DE69309313D1 - Kalorimetrischer sensor - Google Patents

Kalorimetrischer sensor

Info

Publication number
DE69309313D1
DE69309313D1 DE69309313T DE69309313T DE69309313D1 DE 69309313 D1 DE69309313 D1 DE 69309313D1 DE 69309313 T DE69309313 T DE 69309313T DE 69309313 T DE69309313 T DE 69309313T DE 69309313 D1 DE69309313 D1 DE 69309313D1
Authority
DE
Germany
Prior art keywords
calorimetric sensor
calorimetric
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309313T
Other languages
English (en)
Other versions
DE69309313T2 (de
Inventor
Christoph Gerber
James Gimzewski
Bruno Reihl
Raeto Schlittler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69309313D1 publication Critical patent/DE69309313D1/de
Application granted granted Critical
Publication of DE69309313T2 publication Critical patent/DE69309313T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/34—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using mechanical temperature-responsive elements, e.g. bimetallic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G01N25/34—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using mechanical temperature-responsive elements, e.g. bimetallic
    • G01N25/36—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using mechanical temperature-responsive elements, e.g. bimetallic for investigating the composition of gas mixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4806—Details not adapted to a particular type of sample
    • G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
    • G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Electromagnetism (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69309313T 1993-07-06 1993-07-06 Kalorimetrischer sensor Expired - Fee Related DE69309313T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1993/001742 WO1995002180A1 (en) 1993-07-06 1993-07-06 Calorimetric sensor

Publications (2)

Publication Number Publication Date
DE69309313D1 true DE69309313D1 (de) 1997-04-30
DE69309313T2 DE69309313T2 (de) 1997-09-25

Family

ID=8165743

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309313T Expired - Fee Related DE69309313T2 (de) 1993-07-06 1993-07-06 Kalorimetrischer sensor

Country Status (5)

Country Link
US (1) US5737086A (de)
EP (2) EP0711410B1 (de)
JP (2) JP2785841B2 (de)
DE (1) DE69309313T2 (de)
WO (2) WO1995002180A1 (de)

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* Cited by examiner, † Cited by third party
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US6118124A (en) * 1996-01-18 2000-09-12 Lockheed Martin Energy Research Corporation Electromagnetic and nuclear radiation detector using micromechanical sensors
US5844238A (en) * 1996-03-27 1998-12-01 David Sarnoff Research Center, Inc. Infrared imager using room temperature capacitance sensor
US6339219B1 (en) * 1998-06-20 2002-01-15 Nikon Corporation Radiation imaging device and radiation detector
US6140646A (en) * 1998-12-17 2000-10-31 Sarnoff Corporation Direct view infrared MEMS structure
WO2000040938A1 (en) 1999-01-08 2000-07-13 Sarnoff Corporation Optical detectors using nulling for high linearity and large dynamic range
US6330824B1 (en) 1999-02-19 2001-12-18 The University Of North Carolina At Chapel Hill Photothermal modulation for oscillating mode atomic force microscopy in solution
US6514435B1 (en) 1999-03-05 2003-02-04 The United States Of America As Represented By The Secretary Of The Navy High density and fast persistent spectral holeburning in II-VI compounds for optical data storage
US6312959B1 (en) * 1999-03-30 2001-11-06 U.T. Battelle, Llc Method using photo-induced and thermal bending of MEMS sensors
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
AU7549700A (en) 1999-11-03 2001-05-14 International Business Machines Corporation Cantilever sensors and transducers
US6392233B1 (en) 2000-08-10 2002-05-21 Sarnoff Corporation Optomechanical radiant energy detector
US20050034542A1 (en) * 2002-02-08 2005-02-17 Jacob Thaysen Sensor comprising mechanical amplification of surface stress sensitive cantilever
US7344678B2 (en) 2002-11-15 2008-03-18 The Regents Of The University Of California Composite sensor membrane
JP4898097B2 (ja) * 2003-10-31 2012-03-14 セイコーインスツル株式会社 メカニカルセンサーおよびそれを用いた分析システム
GB0328054D0 (en) * 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
JP5043291B2 (ja) * 2004-06-30 2012-10-10 キヤノン株式会社 可燃性物質遮断装置および燃料電池
JP4933192B2 (ja) 2006-08-09 2012-05-16 キヤノン株式会社 可燃性ガス検出器、及び可燃性ガス検出器を搭載した燃料電池システム
WO2008086246A1 (en) * 2007-01-05 2008-07-17 Innovative American Technology, Inc. Advanced calorimetric spectroscopy for commercial applications
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
FR2922307B1 (fr) * 2007-10-10 2017-03-24 Centre Nat Rech Scient Procede et dispositif de caracterisation d'elements microscopiques
CN103026191B (zh) 2010-07-21 2015-08-19 第一太阳能有限公司 温度调整光谱仪
US8461529B2 (en) 2010-09-23 2013-06-11 Ut-Battelle, Llc Variable waveband infrared imager
US8458810B2 (en) 2011-04-07 2013-06-04 Michael E. MCCONNEY Scanning thermal twisting atomic force microscopy
GB2491806B (en) * 2011-05-25 2013-07-10 Microvisk Ltd Apparatus and method for measuring properties of a fluid
WO2014011621A1 (en) * 2012-07-10 2014-01-16 Massachusetts Institute Of Technology Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes
US9395388B2 (en) 2012-09-14 2016-07-19 The University Of North Carolina At Chapel Hill Methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy
US11209369B2 (en) * 2019-09-30 2021-12-28 United States Of America, As Represented By The Secretary Of The Army Measuring deflection to determine a characteristic of a cantilever

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
DE875881C (de) * 1951-06-17 1953-05-07 Concordia Elek Zitaets Ag Gasanzeigegeraet, insbesondere Schlagwetteranzeiger, mit Temperaturausgleich
US2745721A (en) * 1952-06-13 1956-05-15 Tiffany Carter Combustible vapor detector
US2881274A (en) * 1957-06-24 1959-04-07 Gen Controls Co Gas detector and system for gas detection
US3887937A (en) * 1972-09-21 1975-06-03 Massachusetts Inst Technology Semiconductor sensor
US3959764A (en) * 1974-10-09 1976-05-25 Dictaphone Corporation Gas analyzing element
US4184768A (en) * 1977-11-04 1980-01-22 The Johns Hopkins University Self-calibrating photoacoustic apparatus for measuring light intensity and light absorption
CA1128334A (en) * 1977-12-26 1982-07-27 Evgeny I. Lunev Apparatus and system for measuring power of heat radiation
US4412744A (en) * 1981-06-01 1983-11-01 E. I. Du Pont De Nemours & Co. Absolute spectrophotometer
GB2169418B (en) * 1985-01-04 1988-05-25 Stc Plc Infra red filter
US4762426A (en) * 1986-12-19 1988-08-09 Honeywell Inc. Remote passive temperature sensor
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
US5003815A (en) * 1989-10-20 1991-04-02 International Business Machines Corporation Atomic photo-absorption force microscope
US5363697A (en) * 1991-04-30 1994-11-15 Matsushita Electric Industrial Co., Ltd. Scanning probe microscope, molecular processing method using the scanning probe microscope and DNA base arrangement detecting method
US5545897A (en) * 1994-10-04 1996-08-13 Santa Barbara Research Center Optically-based chemical detection system

Also Published As

Publication number Publication date
WO1995002170A1 (en) 1995-01-19
WO1995002180A1 (en) 1995-01-19
EP0711410A1 (de) 1996-05-15
EP0713574A1 (de) 1996-05-29
JPH08508571A (ja) 1996-09-10
EP0711410B1 (de) 1997-03-26
US5737086A (en) 1998-04-07
JP2787960B2 (ja) 1998-08-20
JP2785841B2 (ja) 1998-08-13
DE69309313T2 (de) 1997-09-25
JPH08509063A (ja) 1996-09-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee