DE69311650D1 - Schwimmender Boden mit elektromagnetischer Aufhängung - Google Patents

Schwimmender Boden mit elektromagnetischer Aufhängung

Info

Publication number
DE69311650D1
DE69311650D1 DE69311650T DE69311650T DE69311650D1 DE 69311650 D1 DE69311650 D1 DE 69311650D1 DE 69311650 T DE69311650 T DE 69311650T DE 69311650 T DE69311650 T DE 69311650T DE 69311650 D1 DE69311650 D1 DE 69311650D1
Authority
DE
Germany
Prior art keywords
floating floor
electromagnetic suspension
electromagnetic
suspension
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311650T
Other languages
English (en)
Other versions
DE69311650T2 (de
Inventor
Kenichi Yano
Yoichi Kanemitsu
Katsuhide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Kajima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Kajima Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69311650D1 publication Critical patent/DE69311650D1/de
Publication of DE69311650T2 publication Critical patent/DE69311650T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Floor Finish (AREA)
DE69311650T 1992-08-26 1993-08-24 Schwimmender Boden mit elektromagnetischer Aufhängung Expired - Fee Related DE69311650T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4250598A JP2816513B2 (ja) 1992-08-26 1992-08-26 電磁式浮き床構造

Publications (2)

Publication Number Publication Date
DE69311650D1 true DE69311650D1 (de) 1997-07-24
DE69311650T2 DE69311650T2 (de) 1998-01-15

Family

ID=17210262

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311650T Expired - Fee Related DE69311650T2 (de) 1992-08-26 1993-08-24 Schwimmender Boden mit elektromagnetischer Aufhängung

Country Status (4)

Country Link
US (1) US5471802A (de)
EP (1) EP0584791B1 (de)
JP (1) JP2816513B2 (de)
DE (1) DE69311650T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6989647B1 (en) 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
TW318255B (de) 1995-05-30 1997-10-21 Philips Electronics Nv
JPH0925989A (ja) * 1995-07-13 1997-01-28 Kofu Nippon Denki Kk 吸振装置及び吸振構造
US5833398A (en) * 1996-10-18 1998-11-10 Lenormand; Edward J. Dynamic self-compensating volume deformation support system
NL1007127C2 (nl) * 1997-09-26 1999-03-29 Univ Delft Tech Draagsysteem.
US6487061B1 (en) * 2000-01-27 2002-11-26 Vssi Commercial, Inc. Electromagnet support system
JP2002031187A (ja) * 2000-07-13 2002-01-31 Ebara Corp 磁気浮上装置を用いた除振装置
JP4109891B2 (ja) * 2002-04-19 2008-07-02 キヤノン株式会社 能動制振装置、露光装置及びデバイス製造方法
US6895870B1 (en) 2002-11-04 2005-05-24 F. Peter Bizlewicz Apparatus and method for stacking plural electronic and electro-acoustic components
US20060054432A1 (en) * 2004-09-16 2006-03-16 Yu-Yen Chiu Anti-shock system
KR100743129B1 (ko) 2006-11-13 2007-07-27 (주) 중앙디자인 자기부상식 바닥재 및 그 시공방법
WO2008132245A1 (en) * 2007-05-01 2008-11-06 Arcelik Anonim Sirketi A compressor
CN102865809B (zh) * 2012-09-05 2015-01-28 中国科学院光电技术研究所 一种子孔径拼接干涉仪系统及测量光学镜片面形的方法
CN103062583B (zh) * 2012-12-19 2014-01-22 哈尔滨工业大学 基于气磁零位基准和激光自准直测量的气磁隔振平台
CN103499309B (zh) * 2013-10-11 2016-04-27 中国科学院光电技术研究所 一种带有环境反馈的自动干涉检测系统及方法
DE102016100750A1 (de) * 2016-01-18 2017-07-20 Airbus Operations Gmbh Fahrzeugrumpf und Verfahren zur Montage eines Fahrzeugrumpfs

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3464657A (en) * 1967-08-30 1969-09-02 Us Army Vibration damped platform
JPS6281524A (ja) * 1985-10-04 1987-04-15 Mitsubishi Electric Corp 距離測定装置
JPS63275829A (ja) * 1987-05-06 1988-11-14 Inoue Japax Res Inc 防振装置
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding
JPS6483744A (en) * 1987-09-25 1989-03-29 Kajima Corp Earthquakeproof structure
JPH01250640A (ja) * 1988-03-31 1989-10-05 Showa Electric Wire & Cable Co Ltd 除振台
JP2539906B2 (ja) * 1989-01-31 1996-10-02 鹿島建設株式会社 磁気式防振装置
JPH02149999U (de) * 1989-05-25 1990-12-21
EP0410647B1 (de) * 1989-07-24 1994-12-07 Tokkyo Kiki Kabushiki Kaisha Verfahren zur Positions- und Vibrationssteuerung und eine aktive Vibrationssteuervorrichtung
US5385217A (en) * 1991-05-20 1995-01-31 Ebara Corporation Vibration eliminating apparatus for elminating vibration of an installation floor
US5285995A (en) * 1992-05-14 1994-02-15 Aura Systems, Inc. Optical table active leveling and vibration cancellation system

Also Published As

Publication number Publication date
DE69311650T2 (de) 1998-01-15
JP2816513B2 (ja) 1998-10-27
EP0584791A1 (de) 1994-03-02
JPH06288071A (ja) 1994-10-11
US5471802A (en) 1995-12-05
EP0584791B1 (de) 1997-06-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EBARA CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee