DE69309426T2 - Beschleunigungsmessaufnehmer - Google Patents
BeschleunigungsmessaufnehmerInfo
- Publication number
- DE69309426T2 DE69309426T2 DE69309426T DE69309426T DE69309426T2 DE 69309426 T2 DE69309426 T2 DE 69309426T2 DE 69309426 T DE69309426 T DE 69309426T DE 69309426 T DE69309426 T DE 69309426T DE 69309426 T2 DE69309426 T2 DE 69309426T2
- Authority
- DE
- Germany
- Prior art keywords
- acceleration gauge
- gauge
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Weting (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26301392A JP3151956B2 (ja) | 1992-09-04 | 1992-09-04 | 加速度センサ |
PCT/JP1993/001241 WO1994006024A1 (en) | 1992-09-04 | 1993-09-02 | Acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69309426D1 DE69309426D1 (de) | 1997-05-07 |
DE69309426T2 true DE69309426T2 (de) | 1997-07-10 |
Family
ID=17383679
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69309426T Expired - Lifetime DE69309426T2 (de) | 1992-09-04 | 1993-09-02 | Beschleunigungsmessaufnehmer |
Country Status (5)
Country | Link |
---|---|
US (1) | US5561248A (de) |
EP (1) | EP0611967B1 (de) |
JP (1) | JP3151956B2 (de) |
DE (1) | DE69309426T2 (de) |
WO (1) | WO1994006024A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19817357B4 (de) * | 1998-04-18 | 2008-10-30 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE19954022B4 (de) * | 1998-11-13 | 2011-08-18 | DENSO CORPORATION, Aichi-pref. | Halbleitersensor für eine physikalische Grösse und Verfahren zu dessen Herstellung |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3367113B2 (ja) | 1992-04-27 | 2003-01-14 | 株式会社デンソー | 加速度センサ |
US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
JP3689958B2 (ja) * | 1995-02-23 | 2005-08-31 | マツダ株式会社 | 応力検出方法およびその実施に使用する装置 |
JP3106389B2 (ja) * | 1995-08-18 | 2000-11-06 | 株式会社村田製作所 | 可変容量コンデンサ |
EP0762128B1 (de) * | 1995-09-04 | 2000-05-17 | Murata Manufacturing Co., Ltd. | Beschleunigungsdetektionsvorrichtung |
US6035714A (en) | 1997-09-08 | 2000-03-14 | The Regents Of The University Of Michigan | Microelectromechanical capacitive accelerometer and method of making same |
US6718605B2 (en) | 1997-09-08 | 2004-04-13 | The Regents Of The University Of Michigan | Single-side microelectromechanical capacitive accelerometer and method of making same |
US6167757B1 (en) | 1997-09-08 | 2001-01-02 | The Regents Of The University Of Michigan | Single-side microelectromechanical capacitive accelerometer and method of making same |
JPH1194873A (ja) * | 1997-09-18 | 1999-04-09 | Mitsubishi Electric Corp | 加速度センサ及びその製造方法 |
JP4003326B2 (ja) | 1998-02-12 | 2007-11-07 | 株式会社デンソー | 半導体力学量センサおよびその製造方法 |
US5990427A (en) * | 1998-10-23 | 1999-11-23 | Trw Inc. | Movable acceleration switch responsive to acceleration parallel to plane of substrate upon which the switch is fabricated and methods |
JP4238437B2 (ja) | 1999-01-25 | 2009-03-18 | 株式会社デンソー | 半導体力学量センサとその製造方法 |
DE10066435B4 (de) * | 1999-07-26 | 2012-03-08 | Denso Corporation | Halbleitersensor für eine physikalische Größe |
ITTO20010086A1 (it) * | 2001-01-30 | 2002-07-30 | St Microelectronics Srl | Procedimento per sigillare e connettere parti di microsistemi elettromeccanici, fluidi, ottici e dispositivo cosi' ottenuto. |
FR2830125B1 (fr) * | 2001-09-24 | 2006-11-17 | Commissariat Energie Atomique | Procede de realisation d'une prise de contact en face arriere d'un composant a substrats empiles et composant equipe d'une telle prise de contact |
US6862795B2 (en) * | 2002-06-17 | 2005-03-08 | Vty Holding Oy | Method of manufacturing of a monolithic silicon acceleration sensor |
US6912902B2 (en) * | 2003-03-26 | 2005-07-05 | Honeywell International Inc. | Bending beam accelerometer with differential capacitive pickoff |
US7179674B2 (en) * | 2004-12-28 | 2007-02-20 | Stmicroelectronics, Inc. | Bi-directional released-beam sensor |
US7069784B1 (en) * | 2004-12-29 | 2006-07-04 | Honeywell International Inc. | Pendulous in-plane MEMS accelerometer device |
JP4687736B2 (ja) * | 2008-03-25 | 2011-05-25 | 株式会社村田製作所 | 外力検知装置の製造方法および外力検知装置 |
JP4636187B2 (ja) * | 2008-04-22 | 2011-02-23 | 株式会社デンソー | 力学量センサの製造方法および力学量センサ |
JP5260342B2 (ja) * | 2009-01-30 | 2013-08-14 | ローム株式会社 | Memsセンサ |
JP2012255669A (ja) * | 2011-06-07 | 2012-12-27 | Nippon Dempa Kogyo Co Ltd | 加速度計測装置 |
DE102017203722B4 (de) | 2017-03-07 | 2021-11-25 | Brandenburgische Technische Universität (BTU) Cottbus-Senftenberg | Mems und verfahren zum herstellen derselben |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3877313A (en) * | 1973-07-23 | 1975-04-15 | Singer Co | Electrostatic accelerometer |
US4342227A (en) * | 1980-12-24 | 1982-08-03 | International Business Machines Corporation | Planar semiconductor three direction acceleration detecting device and method of fabrication |
JPS5944875A (ja) * | 1982-09-06 | 1984-03-13 | Nissan Motor Co Ltd | 梁構造体を有する半導体装置 |
FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US5343064A (en) * | 1988-03-18 | 1994-08-30 | Spangler Leland J | Fully integrated single-crystal silicon-on-insulator process, sensors and circuits |
US5081867A (en) * | 1988-09-30 | 1992-01-21 | Nec Corporation | Semiconductor sensor |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US4987779A (en) * | 1989-02-28 | 1991-01-29 | United Technologies Corporation | Pulse-driven accelerometer arrangement |
US5006487A (en) * | 1989-07-27 | 1991-04-09 | Honeywell Inc. | Method of making an electrostatic silicon accelerometer |
JP2617798B2 (ja) * | 1989-09-22 | 1997-06-04 | 三菱電機株式会社 | 積層型半導体装置およびその製造方法 |
JPH03204977A (ja) * | 1989-10-12 | 1991-09-06 | Yokogawa Electric Corp | 半導体加速度センサ |
US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
DE4000903C1 (de) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
EP0543901B1 (de) * | 1990-08-17 | 1995-10-04 | Analog Devices, Inc. | Monolithischer beschleunigungsmesser |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
JPH04268725A (ja) * | 1991-02-25 | 1992-09-24 | Canon Inc | 力学量検出センサおよびその製造方法 |
JP2804196B2 (ja) * | 1991-10-18 | 1998-09-24 | 株式会社日立製作所 | マイクロセンサ及びそれを用いた制御システム |
FR2687777B1 (fr) * | 1992-02-20 | 1994-05-20 | Sextant Avionique | Micro-capteur capacitif a faible capacite parasite et procede de fabrication. |
-
1992
- 1992-09-04 JP JP26301392A patent/JP3151956B2/ja not_active Expired - Fee Related
-
1993
- 1993-09-02 DE DE69309426T patent/DE69309426T2/de not_active Expired - Lifetime
- 1993-09-02 EP EP93919606A patent/EP0611967B1/de not_active Expired - Lifetime
- 1993-09-02 US US08/211,710 patent/US5561248A/en not_active Expired - Lifetime
- 1993-09-02 WO PCT/JP1993/001241 patent/WO1994006024A1/ja active IP Right Grant
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19817357B4 (de) * | 1998-04-18 | 2008-10-30 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE19954022B4 (de) * | 1998-11-13 | 2011-08-18 | DENSO CORPORATION, Aichi-pref. | Halbleitersensor für eine physikalische Grösse und Verfahren zu dessen Herstellung |
Also Published As
Publication number | Publication date |
---|---|
EP0611967B1 (de) | 1997-04-02 |
EP0611967A4 (de) | 1995-02-01 |
US5561248A (en) | 1996-10-01 |
DE69309426D1 (de) | 1997-05-07 |
WO1994006024A1 (en) | 1994-03-17 |
EP0611967A1 (de) | 1994-08-24 |
JPH0688837A (ja) | 1994-03-29 |
JP3151956B2 (ja) | 2001-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69309426T2 (de) | Beschleunigungsmessaufnehmer | |
DE69332294D1 (de) | Beschleunigungssensor | |
DE69432396D1 (de) | Beschleunigungsmessaufnehmer | |
DE69414739T2 (de) | Beschleunigungsmessaufnehmer | |
DE69232272T2 (de) | Beschleunigungsmessaufnehmer | |
DE69323618D1 (de) | Pyrheliometrischer sensor | |
DE69302953D1 (de) | Beschleunigungsmessaufnehmer | |
DE69405651D1 (de) | Beschleunigungsmessaufnehmer | |
DE69210179T2 (de) | Beschleunigungsmesser | |
DE69405962D1 (de) | Beschleunigungsmessaufnehmer | |
KR900020797U (ko) | 가속도 센서 | |
DE69416571D1 (de) | Beschleunigungsmessaufnehmer | |
DE69232149T2 (de) | Messgerät | |
DK123892D0 (da) | Accelerometer | |
BR9304744A (pt) | Conjunto medidor de força | |
DE69229996T2 (de) | Indikator | |
DE59304708D1 (de) | Abfüllwaage | |
DE9400990U1 (de) | Mechanischer Beschleunigungssensor | |
DE59309578D1 (de) | Beschleunigungssensor | |
KR900010398A (ko) | 가속도 감지기 | |
DE9400988U1 (de) | Mechanischer Beschleunigungssensor | |
KR930024097U (ko) | 진위치 게이지 | |
BR9103974A (pt) | Aferidor de manometros | |
KR940016823U (ko) | 다이얼 게이지 | |
DE69309562D1 (de) | Geschwindigkeitsmesser |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |