1 (en) * 1981-10-12 1985-10-10 Sumitomo Electric Industries Method for sintering silicon nitride
FR2517665B1 (fr) * 1981-12-08 1986-01-31 Ceraver Procede de fabrication d'un materiau fritte a base de nitrure de silicium, et materiau obtenu par ce procede
US4773852A (en) * 1985-06-11 1988-09-27 Denki Kagaku Kogyo Kabushiki Kaisha Pyrolytic boron nitride crucible and method for producing the same
EP0225087B1 (de) * 1985-11-18 1992-06-24 Ngk Insulators, Ltd. Herstellung von gesinterten Siliziumnitridformkörpern
IT1210310B (it) * 1987-06-19 1989-09-14 Alberto Albonetti Parete radiante,in particolare per scambiatori,forni a muffola esimili
DE3825955A1 (de) * 1987-07-30 1989-02-16 Ngk Insulators Ltd Verfahren zur herstellung homogener siliciumnitrid-sinterkoerper
JP2524201B2 (ja) * 1988-08-22 1996-08-14 日本特殊陶業株式会社 窒化珪素質焼結体及びその製造方法
US5188781A (en) * 1988-09-10 1993-02-23 Hoechst Aktiengesellschaft Silicon nitride ceramic and a process for its preparation
EP0399107B1 (de) * 1989-05-22 1996-03-20 Sumitomo Electric Industries, Ltd. Siliciumnitridsinterkörper hoher Festigkeit und Verfahren zu seiner Herstellung
US5225127A (en) * 1989-07-18 1993-07-06 Sumitomo Electric Industries, Ltd. Process for production of sintered silicon nitride made article
US5173458A (en) * 1990-12-28 1992-12-22 Sumitomo Electric Industries, Ltd. Silicon nitride sintered body and process for producing the same
JP3007432B2 (ja) * 1991-02-19 2000-02-07 東京エレクトロン株式会社 熱処理装置

Also Published As

Publication number Publication date
EP0574926A3 (de) 1995-02-15
EP0574926B1 (de) 1997-11-19
DE69315261T2 (de) 1998-03-12
EP0574926A2 (de) 1993-12-22
US5533930A (en) 1996-07-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee